JPH0410688Y2 - - Google Patents

Info

Publication number
JPH0410688Y2
JPH0410688Y2 JP1982199618U JP19961882U JPH0410688Y2 JP H0410688 Y2 JPH0410688 Y2 JP H0410688Y2 JP 1982199618 U JP1982199618 U JP 1982199618U JP 19961882 U JP19961882 U JP 19961882U JP H0410688 Y2 JPH0410688 Y2 JP H0410688Y2
Authority
JP
Japan
Prior art keywords
wafer
electrostatic chuck
chuck
plasma etching
spacer
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP1982199618U
Other languages
English (en)
Japanese (ja)
Other versions
JPS59103439U (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP19961882U priority Critical patent/JPS59103439U/ja
Publication of JPS59103439U publication Critical patent/JPS59103439U/ja
Application granted granted Critical
Publication of JPH0410688Y2 publication Critical patent/JPH0410688Y2/ja
Granted legal-status Critical Current

Links

Landscapes

  • ing And Chemical Polishing (AREA)
  • Drying Of Semiconductors (AREA)
JP19961882U 1982-12-28 1982-12-28 プラズマエツチング装置 Granted JPS59103439U (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP19961882U JPS59103439U (ja) 1982-12-28 1982-12-28 プラズマエツチング装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP19961882U JPS59103439U (ja) 1982-12-28 1982-12-28 プラズマエツチング装置

Publications (2)

Publication Number Publication Date
JPS59103439U JPS59103439U (ja) 1984-07-12
JPH0410688Y2 true JPH0410688Y2 (https=) 1992-03-17

Family

ID=30425144

Family Applications (1)

Application Number Title Priority Date Filing Date
JP19961882U Granted JPS59103439U (ja) 1982-12-28 1982-12-28 プラズマエツチング装置

Country Status (1)

Country Link
JP (1) JPS59103439U (https=)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0730468B2 (ja) * 1988-06-09 1995-04-05 日電アネルバ株式会社 ドライエッチング装置

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5685828A (en) * 1979-12-17 1981-07-13 Nec Corp Electrostatic wafer holder
JPS57149734A (en) * 1981-03-12 1982-09-16 Anelva Corp Plasma applying working device

Also Published As

Publication number Publication date
JPS59103439U (ja) 1984-07-12

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