JP3823155B2 - 雰囲気置換機能を備えたx線分析方法 - Google Patents
雰囲気置換機能を備えたx線分析方法 Download PDFInfo
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- JP3823155B2 JP3823155B2 JP2003334880A JP2003334880A JP3823155B2 JP 3823155 B2 JP3823155 B2 JP 3823155B2 JP 2003334880 A JP2003334880 A JP 2003334880A JP 2003334880 A JP2003334880 A JP 2003334880A JP 3823155 B2 JP3823155 B2 JP 3823155B2
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- 238000000034 method Methods 0.000 title claims description 12
- 238000002441 X-ray diffraction Methods 0.000 title claims description 9
- 238000005259 measurement Methods 0.000 claims description 31
- 238000004891 communication Methods 0.000 claims description 5
- 230000001678 irradiating effect Effects 0.000 claims description 3
- 239000007789 gas Substances 0.000 description 16
- 238000005192 partition Methods 0.000 description 6
- 238000000638 solvent extraction Methods 0.000 description 6
- 238000004458 analytical method Methods 0.000 description 4
- 230000003028 elevating effect Effects 0.000 description 3
- 239000007788 liquid Substances 0.000 description 3
- 238000006467 substitution reaction Methods 0.000 description 3
- 238000010586 diagram Methods 0.000 description 2
- 229910052734 helium Inorganic materials 0.000 description 2
- 239000000843 powder Substances 0.000 description 2
- 238000004876 x-ray fluorescence Methods 0.000 description 2
- 230000002411 adverse Effects 0.000 description 1
- 230000006835 compression Effects 0.000 description 1
- 238000007906 compression Methods 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000001514 detection method Methods 0.000 description 1
- 239000001307 helium Substances 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
- 229920006254 polymer film Polymers 0.000 description 1
- 230000003252 repetitive effect Effects 0.000 description 1
- 238000007789 sealing Methods 0.000 description 1
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Description
2:分光器
3:検出器
14:He源
20:昇降機構(リフト)
C1:主室
C2:試料室
C3:分光室
C4:予備排気室
P1:測定位置
P2:非測定位置
P3:待機位置
P4:退避位置
S:試料
Claims (2)
- 試料を分析する主室と、主室に隣接して試料を蓋部を介して外部から搬入し外部へ搬出する予備排気室とを有し、試料を予備排気室を経て主室内の測定位置に搬入および搬出し、He雰囲気下の主室内の試料にX線を照射して試料の分析を行うX線分析方法であって、
試料を予備排気室に搬入して前記蓋部を閉めたのち予備排気室内へHeガスを供給することにより、試料を予備排気室から主室へ搬入する前に、予備排気室内を予めHe雰囲気に置換しておくとともに、試料を主室から予備排気室へ搬出する際に主室と予備排気室とを連通する前にも予備排気室内を予めHe雰囲気に置換しておく雰囲気置換機能を備えたX線分析方法。 - 試料を分析する主室と、主室に隣接して試料を蓋部を介して外部から搬入し外部へ搬出する予備排気室とを有し、試料を予備排気室を経て主室内の測定位置に搬入および搬出し、He雰囲気下の主室内の試料にX線を照射して試料の分析を行うX線分析方法であって、
試料を予備排気室に搬入して前記蓋部を閉めたのち予備排気室内へHeガスを供給することにより、試料を予備排気室から主室へ搬入する前に、予備排気室内を予めHe雰囲気に置換しておくとともに、試料を予備排気室から主室へ搬入した後も、予備排気室と主室間を連通させた状態のままとし、主室内のHe雰囲気置換により、予備排気室内を同時にHe雰囲気に置換しておく雰囲気置換機能を備えたX線分析方法。
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JP2003334880A JP3823155B2 (ja) | 2003-09-26 | 2003-09-26 | 雰囲気置換機能を備えたx線分析方法 |
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JP2003334880A JP3823155B2 (ja) | 2003-09-26 | 2003-09-26 | 雰囲気置換機能を備えたx線分析方法 |
Publications (2)
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JP2005098906A JP2005098906A (ja) | 2005-04-14 |
JP3823155B2 true JP3823155B2 (ja) | 2006-09-20 |
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Families Citing this family (2)
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JP7190749B2 (ja) | 2020-05-18 | 2022-12-16 | 株式会社リガク | 蛍光x線分析装置 |
WO2022004000A1 (ja) * | 2020-06-30 | 2022-01-06 | 株式会社島津製作所 | 蛍光x線分析装置 |
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