JPH0425234B2 - - Google Patents
Info
- Publication number
- JPH0425234B2 JPH0425234B2 JP9717784A JP9717784A JPH0425234B2 JP H0425234 B2 JPH0425234 B2 JP H0425234B2 JP 9717784 A JP9717784 A JP 9717784A JP 9717784 A JP9717784 A JP 9717784A JP H0425234 B2 JPH0425234 B2 JP H0425234B2
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- track
- charged particles
- irradiation
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000010409 thin film Substances 0.000 claims description 64
- 239000002245 particle Substances 0.000 claims description 24
- 239000000919 ceramic Substances 0.000 claims description 19
- 238000000034 method Methods 0.000 claims description 13
- 239000011148 porous material Substances 0.000 claims description 11
- 238000004519 manufacturing process Methods 0.000 claims description 6
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 27
- 238000005530 etching Methods 0.000 description 13
- 239000000463 material Substances 0.000 description 11
- 239000000126 substance Substances 0.000 description 11
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 7
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 6
- 239000007788 liquid Substances 0.000 description 5
- 238000010586 diagram Methods 0.000 description 4
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 3
- 239000007864 aqueous solution Substances 0.000 description 3
- 239000012528 membrane Substances 0.000 description 3
- 239000000243 solution Substances 0.000 description 3
- 238000004364 calculation method Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 201000003373 familial cold autoinflammatory syndrome 3 Diseases 0.000 description 1
- 239000010408 film Substances 0.000 description 1
- 238000001914 filtration Methods 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 239000002861 polymer material Substances 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9717784A JPS60239375A (ja) | 1984-05-14 | 1984-05-14 | 多孔質セラミツク薄膜並びにその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9717784A JPS60239375A (ja) | 1984-05-14 | 1984-05-14 | 多孔質セラミツク薄膜並びにその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239375A JPS60239375A (ja) | 1985-11-28 |
| JPH0425234B2 true JPH0425234B2 (enrdf_load_stackoverflow) | 1992-04-30 |
Family
ID=14185298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9717784A Granted JPS60239375A (ja) | 1984-05-14 | 1984-05-14 | 多孔質セラミツク薄膜並びにその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239375A (enrdf_load_stackoverflow) |
-
1984
- 1984-05-14 JP JP9717784A patent/JPS60239375A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60239375A (ja) | 1985-11-28 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |