JPS62172205A - 被検査物の有効エツジ検出方法及び有効幅測定方法 - Google Patents

被検査物の有効エツジ検出方法及び有効幅測定方法

Info

Publication number
JPS62172205A
JPS62172205A JP1437886A JP1437886A JPS62172205A JP S62172205 A JPS62172205 A JP S62172205A JP 1437886 A JP1437886 A JP 1437886A JP 1437886 A JP1437886 A JP 1437886A JP S62172205 A JPS62172205 A JP S62172205A
Authority
JP
Japan
Prior art keywords
inspected
edge
article
effective
scanning
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP1437886A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0410001B2 (enrdf_load_stackoverflow
Inventor
Hideo Tanpo
丹保　英男
Kazue Uchiyama
一栄 内山
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shin Etsu Engineering Co Ltd
Original Assignee
Shin Etsu Engineering Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shin Etsu Engineering Co Ltd filed Critical Shin Etsu Engineering Co Ltd
Priority to JP1437886A priority Critical patent/JPS62172205A/ja
Publication of JPS62172205A publication Critical patent/JPS62172205A/ja
Publication of JPH0410001B2 publication Critical patent/JPH0410001B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Length Measuring Devices By Optical Means (AREA)
JP1437886A 1986-01-25 1986-01-25 被検査物の有効エツジ検出方法及び有効幅測定方法 Granted JPS62172205A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP1437886A JPS62172205A (ja) 1986-01-25 1986-01-25 被検査物の有効エツジ検出方法及び有効幅測定方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP1437886A JPS62172205A (ja) 1986-01-25 1986-01-25 被検査物の有効エツジ検出方法及び有効幅測定方法

Publications (2)

Publication Number Publication Date
JPS62172205A true JPS62172205A (ja) 1987-07-29
JPH0410001B2 JPH0410001B2 (enrdf_load_stackoverflow) 1992-02-24

Family

ID=11859382

Family Applications (1)

Application Number Title Priority Date Filing Date
JP1437886A Granted JPS62172205A (ja) 1986-01-25 1986-01-25 被検査物の有効エツジ検出方法及び有効幅測定方法

Country Status (1)

Country Link
JP (1) JPS62172205A (enrdf_load_stackoverflow)

Also Published As

Publication number Publication date
JPH0410001B2 (enrdf_load_stackoverflow) 1992-02-24

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