JPH0425256U - - Google Patents

Info

Publication number
JPH0425256U
JPH0425256U JP6689090U JP6689090U JPH0425256U JP H0425256 U JPH0425256 U JP H0425256U JP 6689090 U JP6689090 U JP 6689090U JP 6689090 U JP6689090 U JP 6689090U JP H0425256 U JPH0425256 U JP H0425256U
Authority
JP
Japan
Prior art keywords
diffusion
gauge
gauges
central
strain
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP6689090U
Other languages
English (en)
Other versions
JPH085570Y2 (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1990066890U priority Critical patent/JPH085570Y2/ja
Publication of JPH0425256U publication Critical patent/JPH0425256U/ja
Application granted granted Critical
Publication of JPH085570Y2 publication Critical patent/JPH085570Y2/ja
Anticipated expiration legal-status Critical
Expired - Fee Related legal-status Critical Current

Links

Landscapes

  • Measuring Fluid Pressure (AREA)
  • Pressure Sensors (AREA)

Description

【図面の簡単な説明】
第１図は本考案の圧力センサを構成するシリコ
ンダイヤフラムの平面図、第２図は他の実施例を
示す平面図、第３図は従来シリコンダイヤフラム
の平面図、第４図はブリツジ回路図である。 １……シリコンダイヤフラムの起歪領域、２…
…同非起歪領域、３……拡散ゲージ、４……疑似
拡散ゲージ、５……疑似拡散層。

Claims (1)

    【実用新案登録請求の範囲】
  1. シリコンダイヤフラムの起歪領域の中央部に一
    対の中央拡散ゲージを設け、該中央拡散ゲージを
    中心とした対象位置の前記起歪領域周縁部に外方
    拡散ゲージを設け、前記拡散ゲージが一列配置さ
    れていると共に、前記外方拡散ゲージと前記中央
    拡散ゲージを同じ抵抗値に形成させるための疑似
    拡散層または疑似拡散ゲージを設けた圧力センサ
    。
JP1990066890U 1990-06-25 1990-06-25 圧力センサ Expired - Fee Related JPH085570Y2 (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1990066890U JPH085570Y2 (ja) 1990-06-25 1990-06-25 圧力センサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1990066890U JPH085570Y2 (ja) 1990-06-25 1990-06-25 圧力センサ

Publications (2)

Publication Number Publication Date
JPH0425256U true JPH0425256U (ja) 1992-02-28
JPH085570Y2 JPH085570Y2 (ja) 1996-02-14

Family

ID=31599986

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1990066890U Expired - Fee Related JPH085570Y2 (ja) 1990-06-25 1990-06-25 圧力センサ

Country Status (1)

Country Link
JP (1) JPH085570Y2 (ja)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006003182A (ja) * 2004-06-17 2006-01-05 Hitachi Ltd 力学量測定装置
EP3772641A1 (en) * 2019-08-09 2021-02-10 Rosemount Aerospace Inc. Thermally-matched piezoresistive elements in bridges

Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658440U (ja) * 1979-10-08 1981-05-19
JPS5710271A (en) * 1980-06-23 1982-01-19 Fuji Electric Co Ltd Semiconductor pressure converter
JPS6170765A (ja) * 1984-09-14 1986-04-11 Fujikura Ltd 半導体圧力センサ−
JPS63114048U (ja) * 1987-01-16 1988-07-22

Patent Citations (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5658440U (ja) * 1979-10-08 1981-05-19
JPS5710271A (en) * 1980-06-23 1982-01-19 Fuji Electric Co Ltd Semiconductor pressure converter
JPS6170765A (ja) * 1984-09-14 1986-04-11 Fujikura Ltd 半導体圧力センサ−
JPS63114048U (ja) * 1987-01-16 1988-07-22

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006003182A (ja) * 2004-06-17 2006-01-05 Hitachi Ltd 力学量測定装置
JP4617732B2 (ja) * 2004-06-17 2011-01-26 株式会社日立製作所 力学量測定装置
EP3772641A1 (en) * 2019-08-09 2021-02-10 Rosemount Aerospace Inc. Thermally-matched piezoresistive elements in bridges
US11099093B2 (en) 2019-08-09 2021-08-24 Rosemount Aerospace Inc. Thermally-matched piezoresistive elements in bridges

Also Published As

Publication number Publication date
JPH085570Y2 (ja) 1996-02-14

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees