JPH0416545B2 - - Google Patents

Info

Publication number
JPH0416545B2
JPH0416545B2 JP60262524A JP26252485A JPH0416545B2 JP H0416545 B2 JPH0416545 B2 JP H0416545B2 JP 60262524 A JP60262524 A JP 60262524A JP 26252485 A JP26252485 A JP 26252485A JP H0416545 B2 JPH0416545 B2 JP H0416545B2
Authority
JP
Japan
Prior art keywords
crucible
nozzle
vapor
molten
steam
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60262524A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62124271A (ja
Inventor
Hiromoto Ito
Shigeru Yamaji
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Mitsubishi Electric Corp
Original Assignee
Mitsubishi Electric Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mitsubishi Electric Corp filed Critical Mitsubishi Electric Corp
Priority to JP26252485A priority Critical patent/JPS62124271A/ja
Publication of JPS62124271A publication Critical patent/JPS62124271A/ja
Publication of JPH0416545B2 publication Critical patent/JPH0416545B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Physical Vapour Deposition (AREA)
JP26252485A 1985-11-25 1985-11-25 溶融物質の蒸気噴出装置 Granted JPS62124271A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP26252485A JPS62124271A (ja) 1985-11-25 1985-11-25 溶融物質の蒸気噴出装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP26252485A JPS62124271A (ja) 1985-11-25 1985-11-25 溶融物質の蒸気噴出装置

Publications (2)

Publication Number Publication Date
JPS62124271A JPS62124271A (ja) 1987-06-05
JPH0416545B2 true JPH0416545B2 (en, 2012) 1992-03-24

Family

ID=17376991

Family Applications (1)

Application Number Title Priority Date Filing Date
JP26252485A Granted JPS62124271A (ja) 1985-11-25 1985-11-25 溶融物質の蒸気噴出装置

Country Status (1)

Country Link
JP (1) JPS62124271A (en, 2012)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2006111961A (ja) * 2004-09-17 2006-04-27 Nippon Seiki Co Ltd 蒸着源装置
JP2007297695A (ja) * 2006-05-08 2007-11-15 Fujifilm Corp 真空蒸着用ルツボおよび真空蒸着装置
JP5542610B2 (ja) * 2010-10-19 2014-07-09 三菱伸銅株式会社 真空蒸着装置
KR101710063B1 (ko) * 2016-07-26 2017-02-28 에스엔유 프리시젼 주식회사 열 기상 증착장치

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS57134555A (en) * 1981-02-10 1982-08-19 Fuji Photo Film Co Ltd Method and device for forming thin film

Also Published As

Publication number Publication date
JPS62124271A (ja) 1987-06-05

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