JPH039611B2 - - Google Patents

Info

Publication number
JPH039611B2
JPH039611B2 JP59275341A JP27534184A JPH039611B2 JP H039611 B2 JPH039611 B2 JP H039611B2 JP 59275341 A JP59275341 A JP 59275341A JP 27534184 A JP27534184 A JP 27534184A JP H039611 B2 JPH039611 B2 JP H039611B2
Authority
JP
Japan
Prior art keywords
phosphorus
compound semiconductor
inp
quartz tube
red phosphorus
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59275341A
Other languages
English (en)
Japanese (ja)
Other versions
JPS61150340A (ja
Inventor
Shuzo Kagawa
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Fujitsu Ltd
Original Assignee
Fujitsu Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Fujitsu Ltd filed Critical Fujitsu Ltd
Priority to JP59275341A priority Critical patent/JPS61150340A/ja
Publication of JPS61150340A publication Critical patent/JPS61150340A/ja
Publication of JPH039611B2 publication Critical patent/JPH039611B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10P—GENERIC PROCESSES OR APPARATUS FOR THE MANUFACTURE OR TREATMENT OF DEVICES COVERED BY CLASS H10
    • H10P95/00—Generic processes or apparatus for manufacture or treatments not covered by the other groups of this subclass
    • H10P95/90—Thermal treatments, e.g. annealing or sintering

Landscapes

  • Light Receiving Elements (AREA)
JP59275341A 1984-12-25 1984-12-25 化合物半導体装置の製造方法 Granted JPS61150340A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59275341A JPS61150340A (ja) 1984-12-25 1984-12-25 化合物半導体装置の製造方法

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59275341A JPS61150340A (ja) 1984-12-25 1984-12-25 化合物半導体装置の製造方法

Publications (2)

Publication Number Publication Date
JPS61150340A JPS61150340A (ja) 1986-07-09
JPH039611B2 true JPH039611B2 (OSRAM) 1991-02-08

Family

ID=17554118

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59275341A Granted JPS61150340A (ja) 1984-12-25 1984-12-25 化合物半導体装置の製造方法

Country Status (1)

Country Link
JP (1) JPS61150340A (OSRAM)

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0671002B2 (ja) * 1988-10-21 1994-09-07 株式会社ジャパンエナジー 化合物半導体装置の製造方法
JPH0793277B2 (ja) * 1989-02-28 1995-10-09 インダストリアル・テクノロジー・リサーチ・インステイテユート ＩｎＰ基板中へのＣｄ拡散方法
EP0426877B1 (en) * 1989-05-31 1995-08-23 Japan Energy Corporation Method of producing compound semiconductor devices
JP2560178B2 (ja) * 1992-06-29 1996-12-04 九州電子金属株式会社 半導体ウェーハの製造方法

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5390861A (en) * 1977-01-21 1978-08-10 Sharp Corp Manufacture of semiconductor element

Also Published As

Publication number Publication date
JPS61150340A (ja) 1986-07-09

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