JPH0420753Y2 - - Google Patents

Info

Publication number
JPH0420753Y2
JPH0420753Y2 JP1987116751U JP11675187U JPH0420753Y2 JP H0420753 Y2 JPH0420753 Y2 JP H0420753Y2 JP 1987116751 U JP1987116751 U JP 1987116751U JP 11675187 U JP11675187 U JP 11675187U JP H0420753 Y2 JPH0420753 Y2 JP H0420753Y2
Authority
JP
Japan
Prior art keywords
resist solution
container
wafer
supply device
resist
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1987116751U
Other languages
English (en)
Japanese (ja)
Other versions
JPS6423449U (OSRAM
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1987116751U priority Critical patent/JPH0420753Y2/ja
Publication of JPS6423449U publication Critical patent/JPS6423449U/ja
Application granted granted Critical
Publication of JPH0420753Y2 publication Critical patent/JPH0420753Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Details Of Rigid Or Semi-Rigid Containers (AREA)
  • Coating Apparatus (AREA)
JP1987116751U 1987-07-31 1987-07-31 Expired JPH0420753Y2 (OSRAM)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1987116751U JPH0420753Y2 (OSRAM) 1987-07-31 1987-07-31

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1987116751U JPH0420753Y2 (OSRAM) 1987-07-31 1987-07-31

Publications (2)

Publication Number Publication Date
JPS6423449U JPS6423449U (OSRAM) 1989-02-08
JPH0420753Y2 true JPH0420753Y2 (OSRAM) 1992-05-12

Family

ID=31359573

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1987116751U Expired JPH0420753Y2 (OSRAM) 1987-07-31 1987-07-31

Country Status (1)

Country Link
JP (1) JPH0420753Y2 (OSRAM)

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5521980U (OSRAM) * 1978-07-31 1980-02-13
JPS57117315U (OSRAM) * 1981-01-12 1982-07-21
JPS6119067U (ja) * 1984-07-10 1986-02-04 油谷重工株式会社 油圧シヨベルの操縦装置

Also Published As

Publication number Publication date
JPS6423449U (OSRAM) 1989-02-08

Similar Documents

Publication Publication Date Title
KR970077117A (ko) 반도체 처리용 제어가능한 가압된 처리 챔버를 갖는 코우터
JPH0420753Y2 (OSRAM)
JP2002531330A (ja) ポンプ接続装置
US20030150882A1 (en) Static device for air replenishing a liquid product dispenser
JPH0920359A (ja) 溶液供給装置
JP2005211874A (ja) 液体材料塗布方法及び装置
TW473849B (en) Method of manufacturing semiconductor device
JPH078446Y2 (ja) 液体容器
JPH04196220A (ja) 密閉型容器
JPS5950525A (ja) フオトレジストの塗布装置
JPH0128671Y2 (OSRAM)
JPH0429857Y2 (OSRAM)
JPH0356163A (ja) スピンナーヘッド
JPH0241895B2 (OSRAM)
JPH0353690Y2 (OSRAM)
KR20240081839A (ko) 기판 처리 장치 및 기판 처리 방법
JPH0655243U (ja) Ｉｃ製造におけるレジスト塗布装置
JPH0367264A (ja) 感光体塗布装置
JPS60193339A (ja) レジスト膜塗布方法
JP2000355328A (ja) 希釈液容器
JPH0612867Y2 (ja) クリーム状流体の分与容器
US6360959B1 (en) Dual resist dispense nozzle for wafer tracks
JPS63232127A (ja) 薬液供給装置
JPH04171069A (ja) 合成樹脂液の塗布方法、および装置
JPS62206830A (ja) レジスト液塗布方法