JPH0410213B2 - - Google Patents

Info

Publication number
JPH0410213B2
JPH0410213B2 JP61247529A JP24752986A JPH0410213B2 JP H0410213 B2 JPH0410213 B2 JP H0410213B2 JP 61247529 A JP61247529 A JP 61247529A JP 24752986 A JP24752986 A JP 24752986A JP H0410213 B2 JPH0410213 B2 JP H0410213B2
Authority
JP
Japan
Prior art keywords
single crystal
island
polycrystalline silicon
crystal semiconductor
semiconductor
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP61247529A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63102220A (ja
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed filed Critical
Priority to JP61247529A priority Critical patent/JPS63102220A/ja
Publication of JPS63102220A publication Critical patent/JPS63102220A/ja
Publication of JPH0410213B2 publication Critical patent/JPH0410213B2/ja
Granted legal-status Critical Current

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  • Recrystallisation Techniques (AREA)
JP61247529A 1986-10-20 1986-10-20 半導体装置の製造方法 Granted JPS63102220A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61247529A JPS63102220A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61247529A JPS63102220A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63102220A JPS63102220A (ja) 1988-05-07
JPH0410213B2 true JPH0410213B2 (enExample) 1992-02-24

Family

ID=17164850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61247529A Granted JPS63102220A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63102220A (enExample)

Also Published As

Publication number Publication date
JPS63102220A (ja) 1988-05-07

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Legal Events

Date Code Title Description
EXPY Cancellation because of completion of term