JPS60239375A - 多孔質セラミツク薄膜並びにその製造法 - Google Patents
多孔質セラミツク薄膜並びにその製造法Info
- Publication number
- JPS60239375A JPS60239375A JP9717784A JP9717784A JPS60239375A JP S60239375 A JPS60239375 A JP S60239375A JP 9717784 A JP9717784 A JP 9717784A JP 9717784 A JP9717784 A JP 9717784A JP S60239375 A JPS60239375 A JP S60239375A
- Authority
- JP
- Japan
- Prior art keywords
- thin film
- track
- charged particles
- irradiation
- speed
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Granted
Links
- 239000000919 ceramic Substances 0.000 title claims description 22
- 238000004519 manufacturing process Methods 0.000 title claims description 7
- 239000012528 membrane Substances 0.000 title description 5
- 239000010409 thin film Substances 0.000 claims description 60
- 239000002245 particle Substances 0.000 claims description 24
- 239000011148 porous material Substances 0.000 claims description 12
- 239000000126 substance Substances 0.000 claims description 9
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 150000002500 ions Chemical class 0.000 description 25
- 239000000463 material Substances 0.000 description 13
- 238000005530 etching Methods 0.000 description 12
- 238000000034 method Methods 0.000 description 8
- 239000007788 liquid Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 4
- 238000005516 engineering process Methods 0.000 description 4
- 239000007864 aqueous solution Substances 0.000 description 3
- NBIIXXVUZAFLBC-UHFFFAOYSA-N Phosphoric acid Chemical compound OP(O)(O)=O NBIIXXVUZAFLBC-UHFFFAOYSA-N 0.000 description 2
- 239000002253 acid Substances 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 2
- 238000004364 calculation method Methods 0.000 description 2
- 238000005260 corrosion Methods 0.000 description 2
- 230000007797 corrosion Effects 0.000 description 2
- 239000013078 crystal Substances 0.000 description 2
- 239000006260 foam Substances 0.000 description 2
- 238000000926 separation method Methods 0.000 description 2
- 238000005299 abrasion Methods 0.000 description 1
- 229910000147 aluminium phosphate Inorganic materials 0.000 description 1
- 238000013459 approach Methods 0.000 description 1
- 229910010293 ceramic material Inorganic materials 0.000 description 1
- 238000003486 chemical etching Methods 0.000 description 1
- 238000005520 cutting process Methods 0.000 description 1
- 238000007598 dipping method Methods 0.000 description 1
- 238000009826 distribution Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000002474 experimental method Methods 0.000 description 1
- 239000004088 foaming agent Substances 0.000 description 1
- 230000005484 gravity Effects 0.000 description 1
- 238000010884 ion-beam technique Methods 0.000 description 1
- 239000002184 metal Substances 0.000 description 1
- 238000013508 migration Methods 0.000 description 1
- 230000005012 migration Effects 0.000 description 1
- 229910052755 nonmetal Inorganic materials 0.000 description 1
- 230000035515 penetration Effects 0.000 description 1
- 238000007747 plating Methods 0.000 description 1
- 229920000515 polycarbonate Polymers 0.000 description 1
- 239000004417 polycarbonate Substances 0.000 description 1
- 229920000642 polymer Polymers 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 238000011160 research Methods 0.000 description 1
- 229910052594 sapphire Inorganic materials 0.000 description 1
- 239000010980 sapphire Substances 0.000 description 1
- 239000000243 solution Substances 0.000 description 1
- 238000012546 transfer Methods 0.000 description 1
- 238000004506 ultrasonic cleaning Methods 0.000 description 1
- 238000007740 vapor deposition Methods 0.000 description 1
Landscapes
- Porous Artificial Stone Or Porous Ceramic Products (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9717784A JPS60239375A (ja) | 1984-05-14 | 1984-05-14 | 多孔質セラミツク薄膜並びにその製造法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9717784A JPS60239375A (ja) | 1984-05-14 | 1984-05-14 | 多孔質セラミツク薄膜並びにその製造法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60239375A true JPS60239375A (ja) | 1985-11-28 |
| JPH0425234B2 JPH0425234B2 (enrdf_load_stackoverflow) | 1992-04-30 |
Family
ID=14185298
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP9717784A Granted JPS60239375A (ja) | 1984-05-14 | 1984-05-14 | 多孔質セラミツク薄膜並びにその製造法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60239375A (enrdf_load_stackoverflow) |
-
1984
- 1984-05-14 JP JP9717784A patent/JPS60239375A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPH0425234B2 (enrdf_load_stackoverflow) | 1992-04-30 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| Apel | Track etching technique in membrane technology | |
| Liu et al. | Solid‐state nanopore array: manufacturing and applications | |
| US20100181288A1 (en) | Method of fabrication of micro- and nanofilters | |
| EP0488665A1 (en) | Adsorbents for the removal of volatile substances from aqueous systems | |
| CN109786757A (zh) | 覆碳泡沫铝复合物及其制备方法、集流体和过滤材料 | |
| JPS58176221A (ja) | 被覆を有する電解用イオン交換膜の製造方法 | |
| Li et al. | Microstructured silicon anodes for lithium-ion batteries | |
| Li et al. | Facile synthesis and exfoliation of micro‐sized LDH to fabricate 2D membranes towards Mg/Li separation | |
| JPS62294407A (ja) | プラズマ処理による親水性精密濾過膜の製造 | |
| CN106011969A (zh) | 镍基上金纳米颗粒阵列及其制备方法 | |
| JPS60239375A (ja) | 多孔質セラミツク薄膜並びにその製造法 | |
| Kravets et al. | Fabrication and electrochemical properties of polymer bilayered membranes | |
| CN102163704A (zh) | 一种锂电池隔膜及其生产方法 | |
| US4115303A (en) | Method of fabrication of porous macromolecular materials having an internal lining and materials obtained by means of said method | |
| JPS61149472A (ja) | フイルム | |
| JP2610676B2 (ja) | 多孔性分離膜の製造方法 | |
| CN102760850A (zh) | 一种高强度锂电池隔膜及其生产方法 | |
| JPS60243287A (ja) | 多孔質アモルファス金属薄膜並びにその製造法 | |
| JP6224269B1 (ja) | 水処理装置及びこれに用いる導電性多孔質炭素材料 | |
| JPS61149473A (ja) | フイルム | |
| JPH0338228A (ja) | 多孔性高分子膜及びその製造方法 | |
| Spohr | Real-time control of track etching and recent experiments relevant to micro and nano fabrication | |
| Oleinikov et al. | Polyethyleneterephthalate track membranes with conical pores: Etching by water-alcohol alkali solutions | |
| Small et al. | Conical nanopores fabricated via a pressure-biased chemical etch | |
| JPH0360713A (ja) | 多孔性炭素膜及びその製造方法 |
Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| EXPY | Cancellation because of completion of term |