JP2005098906A - 雰囲気置換機能を備えたx線分析装置 - Google Patents
雰囲気置換機能を備えたx線分析装置 Download PDFInfo
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- 238000000638 solvent extraction Methods 0.000 description 6
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- 229910052734 helium Inorganic materials 0.000 description 1
- SWQJXJOGLNCZEY-UHFFFAOYSA-N helium atom Chemical compound [He] SWQJXJOGLNCZEY-UHFFFAOYSA-N 0.000 description 1
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Abstract
【解決手段】 予備排気室C4から主室C1への試料Sの搬入前だけでなく、主室C1から予備排気室C4への試料Sの搬出前にも予備排気室C4内を予めHe雰囲気に置換しておくので、従来のように、予備排気室C4内の気密性が高くなくとも試料Sの主室C1から予備排気室C4への搬出時に主室C1内に空気が混入しないことから、予備排気室C4の厳密な気密性が不要なので構造が複雑とならず低コスト化が可能となる。また装置の運転中常時、予備排気室C4にHeガスを流入させるのでないことから、He消費量が増大せず低コスト化が可能となる。
【選択図】 図1
Description
2:分光器
3:検出器
14:He源
20:昇降機構(リフト)
C1:主室
C2:試料室
C3:分光室
C4:予備排気室
P1:測定位置
P2:非測定位置
P3:待機位置
P4:退避位置
S:試料
Claims (2)
- 試料を分析する主室と、主室に隣接して試料を外部から搬入し外部へ搬出する予備排気室とを有し、試料を予備排気室を経て主室内の測定位置に搬入および搬出し、He雰囲気下の主室内の試料にX線を照射して試料の分析を行うX線分析装置であって、
試料を予備排気室から主室へ搬入する前に、予備排気室内を予めHe雰囲気に置換しておくとともに、試料を主室から予備排気室へ搬出する前にも予備排気室内を予めHe雰囲気に置換しておく雰囲気置換機能を備えたX線分析装置。 - 試料を分析する主室と、主室に隣接して試料を外部から搬入し外部へ搬出する予備排気室とを有し、試料を予備排気室を経て主室内の測定位置に搬入および搬出し、He雰囲気下の主室内の試料にX線を照射して試料の分析を行うX線分析装置であって、
試料を予備排気室から主室へ搬入する前に、予備排気室内を予めHe雰囲気に置換しておくとともに、試料を予備排気室から主室へ搬入した後も、予備排気室と主室間を連通させた状態のままとし、主室内のHe雰囲気置換により、予備排気室内を同時にHe雰囲気に置換しておく雰囲気置換機能を備えたX線分析装置。
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JP2005098906A true JP2005098906A (ja) | 2005-04-14 |
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Cited By (2)
Publication number | Priority date | Publication date | Assignee | Title |
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WO2021235037A1 (ja) | 2020-05-18 | 2021-11-25 | 株式会社リガク | 蛍光x線分析装置 |
WO2022004000A1 (ja) * | 2020-06-30 | 2022-01-06 | 株式会社島津製作所 | 蛍光x線分析装置 |
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Cited By (4)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
WO2021235037A1 (ja) | 2020-05-18 | 2021-11-25 | 株式会社リガク | 蛍光x線分析装置 |
WO2022004000A1 (ja) * | 2020-06-30 | 2022-01-06 | 株式会社島津製作所 | 蛍光x線分析装置 |
JPWO2022004000A1 (ja) * | 2020-06-30 | 2022-01-06 | ||
JP7380884B2 (ja) | 2020-06-30 | 2023-11-15 | 株式会社島津製作所 | 蛍光x線分析装置 |
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