JPH042347Y2 - - Google Patents
Info
- Publication number
- JPH042347Y2 JPH042347Y2 JP19473487U JP19473487U JPH042347Y2 JP H042347 Y2 JPH042347 Y2 JP H042347Y2 JP 19473487 U JP19473487 U JP 19473487U JP 19473487 U JP19473487 U JP 19473487U JP H042347 Y2 JPH042347 Y2 JP H042347Y2
- Authority
- JP
- Japan
- Prior art keywords
- locker
- dust
- free
- air
- general
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000428 dust Substances 0.000 description 8
- 238000011109 contamination Methods 0.000 description 6
- 238000004378 air conditioning Methods 0.000 description 3
- 238000012864 cross contamination Methods 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 2
- 238000001179 sorption measurement Methods 0.000 description 2
- 238000011144 upstream manufacturing Methods 0.000 description 2
- 238000005516 engineering process Methods 0.000 description 1
- 230000007849 functional defect Effects 0.000 description 1
- 230000002265 prevention Effects 0.000 description 1
- 238000009423 ventilation Methods 0.000 description 1
Landscapes
- Ventilation (AREA)
- Filtering Of Dispersed Particles In Gases (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19473487U JPH042347Y2 (US06272168-20010807-M00014.png) | 1987-12-22 | 1987-12-22 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP19473487U JPH042347Y2 (US06272168-20010807-M00014.png) | 1987-12-22 | 1987-12-22 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPH01100039U JPH01100039U (US06272168-20010807-M00014.png) | 1989-07-05 |
| JPH042347Y2 true JPH042347Y2 (US06272168-20010807-M00014.png) | 1992-01-27 |
Family
ID=31485450
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP19473487U Expired JPH042347Y2 (US06272168-20010807-M00014.png) | 1987-12-22 | 1987-12-22 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH042347Y2 (US06272168-20010807-M00014.png) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2002266120A (ja) * | 2001-03-12 | 2002-09-18 | Hitachi Plant Eng & Constr Co Ltd | 無塵衣及びクリーンロッカ |
-
1987
- 1987-12-22 JP JP19473487U patent/JPH042347Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPH01100039U (US06272168-20010807-M00014.png) | 1989-07-05 |
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