JPH0415682Y2 - - Google Patents

Info

Publication number
JPH0415682Y2
JPH0415682Y2 JP1986070266U JP7026686U JPH0415682Y2 JP H0415682 Y2 JPH0415682 Y2 JP H0415682Y2 JP 1986070266 U JP1986070266 U JP 1986070266U JP 7026686 U JP7026686 U JP 7026686U JP H0415682 Y2 JPH0415682 Y2 JP H0415682Y2
Authority
JP
Japan
Prior art keywords
plate
wafer
wafers
cartridge
basket
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1986070266U
Other languages
English (en)
Japanese (ja)
Other versions
JPS62181546U (pm
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP1986070266U priority Critical patent/JPH0415682Y2/ja
Publication of JPS62181546U publication Critical patent/JPS62181546U/ja
Application granted granted Critical
Publication of JPH0415682Y2 publication Critical patent/JPH0415682Y2/ja
Expired legal-status Critical Current

Links

Landscapes

  • Warehouses Or Storage Devices (AREA)
  • Registering Or Overturning Sheets (AREA)
  • Sheets, Magazines, And Separation Thereof (AREA)
JP1986070266U 1986-05-09 1986-05-09 Expired JPH0415682Y2 (pm)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1986070266U JPH0415682Y2 (pm) 1986-05-09 1986-05-09

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1986070266U JPH0415682Y2 (pm) 1986-05-09 1986-05-09

Publications (2)

Publication Number Publication Date
JPS62181546U JPS62181546U (pm) 1987-11-18
JPH0415682Y2 true JPH0415682Y2 (pm) 1992-04-08

Family

ID=30911750

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1986070266U Expired JPH0415682Y2 (pm) 1986-05-09 1986-05-09

Country Status (1)

Country Link
JP (1) JPH0415682Y2 (pm)

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6236229A (ja) * 1985-08-08 1987-02-17 Canon Inc ウエハ処理装置

Also Published As

Publication number Publication date
JPS62181546U (pm) 1987-11-18

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