JPH041730Y2 - - Google Patents
Info
- Publication number
- JPH041730Y2 JPH041730Y2 JP1982164864U JP16486482U JPH041730Y2 JP H041730 Y2 JPH041730 Y2 JP H041730Y2 JP 1982164864 U JP1982164864 U JP 1982164864U JP 16486482 U JP16486482 U JP 16486482U JP H041730 Y2 JPH041730 Y2 JP H041730Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- substrate
- reaction
- substrates
- large number
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Landscapes
- Chemical Vapour Deposition (AREA)
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16486482U JPS5970333U (ja) | 1982-10-29 | 1982-10-29 | プラズマ化学気相生成装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP16486482U JPS5970333U (ja) | 1982-10-29 | 1982-10-29 | プラズマ化学気相生成装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS5970333U JPS5970333U (ja) | 1984-05-12 |
JPH041730Y2 true JPH041730Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1992-01-21 |
Family
ID=30361335
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP16486482U Granted JPS5970333U (ja) | 1982-10-29 | 1982-10-29 | プラズマ化学気相生成装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS5970333U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Family Cites Families (3)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
JPS5456366A (en) * | 1977-10-14 | 1979-05-07 | Hitachi Ltd | Plasma film forming apparatus |
JPS5673428A (en) * | 1979-11-21 | 1981-06-18 | Canon Inc | Method of forming film |
JPS5694037U (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) * | 1979-12-20 | 1981-07-25 |
-
1982
- 1982-10-29 JP JP16486482U patent/JPS5970333U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS5970333U (ja) | 1984-05-12 |