JPH0426051B2 - - Google Patents

Info

Publication number
JPH0426051B2
JPH0426051B2 JP58136955A JP13695583A JPH0426051B2 JP H0426051 B2 JPH0426051 B2 JP H0426051B2 JP 58136955 A JP58136955 A JP 58136955A JP 13695583 A JP13695583 A JP 13695583A JP H0426051 B2 JPH0426051 B2 JP H0426051B2
Authority
JP
Japan
Prior art keywords
diaphragm
pressure sensor
damage
semiconductor pressure
circuit
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58136955A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6029627A (ja
Inventor
Satoru Oohata
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP58136955A priority Critical patent/JPS6029627A/ja
Publication of JPS6029627A publication Critical patent/JPS6029627A/ja
Publication of JPH0426051B2 publication Critical patent/JPH0426051B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
    • G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
    • G01L9/0041—Transmitting or indicating the displacement of flexible diaphragms
    • G01L9/0051—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance
    • G01L9/0052—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements
    • G01L9/0054—Transmitting or indicating the displacement of flexible diaphragms using variations in ohmic resistance of piezoresistive elements integral with a semiconducting diaphragm

Landscapes

  • Physics & Mathematics (AREA)
  • General Physics & Mathematics (AREA)
  • Measuring Fluid Pressure (AREA)
JP58136955A 1983-07-27 1983-07-27 半導体圧力センサ Granted JPS6029627A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP58136955A JPS6029627A (ja) 1983-07-27 1983-07-27 半導体圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP58136955A JPS6029627A (ja) 1983-07-27 1983-07-27 半導体圧力センサ

Publications (2)

Publication Number Publication Date
JPS6029627A JPS6029627A (ja) 1985-02-15
JPH0426051B2 true JPH0426051B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1992-05-06

Family

ID=15187408

Family Applications (1)

Application Number Title Priority Date Filing Date
JP58136955A Granted JPS6029627A (ja) 1983-07-27 1983-07-27 半導体圧力センサ

Country Status (1)

Country Link
JP (1) JPS6029627A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011010571A1 (ja) 2009-07-24 2011-01-27 ローム株式会社 半導体圧力センサ、圧力センサ装置、電子機器、および半導体圧力センサの製造方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2633124B2 (ja) * 1991-10-25 1997-07-23 山武ハネウエル株式会社 ダイアフラムセンサ
JP2015108581A (ja) * 2013-12-05 2015-06-11 株式会社デンソー 圧力センサ
JP7582830B2 (ja) * 2020-10-08 2024-11-13 アズビル株式会社 圧力測定装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS581548B2 (ja) * 1977-03-17 1983-01-11 株式会社横河電機製作所 薄膜ストレンゲ−ジ変換器
JPS57197872A (en) * 1981-05-29 1982-12-04 Toshiba Corp Semiconductor pressure detecting element

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2011010571A1 (ja) 2009-07-24 2011-01-27 ローム株式会社 半導体圧力センサ、圧力センサ装置、電子機器、および半導体圧力センサの製造方法

Also Published As

Publication number Publication date
JPS6029627A (ja) 1985-02-15

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