KR0145255B1 - 도트패턴 검사장치 - Google Patents
도트패턴 검사장치Info
- Publication number
- KR0145255B1 KR0145255B1 KR1019940006013A KR19940006013A KR0145255B1 KR 0145255 B1 KR0145255 B1 KR 0145255B1 KR 1019940006013 A KR1019940006013 A KR 1019940006013A KR 19940006013 A KR19940006013 A KR 19940006013A KR 0145255 B1 KR0145255 B1 KR 0145255B1
- Authority
- KR
- South Korea
- Prior art keywords
- dot pattern
- run length
- image
- dimensional image
- length data
- Prior art date
Links
- 238000007689 inspection Methods 0.000 claims abstract description 70
- 238000012545 processing Methods 0.000 claims abstract description 11
- 238000000034 method Methods 0.000 claims description 13
- 238000013144 data compression Methods 0.000 claims description 7
- 238000001514 detection method Methods 0.000 claims 2
- 238000003384 imaging method Methods 0.000 abstract description 2
- 238000010586 diagram Methods 0.000 description 6
- 238000005286 illumination Methods 0.000 description 6
- 238000005259 measurement Methods 0.000 description 5
- 238000013500 data storage Methods 0.000 description 4
- 238000003708 edge detection Methods 0.000 description 4
- 239000004973 liquid crystal related substance Substances 0.000 description 4
- 238000004364 calculation method Methods 0.000 description 3
- 230000000007 visual effect Effects 0.000 description 3
- 238000007796 conventional method Methods 0.000 description 2
- 239000013598 vector Substances 0.000 description 2
- 238000009825 accumulation Methods 0.000 description 1
- 238000006243 chemical reaction Methods 0.000 description 1
- 239000003795 chemical substances by application Substances 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 230000006870 function Effects 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Classifications
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T7/00—Image analysis
- G06T7/0002—Inspection of images, e.g. flaw detection
- G06T7/0004—Industrial image inspection
- G06T7/001—Industrial image inspection using an image reference approach
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- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06V—IMAGE OR VIDEO RECOGNITION OR UNDERSTANDING
- G06V10/00—Arrangements for image or video recognition or understanding
- G06V10/70—Arrangements for image or video recognition or understanding using pattern recognition or machine learning
- G06V10/74—Image or video pattern matching; Proximity measures in feature spaces
- G06V10/75—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries
- G06V10/754—Organisation of the matching processes, e.g. simultaneous or sequential comparisons of image or video features; Coarse-fine approaches, e.g. multi-scale approaches; using context analysis; Selection of dictionaries involving a deformation of the sample pattern or of the reference pattern; Elastic matching
-
- G—PHYSICS
- G06—COMPUTING; CALCULATING OR COUNTING
- G06T—IMAGE DATA PROCESSING OR GENERATION, IN GENERAL
- G06T2207/00—Indexing scheme for image analysis or image enhancement
- G06T2207/30—Subject of image; Context of image processing
- G06T2207/30108—Industrial image inspection
- G06T2207/30148—Semiconductor; IC; Wafer
Landscapes
- Engineering & Computer Science (AREA)
- Theoretical Computer Science (AREA)
- Computer Vision & Pattern Recognition (AREA)
- General Physics & Mathematics (AREA)
- Physics & Mathematics (AREA)
- Computing Systems (AREA)
- Evolutionary Computation (AREA)
- General Health & Medical Sciences (AREA)
- Medical Informatics (AREA)
- Software Systems (AREA)
- Databases & Information Systems (AREA)
- Artificial Intelligence (AREA)
- Health & Medical Sciences (AREA)
- Multimedia (AREA)
- Quality & Reliability (AREA)
- Image Analysis (AREA)
- Image Processing (AREA)
Abstract
Description
Claims (4)
- 표시화면의 2차원화상을 촬상하고 또한 2차원화상위의 도트패턴에 대해서 화상처리를 행하므로써, 표시화면위에 표시된 도트패턴을 검사하는 도트패턴검사장치에 있어서, 각각의 행에 대해서 표시화면의 2차원 화상의 개개의 도트의 농도치를 소정의 축위에 축적하므로써 1세트의 농도치를 나타내는 화상투영데이터를 발생하는 화상투영데이터발생부와; 2차원 화상의 화상투영데이터에 의거하여, 화상투영데이터의 축적된 농도치와 길이로 구성되는 1세트의 조합을 나타내는 런렝스데이터를 발생하는 런렝스데이터발생부와; 상기 런렝스데이터발생부에 의해 미리 발생되고 또한 기준도트패턴을 나타내는 기준런렝스데이터와 2차원화상의 상기 런렝스데이터를 비교하므로써, 기준런렝스데이터와 가장 일치하는 런렝스데이터를 가지는 위치를, 검사대상의 도트패턴이 존재하는 위치로서, 결정하는 런렝스데이터매칭부를 구비하는 것을 특징으로 하는 도트패턴검사장치.
- 제 1항에 있어서, 도트패턴의 2차원화상위에 복수의 행을 그림으로써, 상기 런렝스데이터매칭부에 의해 위치결정되었던 도트패턴의 2차원화상의 에지위에 놓여있는 적어도 1개의 열의 도트를 검출하는 예지검출부와; 직선근사부는, 도트의 열에 대해서 직선근사를 행함으로써, 근사직선을 구하고, 또한 상기 직선근사부는, 근사직선이 연장되는 방향으로부터 도트패턴의 2차원화상의 에지의 각도편차량을 검출하는 직선근사부를 부가하여 포함한 것을 특징으로 하는 도트패턴검출장치.
- 도트패턴에 대해서 화상처리를 행함으로써, 표시화면위에 도트패턴을 검사하는 도트패턴검사장치에 있어서, 표시화면의 2차원화상위에 위치결정된 도트패턴을 검사하는 도트패턴검사부와; 화상데이터압축수단은, 상기 도트패턴검사부내에 배치되고, 상기 화상데이터압축수단은, 2차원의 화상을 복수의 도트부분으로 분할하고, 또한 상기 복수의 도트부분의 각각을, 상기 복수의 도트부분의 각각의 농도와 일반적으로 동일한 농도를 가지는 대표화소로, 치환하는 화상데이터압축수단과; 농도비교수단은, 상기 도트패턴검사부내에 배치되고, 상기 농도비교수단은, a) 인접하는 대표화소사이의 밝기 차이와 b)한계치를 비교하는 농도비교수단을 구비하므로써, 검사대상의 도트패턴의 에지를 결정하는 것을 특징으로 하는 도트패턴검사장치.
- 제 3항에 있어서, 상기 농도비교수단은, 다음의 ON-OFF상태를 결정하기 위한 ON상태와 OFF상태중 한 상태를 복수의 도트부분의 각각에 부여하는 것을 특징으로 하는 도트패턴검사장치.
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940006013A KR0145255B1 (ko) | 1994-03-25 | 1994-03-25 | 도트패턴 검사장치 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
KR1019940006013A KR0145255B1 (ko) | 1994-03-25 | 1994-03-25 | 도트패턴 검사장치 |
Publications (2)
Publication Number | Publication Date |
---|---|
KR950027604A KR950027604A (ko) | 1995-10-18 |
KR0145255B1 true KR0145255B1 (ko) | 1998-08-17 |
Family
ID=19379573
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
KR1019940006013A KR0145255B1 (ko) | 1994-03-25 | 1994-03-25 | 도트패턴 검사장치 |
Country Status (1)
Country | Link |
---|---|
KR (1) | KR0145255B1 (ko) |
-
1994
- 1994-03-25 KR KR1019940006013A patent/KR0145255B1/ko not_active IP Right Cessation
Also Published As
Publication number | Publication date |
---|---|
KR950027604A (ko) | 1995-10-18 |
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