JPH0418252B2 - - Google Patents
Info
- Publication number
- JPH0418252B2 JPH0418252B2 JP14176386A JP14176386A JPH0418252B2 JP H0418252 B2 JPH0418252 B2 JP H0418252B2 JP 14176386 A JP14176386 A JP 14176386A JP 14176386 A JP14176386 A JP 14176386A JP H0418252 B2 JPH0418252 B2 JP H0418252B2
- Authority
- JP
- Japan
- Prior art keywords
- main scale
- lens array
- light
- detector
- optical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 230000003287 optical effect Effects 0.000 claims description 29
- 238000004364 calculation method Methods 0.000 claims description 2
- 238000001514 detection method Methods 0.000 claims 1
- 238000010586 diagram Methods 0.000 description 4
- 238000005259 measurement Methods 0.000 description 3
- 230000004075 alteration Effects 0.000 description 2
- 230000007423 decrease Effects 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 230000010363 phase shift Effects 0.000 description 2
- 238000003491 array Methods 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000005516 engineering process Methods 0.000 description 1
- 239000011521 glass Substances 0.000 description 1
- 230000003993 interaction Effects 0.000 description 1
- 230000035945 sensitivity Effects 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
- Optical Transform (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP14176386A JPS62298704A (ja) | 1986-06-18 | 1986-06-18 | 光学式測長装置 | 
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title | 
|---|---|---|---|
| JP14176386A JPS62298704A (ja) | 1986-06-18 | 1986-06-18 | 光学式測長装置 | 
Publications (2)
| Publication Number | Publication Date | 
|---|---|
| JPS62298704A JPS62298704A (ja) | 1987-12-25 | 
| JPH0418252B2 true JPH0418252B2 (OSRAM) | 1992-03-27 | 
Family
ID=15299614
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date | 
|---|---|---|---|
| JP14176386A Granted JPS62298704A (ja) | 1986-06-18 | 1986-06-18 | 光学式測長装置 | 
Country Status (1)
| Country | Link | 
|---|---|
| JP (1) | JPS62298704A (OSRAM) | 
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title | 
|---|---|---|---|---|
| JPH10239108A (ja) | 1997-02-21 | 1998-09-11 | Fanuc Ltd | 光学式エンコーダ | 
| JP2007108089A (ja) * | 2005-10-17 | 2007-04-26 | Ricoh Co Ltd | 相対位置検出装置、回転体走行検出装置及び画像形成装置 | 
| JP6074672B2 (ja) * | 2011-10-28 | 2017-02-08 | 株式会社ミツトヨ | 変位検出装置、変位検出方法及び変位検出プログラム | 
| JP6629014B2 (ja) * | 2015-09-08 | 2020-01-15 | 株式会社ミツトヨ | エンコーダ | 
- 
        1986
        - 1986-06-18 JP JP14176386A patent/JPS62298704A/ja active Granted
 
Also Published As
| Publication number | Publication date | 
|---|---|
| JPS62298704A (ja) | 1987-12-25 | 
Similar Documents
| Publication | Publication Date | Title | 
|---|---|---|
| US4079252A (en) | Photoelectric grating displacement measuring apparatus | |
| US3796498A (en) | Position measuring through the use of moire fringe multiplication | |
| JP2913984B2 (ja) | 傾斜角測定装置 | |
| US4970388A (en) | Encoder with diffraction grating and multiply diffracted light | |
| US7502122B2 (en) | Fiber-optic miniature encoder for fine pitch scales | |
| US5448358A (en) | Optical apparatus and displacement-information measuring apparatus using the same | |
| JPH073344B2 (ja) | エンコ−ダ− | |
| US4955718A (en) | Photoelectric measuring system with integrated optical circuit including and illuminating system | |
| JPH02231525A (ja) | エンコーダー | |
| JP4398744B2 (ja) | 光電式エンコーダ | |
| JPH01284715A (ja) | エンコーダー | |
| US4729654A (en) | Laser interferometer | |
| US5113071A (en) | Encoder in which single light source projects dual beams onto grating | |
| JPH0652170B2 (ja) | 光結像式非接触位置測定装置 | |
| US5011287A (en) | Interferometer object position measuring system and device | |
| JPS58191907A (ja) | 移動量測定方法 | |
| US4395123A (en) | Interferometric angle monitor | |
| EP0489399B1 (en) | Displacement detector | |
| JPH0385413A (ja) | 平均化回折モアレ位置検出器 | |
| JPH0418252B2 (OSRAM) | ||
| JP2011203273A (ja) | 光電式インクリメンタル型エンコーダ | |
| KR100531693B1 (ko) | 광학식 변위측정장치 | |
| JPS6117016A (ja) | 平均化回折モアレ位置検出器 | |
| JPS6370110A (ja) | 距離測定装置 | |
| JPH02167427A (ja) | 格子干渉型変位計 |