JPS63102220A - 半導体装置の製造方法 - Google Patents

半導体装置の製造方法

Info

Publication number
JPS63102220A
JPS63102220A JP61247529A JP24752986A JPS63102220A JP S63102220 A JPS63102220 A JP S63102220A JP 61247529 A JP61247529 A JP 61247529A JP 24752986 A JP24752986 A JP 24752986A JP S63102220 A JPS63102220 A JP S63102220A
Authority
JP
Japan
Prior art keywords
single crystal
polycrystalline silicon
island
silicon island
molten
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP61247529A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410213B2 (enExample
Inventor
Genichi Yamazaki
山崎　弦一
Shigenobu Akiyama
秋山　重信
Yasuaki Terui
照井　康明
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
National Institute of Advanced Industrial Science and Technology
Original Assignee
Agency of Industrial Science and Technology
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology filed Critical Agency of Industrial Science and Technology
Priority to JP61247529A priority Critical patent/JPS63102220A/ja
Publication of JPS63102220A publication Critical patent/JPS63102220A/ja
Publication of JPH0410213B2 publication Critical patent/JPH0410213B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Recrystallisation Techniques (AREA)
JP61247529A 1986-10-20 1986-10-20 半導体装置の製造方法 Granted JPS63102220A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP61247529A JPS63102220A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP61247529A JPS63102220A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS63102220A true JPS63102220A (ja) 1988-05-07
JPH0410213B2 JPH0410213B2 (enExample) 1992-02-24

Family

ID=17164850

Family Applications (1)

Application Number Title Priority Date Filing Date
JP61247529A Granted JPS63102220A (ja) 1986-10-20 1986-10-20 半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS63102220A (enExample)

Also Published As

Publication number Publication date
JPH0410213B2 (enExample) 1992-02-24

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