JPH0422033B2 - - Google Patents
Info
- Publication number
- JPH0422033B2 JPH0422033B2 JP57158136A JP15813682A JPH0422033B2 JP H0422033 B2 JPH0422033 B2 JP H0422033B2 JP 57158136 A JP57158136 A JP 57158136A JP 15813682 A JP15813682 A JP 15813682A JP H0422033 B2 JPH0422033 B2 JP H0422033B2
- Authority
- JP
- Japan
- Prior art keywords
- semiconductor
- layer
- semiconductor layer
- laser device
- laser
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000004065 semiconductor Substances 0.000 claims description 40
- 230000003287 optical effect Effects 0.000 claims description 8
- 238000005253 cladding Methods 0.000 description 14
- 230000010355 oscillation Effects 0.000 description 8
- 239000000758 substrate Substances 0.000 description 5
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 4
- 229920002120 photoresistant polymer Polymers 0.000 description 4
- 239000013078 crystal Substances 0.000 description 3
- 238000009792 diffusion process Methods 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910004298 SiO 2 Inorganic materials 0.000 description 2
- 238000005229 chemical vapour deposition Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 239000012535 impurity Substances 0.000 description 2
- 238000005259 measurement Methods 0.000 description 2
- 229910018072 Al 2 O 3 Inorganic materials 0.000 description 1
- 229910000980 Aluminium gallium arsenide Inorganic materials 0.000 description 1
- 238000010521 absorption reaction Methods 0.000 description 1
- 201000009310 astigmatism Diseases 0.000 description 1
- 230000005516 deep trap Effects 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 125000005842 heteroatom Chemical group 0.000 description 1
- 230000002452 interceptive effect Effects 0.000 description 1
- 230000031700 light absorption Effects 0.000 description 1
- 239000007791 liquid phase Substances 0.000 description 1
- 230000003595 spectral effect Effects 0.000 description 1
- 238000001228 spectrum Methods 0.000 description 1
- 238000004544 sputter deposition Methods 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/223—Buried stripe structure
- H01S5/2232—Buried stripe structure with inner confining structure between the active layer and the lower electrode
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01S—DEVICES USING THE PROCESS OF LIGHT AMPLIFICATION BY STIMULATED EMISSION OF RADIATION [LASER] TO AMPLIFY OR GENERATE LIGHT; DEVICES USING STIMULATED EMISSION OF ELECTROMAGNETIC RADIATION IN WAVE RANGES OTHER THAN OPTICAL
- H01S5/00—Semiconductor lasers
- H01S5/20—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers
- H01S5/22—Structure or shape of the semiconductor body to guide the optical wave ; Confining structures perpendicular to the optical axis, e.g. index or gain guiding, stripe geometry, broad area lasers, gain tailoring, transverse or lateral reflectors, special cladding structures, MQW barrier reflection layers having a ridge or stripe structure
- H01S5/223—Buried stripe structure
- H01S5/2232—Buried stripe structure with inner confining structure between the active layer and the lower electrode
- H01S5/2234—Buried stripe structure with inner confining structure between the active layer and the lower electrode having a structured substrate surface
Landscapes
- Physics & Mathematics (AREA)
- Geometry (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Electromagnetism (AREA)
- Optics & Photonics (AREA)
- Semiconductor Lasers (AREA)
Priority Applications (4)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57158136A JPS5947790A (ja) | 1982-09-13 | 1982-09-13 | 半導体レ−ザ装置 |
EP83108998A EP0106152B1 (en) | 1982-09-13 | 1983-09-12 | Semiconductor laser device |
DE8383108998T DE3380387D1 (en) | 1982-09-13 | 1983-09-12 | Semiconductor laser device |
US06/531,710 US4563764A (en) | 1982-09-13 | 1983-09-13 | Semiconductor laser device |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP57158136A JPS5947790A (ja) | 1982-09-13 | 1982-09-13 | 半導体レ−ザ装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5947790A JPS5947790A (ja) | 1984-03-17 |
JPH0422033B2 true JPH0422033B2 (ru) | 1992-04-15 |
Family
ID=15665055
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP57158136A Granted JPS5947790A (ja) | 1982-09-13 | 1982-09-13 | 半導体レ−ザ装置 |
Country Status (4)
Country | Link |
---|---|
US (1) | US4563764A (ru) |
EP (1) | EP0106152B1 (ru) |
JP (1) | JPS5947790A (ru) |
DE (1) | DE3380387D1 (ru) |
Families Citing this family (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS6140027A (ja) * | 1984-07-31 | 1986-02-26 | Matsushita Electric Ind Co Ltd | 結晶成長法 |
US5075743A (en) * | 1989-06-06 | 1991-12-24 | Cornell Research Foundation, Inc. | Quantum well optical device on silicon |
JP3278951B2 (ja) * | 1992-10-23 | 2002-04-30 | ソニー株式会社 | オーミック電極の形成方法 |
US5537433A (en) * | 1993-07-22 | 1996-07-16 | Sharp Kabushiki Kaisha | Semiconductor light emitter |
Family Cites Families (6)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5252999Y2 (ru) * | 1972-04-18 | 1977-12-01 | ||
JPS49120992U (ru) * | 1973-02-13 | 1974-10-16 | ||
NL184715C (nl) * | 1978-09-20 | 1989-10-02 | Hitachi Ltd | Halfgeleiderlaserinrichting. |
CA1137605A (en) * | 1979-01-15 | 1982-12-14 | Donald R. Scifres | High output power laser |
US4280106A (en) * | 1979-05-15 | 1981-07-21 | Xerox Corporation | Striped substrate planar laser |
JPS5640292A (en) * | 1979-09-11 | 1981-04-16 | Fujitsu Ltd | Semiconductor laser |
-
1982
- 1982-09-13 JP JP57158136A patent/JPS5947790A/ja active Granted
-
1983
- 1983-09-12 EP EP83108998A patent/EP0106152B1/en not_active Expired
- 1983-09-12 DE DE8383108998T patent/DE3380387D1/de not_active Expired
- 1983-09-13 US US06/531,710 patent/US4563764A/en not_active Expired - Lifetime
Also Published As
Publication number | Publication date |
---|---|
DE3380387D1 (en) | 1989-09-14 |
JPS5947790A (ja) | 1984-03-17 |
EP0106152A3 (en) | 1986-03-05 |
US4563764A (en) | 1986-01-07 |
EP0106152A2 (en) | 1984-04-25 |
EP0106152B1 (en) | 1989-08-09 |
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