JPH0476033U - - Google Patents
Info
- Publication number
- JPH0476033U JPH0476033U JP11949390U JP11949390U JPH0476033U JP H0476033 U JPH0476033 U JP H0476033U JP 11949390 U JP11949390 U JP 11949390U JP 11949390 U JP11949390 U JP 11949390U JP H0476033 U JPH0476033 U JP H0476033U
- Authority
- JP
- Japan
- Prior art keywords
- furnace
- core tube
- insertion port
- shaped member
- wafer insertion
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 238000003780 insertion Methods 0.000 claims description 3
- 230000037431 insertion Effects 0.000 claims description 3
- 235000012431 wafers Nutrition 0.000 claims 2
- 239000004065 semiconductor Substances 0.000 claims 1
- HBMJWWWQQXIZIP-UHFFFAOYSA-N silicon carbide Chemical compound [Si+]#[C-] HBMJWWWQQXIZIP-UHFFFAOYSA-N 0.000 claims 1
- 229910010271 silicon carbide Inorganic materials 0.000 claims 1
- 238000010438 heat treatment Methods 0.000 description 2
- 238000009413 insulation Methods 0.000 description 1
Landscapes
- Ceramic Products (AREA)
Description
第１図は本考案の一実施例の炉芯管を使用した
熱処理炉の断面図、第２図は従来の炉芯管を使用
した熱処理炉の断面図、第３図は本考案の炉芯管
と従来の炉芯管のウエハ挿入口近辺の温度勾配を
表わすグラフである。
１，１１……炉芯管、２，１２……ガス導入管
、３，１３……ウエハ挿入口、４，１４……炉体
、５，１５……ヒータ、６，１６……断熱キヤツ
プ、７……リング状コイルバネ、１７……テーパ
を付けたリング状部材。
Figure 1 is a cross-sectional view of a heat treatment furnace using a furnace core tube according to an embodiment of the present invention, Figure 2 is a cross-sectional view of a heat treatment furnace using a conventional furnace core tube, and Figure 3 is a furnace core of the present invention. 3 is a graph showing the temperature gradient near the wafer insertion port of a tube and a conventional furnace core tube. 1, 11... Furnace core tube, 2, 12... Gas introduction pipe, 3, 13... Wafer insertion port, 4, 14... Furnace body, 5, 15... Heater, 6, 16... Heat insulation cap, 7... Ring-shaped coil spring, 17... Tapered ring-shaped member.
Claims (1)
、炉体から突出している炉芯管のウエハ挿入口側
の部分に、テーパをつけた耐熱性のリング状部材
を装着したことを特徴とする炭化ケイ素製炉芯管
。 A silicon carbide furnace for various types of processing of semiconductor wafers, characterized in that a tapered heat-resistant ring-shaped member is attached to the wafer insertion port side portion of the furnace core tube protruding from the furnace body. Core tube.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11949390U JPH0476033U (en) | 1990-11-15 | 1990-11-15 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11949390U JPH0476033U (en) | 1990-11-15 | 1990-11-15 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| JPH0476033U true JPH0476033U (en) | 1992-07-02 |
Family
ID=31867449
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP11949390U Pending JPH0476033U (en) | 1990-11-15 | 1990-11-15 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0476033U (en) |
-
1990
- 1990-11-15 JP JP11949390U patent/JPH0476033U/ja active Pending