JPH0373425B2 - - Google Patents
Info
- Publication number
- JPH0373425B2 JPH0373425B2 JP60039464A JP3946485A JPH0373425B2 JP H0373425 B2 JPH0373425 B2 JP H0373425B2 JP 60039464 A JP60039464 A JP 60039464A JP 3946485 A JP3946485 A JP 3946485A JP H0373425 B2 JPH0373425 B2 JP H0373425B2
- Authority
- JP
- Japan
- Prior art keywords
- solid
- wrapping
- fan
- grindstone
- shaped
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 239000007787 solid Substances 0.000 claims description 48
- 238000005498 polishing Methods 0.000 claims description 26
- 238000000227 grinding Methods 0.000 claims description 19
- 239000000463 material Substances 0.000 claims description 4
- 229910000838 Al alloy Inorganic materials 0.000 claims description 2
- 239000011152 fibreglass Substances 0.000 claims description 2
- 239000004033 plastic Substances 0.000 claims description 2
- 229920003023 plastic Polymers 0.000 claims description 2
- 239000006061 abrasive grain Substances 0.000 description 4
- 238000004519 manufacturing process Methods 0.000 description 4
- 239000000853 adhesive Substances 0.000 description 3
- 230000001070 adhesive effect Effects 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910000831 Steel Inorganic materials 0.000 description 2
- 238000009826 distribution Methods 0.000 description 2
- 230000000694 effects Effects 0.000 description 2
- 235000019589 hardness Nutrition 0.000 description 2
- 229910052751 metal Inorganic materials 0.000 description 2
- 239000002184 metal Substances 0.000 description 2
- 239000010959 steel Substances 0.000 description 2
- -1 aluminum alloy Chemical class 0.000 description 1
- 230000015572 biosynthetic process Effects 0.000 description 1
- 239000000470 constituent Substances 0.000 description 1
- 239000012943 hotmelt Substances 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 239000002245 particle Substances 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000000843 powder Substances 0.000 description 1
- 238000002360 preparation method Methods 0.000 description 1
Landscapes
- Polishing Bodies And Polishing Tools (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60039464A JPS60217062A (ja) | 1985-02-28 | 1985-02-28 | 平面研磨装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60039464A JPS60217062A (ja) | 1985-02-28 | 1985-02-28 | 平面研磨装置 |
Related Parent Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP58108369A Division JPS59232768A (ja) | 1983-06-16 | 1983-06-16 | 平面研磨装置 |
Related Child Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP4258443A Division JPH0834737B2 (ja) | 1992-09-28 | 1992-09-28 | 平面研磨装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60217062A JPS60217062A (ja) | 1985-10-30 |
| JPH0373425B2 true JPH0373425B2 (enrdf_load_stackoverflow) | 1991-11-21 |
Family
ID=12553770
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60039464A Granted JPS60217062A (ja) | 1985-02-28 | 1985-02-28 | 平面研磨装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60217062A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995029039A1 (fr) * | 1994-04-22 | 1995-11-02 | Kabushiki Kaisha Toshiba | Plaque support de surface de meulage separable et appareil associe |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2985490B2 (ja) * | 1992-02-28 | 1999-11-29 | 信越半導体株式会社 | 研磨機の除熱方法 |
| WO2007043263A1 (ja) * | 2005-10-14 | 2007-04-19 | Asahi Glass Company, Limited | 研磨パッド用ツルーイング部材及び研磨パッドのツルーイング方法 |
| JP2008155312A (ja) * | 2006-12-22 | 2008-07-10 | Disco Abrasive Syst Ltd | 研削ホイール |
| CN103009237B (zh) * | 2012-12-11 | 2018-04-06 | 东莞润明电子科技有限公司 | 金字塔研磨盘 |
-
1985
- 1985-02-28 JP JP60039464A patent/JPS60217062A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO1995029039A1 (fr) * | 1994-04-22 | 1995-11-02 | Kabushiki Kaisha Toshiba | Plaque support de surface de meulage separable et appareil associe |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60217062A (ja) | 1985-10-30 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |