JPH03771B2 - - Google Patents

Info

Publication number
JPH03771B2
JPH03771B2 JP60285335A JP28533585A JPH03771B2 JP H03771 B2 JPH03771 B2 JP H03771B2 JP 60285335 A JP60285335 A JP 60285335A JP 28533585 A JP28533585 A JP 28533585A JP H03771 B2 JPH03771 B2 JP H03771B2
Authority
JP
Japan
Prior art keywords
heating element
element wire
furnace body
wires
heat
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60285335A
Other languages
English (en)
Japanese (ja)
Other versions
JPS62144333A (ja
Inventor
Seishiro Sato
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Tokyo Electron Sagami Ltd
Original Assignee
Tokyo Electron Sagami Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Electron Sagami Ltd filed Critical Tokyo Electron Sagami Ltd
Priority to JP28533585A priority Critical patent/JPS62144333A/ja
Publication of JPS62144333A publication Critical patent/JPS62144333A/ja
Publication of JPH03771B2 publication Critical patent/JPH03771B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Furnace Details (AREA)
JP28533585A 1985-12-18 1985-12-18 加熱装置 Granted JPS62144333A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP28533585A JPS62144333A (ja) 1985-12-18 1985-12-18 加熱装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP28533585A JPS62144333A (ja) 1985-12-18 1985-12-18 加熱装置

Publications (2)

Publication Number Publication Date
JPS62144333A JPS62144333A (ja) 1987-06-27
JPH03771B2 true JPH03771B2 (pm) 1991-01-08

Family

ID=17690217

Family Applications (1)

Application Number Title Priority Date Filing Date
JP28533585A Granted JPS62144333A (ja) 1985-12-18 1985-12-18 加熱装置

Country Status (1)

Country Link
JP (1) JPS62144333A (pm)

Families Citing this family (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2730102B2 (ja) * 1988-11-18 1998-03-25 日本電気株式会社 抵抗線加熱炉
SE530968C2 (sv) 2007-03-05 2008-11-04 Sandvik Intellectual Property Insats och värmeelement för elektriska ugnar
JP5096182B2 (ja) 2008-01-31 2012-12-12 東京エレクトロン株式会社 熱処理炉
JP4769842B2 (ja) * 2008-04-08 2011-09-07 株式会社アルファ・オイコス 高温用加熱炉
JP2011091386A (ja) * 2009-09-24 2011-05-06 Semiconductor Energy Lab Co Ltd 熱処理装置、熱処理方法及び半導体装置の作製方法

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5815838Y2 (ja) * 1978-08-29 1983-03-30 電元冶金工業株式会社 電気炉の発熱体の支持構造
JPS5955011A (ja) * 1982-09-22 1984-03-29 Fujitsu Ltd 加熱装置

Also Published As

Publication number Publication date
JPS62144333A (ja) 1987-06-27

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