JPH0410001B2 - - Google Patents
Info
- Publication number
- JPH0410001B2 JPH0410001B2 JP1437886A JP1437886A JPH0410001B2 JP H0410001 B2 JPH0410001 B2 JP H0410001B2 JP 1437886 A JP1437886 A JP 1437886A JP 1437886 A JP1437886 A JP 1437886A JP H0410001 B2 JPH0410001 B2 JP H0410001B2
- Authority
- JP
- Japan
- Prior art keywords
- edge
- inspected
- maximum
- scanning
- effective
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000000034 method Methods 0.000 claims description 10
- 238000003708 edge detection Methods 0.000 description 18
- 238000005259 measurement Methods 0.000 description 16
- 238000001514 detection method Methods 0.000 description 9
- 238000010586 diagram Methods 0.000 description 5
- 238000012790 confirmation Methods 0.000 description 4
- 238000000691 measurement method Methods 0.000 description 2
- 230000015572 biosynthetic process Effects 0.000 description 1
- 238000003786 synthesis reaction Methods 0.000 description 1
Landscapes
- Length Measuring Devices By Optical Means (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1437886A JPS62172205A (ja) | 1986-01-25 | 1986-01-25 | 被検査物の有効エツジ検出方法及び有効幅測定方法 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP1437886A JPS62172205A (ja) | 1986-01-25 | 1986-01-25 | 被検査物の有効エツジ検出方法及び有効幅測定方法 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62172205A JPS62172205A (ja) | 1987-07-29 |
| JPH0410001B2 true JPH0410001B2 (enrdf_load_stackoverflow) | 1992-02-24 |
Family
ID=11859382
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP1437886A Granted JPS62172205A (ja) | 1986-01-25 | 1986-01-25 | 被検査物の有効エツジ検出方法及び有効幅測定方法 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62172205A (enrdf_load_stackoverflow) |
-
1986
- 1986-01-25 JP JP1437886A patent/JPS62172205A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62172205A (ja) | 1987-07-29 |
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