JPS57197872A - Semiconductor pressure detecting element - Google Patents
Semiconductor pressure detecting elementInfo
- Publication number
- JPS57197872A JPS57197872A JP8087181A JP8087181A JPS57197872A JP S57197872 A JPS57197872 A JP S57197872A JP 8087181 A JP8087181 A JP 8087181A JP 8087181 A JP8087181 A JP 8087181A JP S57197872 A JPS57197872 A JP S57197872A
- Authority
- JP
- Japan
- Prior art keywords
- section
- detecting element
- pressure receiving
- semiconductor pressure
- receiving diaphragm
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Pending
Links
- 239000004065 semiconductor Substances 0.000 title abstract 3
- 230000005856 abnormality Effects 0.000 abstract 2
- 238000009792 diffusion process Methods 0.000 abstract 2
- 239000000758 substrate Substances 0.000 abstract 2
- 239000013078 crystal Substances 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L29/00—Semiconductor devices adapted for rectifying, amplifying, oscillating or switching, or capacitors or resistors with at least one potential-jump barrier or surface barrier, e.g. PN junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
- H01L29/66—Types of semiconductor device ; Multistep manufacturing processes therefor
- H01L29/84—Types of semiconductor device ; Multistep manufacturing processes therefor controllable by variation of applied mechanical force, e.g. of pressure
Abstract
PURPOSE:To enable the check of the abnormality of dielectric resistance, and to improve reliability by arranging a diffusion resistor for detecting fracture at the maximum stress generating position of the pressure receiving diaphragm section of the semiconductor pressure detecting element. CONSTITUTION:A plurality of strain gate resistors 4 having a reverse conduction type to a Si single crystal substrate 1 and metallic electrodes 7 for external connection are formed to the surface at the reverse side to the concave section of the substrate 1 with the pressure receiving diaphragm section consisting of a thin section, to one surface of a disk thereof the concentrical concave section is shaped, while the diffusion resistor 20 for detecting fracture is molded at the maximum stress generating position of the pressure receiving diaphragm section. Accordingly, the abnormality of dielectric resistance is easily checked, and the semiconductor pressure detecting element having high reliability and safety can be obtained.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8087181A JPS57197872A (en) | 1981-05-29 | 1981-05-29 | Semiconductor pressure detecting element |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP8087181A JPS57197872A (en) | 1981-05-29 | 1981-05-29 | Semiconductor pressure detecting element |
Publications (1)
Publication Number | Publication Date |
---|---|
JPS57197872A true JPS57197872A (en) | 1982-12-04 |
Family
ID=13730399
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP8087181A Pending JPS57197872A (en) | 1981-05-29 | 1981-05-29 | Semiconductor pressure detecting element |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS57197872A (en) |
Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6029627A (en) * | 1983-07-27 | 1985-02-15 | Toshiba Corp | Semiconductor pressure sensor |
WO1996022515A1 (en) * | 1995-01-19 | 1996-07-25 | Honeywell Inc. | Apparatus for detection of a diaphragm rupture in a pressure sensor |
Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5595373A (en) * | 1979-01-11 | 1980-07-19 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
-
1981
- 1981-05-29 JP JP8087181A patent/JPS57197872A/en active Pending
Patent Citations (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5595373A (en) * | 1979-01-11 | 1980-07-19 | Nissan Motor Co Ltd | Semiconductor pressure sensor |
Cited By (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6029627A (en) * | 1983-07-27 | 1985-02-15 | Toshiba Corp | Semiconductor pressure sensor |
JPH0426051B2 (en) * | 1983-07-27 | 1992-05-06 | Tokyo Shibaura Electric Co | |
WO1996022515A1 (en) * | 1995-01-19 | 1996-07-25 | Honeywell Inc. | Apparatus for detection of a diaphragm rupture in a pressure sensor |
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