JPH0410744B2 - - Google Patents
Info
- Publication number
- JPH0410744B2 JPH0410744B2 JP1154286A JP1154286A JPH0410744B2 JP H0410744 B2 JPH0410744 B2 JP H0410744B2 JP 1154286 A JP1154286 A JP 1154286A JP 1154286 A JP1154286 A JP 1154286A JP H0410744 B2 JPH0410744 B2 JP H0410744B2
- Authority
- JP
- Japan
- Prior art keywords
- active layer
- circuit
- test
- active
- test circuit
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000012360 testing method Methods 0.000 claims description 57
- 239000004065 semiconductor Substances 0.000 claims description 19
- 229910021421 monocrystalline silicon Inorganic materials 0.000 claims description 6
- 239000000758 substrate Substances 0.000 claims description 6
- 239000013078 crystal Substances 0.000 claims description 3
- 238000002844 melting Methods 0.000 claims description 3
- 230000008018 melting Effects 0.000 claims description 3
- 238000002955 isolation Methods 0.000 claims description 2
- 229910021420 polycrystalline silicon Inorganic materials 0.000 claims description 2
- 239000010410 layer Substances 0.000 description 56
- 238000010586 diagram Methods 0.000 description 6
- 230000006870 function Effects 0.000 description 6
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 description 5
- 230000002950 deficient Effects 0.000 description 5
- 238000011990 functional testing Methods 0.000 description 5
- 229910052710 silicon Inorganic materials 0.000 description 5
- 239000010703 silicon Substances 0.000 description 5
- 230000007547 defect Effects 0.000 description 3
- 239000012212 insulator Substances 0.000 description 3
- 230000000694 effects Effects 0.000 description 2
- 238000007796 conventional method Methods 0.000 description 1
- 239000011229 interlayer Substances 0.000 description 1
- 238000009812 interlayer coupling reaction Methods 0.000 description 1
- 239000002346 layers by function Substances 0.000 description 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L27/00—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate
- H01L27/02—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers
- H01L27/04—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body
- H01L27/06—Devices consisting of a plurality of semiconductor or other solid-state components formed in or on a common substrate including semiconductor components specially adapted for rectifying, oscillating, amplifying or switching and having potential barriers; including integrated passive circuit elements having potential barriers the substrate being a semiconductor body including a plurality of individual components in a non-repetitive configuration
- H01L27/0688—Integrated circuits having a three-dimensional layout
Landscapes
- Engineering & Computer Science (AREA)
- Power Engineering (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Design And Manufacture Of Integrated Circuits (AREA)
- Semiconductor Integrated Circuits (AREA)
Priority Applications (2)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1154286A JPS62169355A (ja) | 1986-01-21 | 1986-01-21 | 半導体集積回路素子 |
| US07/267,679 US4888631A (en) | 1986-01-17 | 1988-11-03 | Semiconductor dynamic memory device |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1154286A JPS62169355A (ja) | 1986-01-21 | 1986-01-21 | 半導体集積回路素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62169355A JPS62169355A (ja) | 1987-07-25 |
| JPH0410744B2 true JPH0410744B2 (ko) | 1992-02-26 |
Family
ID=11780849
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1154286A Granted JPS62169355A (ja) | 1986-01-17 | 1986-01-21 | 半導体集積回路素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62169355A (ko) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109841535A (zh) * | 2019-01-31 | 2019-06-04 | 合肥鑫晟光电科技有限公司 | 阵列基板及其制备方法、显示面板、显示装置 |
Families Citing this family (5)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01125951A (ja) * | 1987-11-11 | 1989-05-18 | Hitachi Ltd | トランジスタ回路装置 |
| KR940006676B1 (ko) * | 1991-10-14 | 1994-07-25 | 삼성전자 주식회사 | 시험회로를 내장한 기억용 반도체 집적회로 |
| JP6413711B2 (ja) | 2014-12-02 | 2018-10-31 | 富士通株式会社 | 試験回路および試験回路の制御方法 |
| JP6488699B2 (ja) | 2014-12-26 | 2019-03-27 | 富士通株式会社 | 試験回路および試験回路の制御方法 |
| US9483598B2 (en) * | 2015-02-09 | 2016-11-01 | Qualcomm Incorporated | Intellectual property block design with folded blocks and duplicated pins for 3D integrated circuits |
-
1986
- 1986-01-21 JP JP1154286A patent/JPS62169355A/ja active Granted
Cited By (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN109841535A (zh) * | 2019-01-31 | 2019-06-04 | 合肥鑫晟光电科技有限公司 | 阵列基板及其制备方法、显示面板、显示装置 |
| US11631619B2 (en) | 2019-01-31 | 2023-04-18 | Hefei Xinsheng Optoelectronics Technology Co., Ltd. | Array substrate and fabricating method thereof, display panel and display device |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62169355A (ja) | 1987-07-25 |
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