JPH0380255B2 - - Google Patents

Info

Publication number
JPH0380255B2
JPH0380255B2 JP59164682A JP16468284A JPH0380255B2 JP H0380255 B2 JPH0380255 B2 JP H0380255B2 JP 59164682 A JP59164682 A JP 59164682A JP 16468284 A JP16468284 A JP 16468284A JP H0380255 B2 JPH0380255 B2 JP H0380255B2
Authority
JP
Japan
Prior art keywords
gmb
fluorescent
chamber
vacuum chuck
sample table
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP59164682A
Other languages
English (en)
Japanese (ja)
Other versions
JPS6141949A (ja
Inventor
Yoshihiko Usui
Tomoyuki Haga
Koichi Kumakura
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Horiba Ltd
Original Assignee
Horiba Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Horiba Ltd filed Critical Horiba Ltd
Priority to JP16468284A priority Critical patent/JPS6141949A/ja
Publication of JPS6141949A publication Critical patent/JPS6141949A/ja
Publication of JPH0380255B2 publication Critical patent/JPH0380255B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N23/00—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00
    • G01N23/22—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material
    • G01N23/223—Investigating or analysing materials by the use of wave or particle radiation, e.g. X-rays or neutrons, not covered by groups G01N3/00 – G01N17/00, G01N21/00 or G01N22/00 by measuring secondary emission from the material by irradiating the sample with X-rays or gamma-rays and by measuring X-ray fluorescence
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N2223/00—Investigating materials by wave or particle radiation
    • G01N2223/07—Investigating materials by wave or particle radiation secondary emission
    • G01N2223/076—X-ray fluorescence
    • Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
    • Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
    • Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
    • Y02E30/00—Energy generation of nuclear origin
    • Y02E30/10—Nuclear fusion reactors

Landscapes

  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Analysing Materials By The Use Of Radiation (AREA)
JP16468284A 1984-08-04 1984-08-04 螢光ｘ線測定装置 Granted JPS6141949A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16468284A JPS6141949A (ja) 1984-08-04 1984-08-04 螢光ｘ線測定装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16468284A JPS6141949A (ja) 1984-08-04 1984-08-04 螢光ｘ線測定装置

Publications (2)

Publication Number Publication Date
JPS6141949A JPS6141949A (ja) 1986-02-28
JPH0380255B2 true JPH0380255B2 (enrdf_load_stackoverflow) 1991-12-24

Family

ID=15797847

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16468284A Granted JPS6141949A (ja) 1984-08-04 1984-08-04 螢光ｘ線測定装置

Country Status (1)

Country Link
JP (1) JPS6141949A (enrdf_load_stackoverflow)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005207908A (ja) * 2004-01-23 2005-08-04 Rigaku Industrial Co 蛍光ｘ線分析装置

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR102549498B1 (ko) * 2021-07-09 2023-06-30 (주)현대공업 시트용 암 레스트

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
GB1493318A (en) * 1974-03-22 1977-11-30 Varian Associates Interchangeable specimen trays and apparatus for a vacuum type testing system

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2005207908A (ja) * 2004-01-23 2005-08-04 Rigaku Industrial Co 蛍光ｘ線分析装置

Also Published As

Publication number Publication date
JPS6141949A (ja) 1986-02-28

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