JPH0373425B2 - - Google Patents

Info

Publication number
JPH0373425B2
JPH0373425B2 JP60039464A JP3946485A JPH0373425B2 JP H0373425 B2 JPH0373425 B2 JP H0373425B2 JP 60039464 A JP60039464 A JP 60039464A JP 3946485 A JP3946485 A JP 3946485A JP H0373425 B2 JPH0373425 B2 JP H0373425B2
Authority
JP
Japan
Prior art keywords
solid
wrapping
fan
grindstone
shaped
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP60039464A
Other languages
Japanese (ja)
Other versions
JPS60217062A (en
Inventor
Kenichi Mihashi
Yasuoki Sasaki
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanebo Ltd
Original Assignee
Kanebo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Ltd filed Critical Kanebo Ltd
Priority to JP60039464A priority Critical patent/JPS60217062A/en
Publication of JPS60217062A publication Critical patent/JPS60217062A/en
Publication of JPH0373425B2 publication Critical patent/JPH0373425B2/ja
Granted legal-status Critical Current

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Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、被研磨体を、固形砥石表面に当接
し、固形砥石の作用により、研削または研磨を行
うラツピング研磨機等の平面研磨装置に関するも
のである。
DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a surface polishing device such as a lapping polisher that grinds or polishes an object to be polished by bringing it into contact with the surface of a solid whetstone and by the action of the solid whetstone. It is something.

〔従来の技術〕[Conventional technology]

従来、ラツピング研磨機に固形砥石を装着する
場合には、円周方向に回動する金属製定盤表面に
接着剤,ホツトメルト等を塗布し、固形砥石を接
着する方法が一般的であつた。
Conventionally, when attaching a solid grindstone to a wrapping polishing machine, the common method was to apply an adhesive, hot melt, etc. to the surface of a metal surface plate that rotates in the circumferential direction, and then adhere the solid grindstone.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、この方法では、大型のラツピング定盤
を研磨装置から取り外すことなく、その表面に砥
石を接着する作業にかなりの困難を伴うため、接
着力が弱かつたり、一部接着されない部分が生じ
たりして完全な接着ができず、研磨作業中に剥
離,脱落したりするトラブルが生じていた。ま
た、破損した砥石を交換したりする等の作業も極
めて困難であつた。特に、研磨機の型式が、2枚
のラツピング円盤の砥面を対面させて組み合わせ
た両面ラツピング研磨機である場合、この傾向が
著しかつた。さらに、研磨作業によつて砥石が全
て使いつくされ、新しい砥石を装着する場合は、
ラツピング定盤の表面に残留した砥石片,接着剤
等を完全に剥離除去し、表面を均一に浄化してか
ら装着する必要があるが、大型の定盤の全面にこ
の作業を施すためには、装置を分解して定盤を取
り外してから行うという極めて大がかりな作業が
必要で、多くの労力と時間とを費やして行わなけ
ればならず、稼動率の大幅な低下と運転経費の増
大という事態を招いていた。
However, with this method, it is quite difficult to attach the grinding wheel to the surface of the large lapping surface plate without removing it from the polishing machine, so the adhesive force may be weak or some parts may not be bonded. Because of this, complete adhesion was not possible, resulting in problems such as peeling and falling off during polishing work. In addition, it was extremely difficult to replace a damaged grindstone. This tendency was particularly noticeable when the type of polishing machine was a double-sided wrapping polishing machine in which two wrapping disks were combined with their abrasive surfaces facing each other. Furthermore, if all the whetstones are used up during polishing work and a new one is installed,
It is necessary to completely peel off any remaining grindstone pieces, adhesive, etc. on the surface of the wrapping surface plate, and cleanse the surface uniformly before mounting it.In order to perform this work on the entire surface of a large surface plate, , it is necessary to disassemble the equipment and remove the surface plate, which is an extremely large-scale work that requires a lot of effort and time, resulting in a significant decrease in operating efficiency and an increase in operating costs. was inviting.

一方、大型の円形ラツピング定盤に、同寸法の
固形砥石を装着する場合、固形砥石製作時におけ
る砥石材料の不均一混合,硬化度の不均一化,砥
石面の粗密度の不均一化に起因して均質な大形固
形砥石が得られないことに鑑み、大形の固形砥石
を複数個に区分し、各区分ごとに取り付けるとい
う提案がなされている(実開昭57−18954)。しか
し、この装置は、単に大形固形砥石を小形化し、
これを組合わせて大形固形砥石と同寸法の鉄板に
接着し、この鉄板自体をねじ等でラツピング定盤
に固着するものであつて各小形砥石は自由に取外
すことができないため、一部が破損してもその破
損部分のみを交換することができないという欠点
を有している。また、固形砥石の砥石面は外周側
がよく摩耗することから外周側に相当する小形砥
石の硬度を内周側のそれよりも高くしている結
果、2種類の硬度の異なる小形砥石を製作しなけ
ればならず、製作が煩雑になり、また製品コスト
も高くなるという問題を有している。
On the other hand, when a solid grindstone of the same size is mounted on a large circular wrapping surface plate, problems may occur due to uneven mixing of the grinding wheel materials, uneven hardening, and uneven roughness of the grinding wheel surface during the production of the solid grindstone. In view of the fact that it is not possible to obtain a large, homogeneous solid grindstone, a proposal has been made to divide the large solid grindstone into a plurality of pieces and attach them to each section (Utility Model Application Publication No. 57-18954). However, this device simply miniaturizes a large solid grindstone.
These are combined and glued to a steel plate of the same size as the large solid grindstone, and this steel plate itself is fixed to the wrapping surface plate with screws, etc., and each small grindstone cannot be freely removed, so some parts It has the disadvantage that even if it is damaged, only the damaged part cannot be replaced. In addition, since the outer circumferential side of the grinding wheel surface of a solid whetstone is often worn, the hardness of the small grindstone corresponding to the outer circumferential side is made higher than that of the inner circumferential side.As a result, it is necessary to manufacture small whetstones with two different hardnesses. However, there are problems in that the manufacturing is complicated and the product cost is also high.

この発明は、このような事情に鑑みなされたも
ので、摩耗,損傷した砥石の部分のみを簡単に交
換でき、製作の煩雑さ等の問題を生じることなく
固形砥石の外周側の偏摩耗を阻止することのでき
る平面研磨装置の提供をその目的とする。
This invention was made in view of these circumstances, and it is possible to easily replace only the worn or damaged part of the grindstone, and prevent uneven wear on the outer circumference of the solid grindstone without causing problems such as complicated manufacturing. The purpose is to provide a flat surface polishing device that can perform the following steps.

〔問題点を解決するための手段〕[Means for solving problems]

上記の目的を達成するため、この発明の平面研
磨装置は、円形盤状または環形盤状のラツピング
定盤に固形砥石を装着した構造のラツピング円盤
を備えた平面研磨装置において、ラツピング定盤
と固形砥石の間に上記ラツピング定盤と略同形状
の取付板を介在させ、この取付板を、その中心部
分を横切る仮想直線によつて区画した等面積の複
数の扇形片に分割して上記ラツピング定盤に着脱
自在に取り付けるとともに、上記仮想直線の跡を
各分割片間の流路に形成し、この扇形分割片に、
それぞれその分割片と略等しい形状の扇形固形砥
石を固着し、この扇形固形砥石の砥石面にそれぞ
れその一側縁から他側縁に斜めに延びる斜溝を形
成したという構成をとる。
In order to achieve the above object, the surface polishing device of the present invention is a surface polishing device equipped with a wrapping disk having a structure in which a solid grindstone is attached to a wrapping surface plate in the shape of a circular disk or an annular disk. A mounting plate having approximately the same shape as the wrapping surface plate is interposed between the grinding wheels, and this mounting plate is divided into a plurality of fan-shaped pieces of equal area divided by an imaginary straight line crossing the center portion of the mounting plate. In addition to being removably attached to the panel, traces of the above-mentioned virtual straight lines are formed in the flow paths between each divided piece, and this fan-shaped divided piece is
A sector-shaped solid whetstone having a shape substantially equal to that of the divided pieces is fixed to each part, and a diagonal groove extending obliquely from one side edge to the other side edge is formed on the whetstone surface of each of the sector-shaped solid whetstones.

〔作用〕[Effect]

すなわち、この発明の平面研磨装置は、ラツピ
ング円盤回転時に、扇形固形砥石の内周側の砥石
面で生じた研磨屑等が、外周側の砥石面に移行せ
ず、その砥石に形成された斜溝を通り、扇形固形
砥石間の流路から外部へ放出されるようになつて
いる。したがつて、研磨屑等の多量分布による外
周側の偏摩耗は生じない。また、複数の扇形固形
砥石のうち、ある砥石が損傷等したときには、そ
の扇形固形砥石のみを取付板分割片ごと取外し、
予備のものと簡単に交換することができる。
That is, in the surface polishing device of the present invention, when the wrapping disk rotates, polishing debris generated on the inner grinding wheel surface of the fan-shaped solid grindstone does not transfer to the outer grinding wheel surface, and the slanted particles formed on the grinding wheel are removed. It passes through the groove and is discharged to the outside from the flow path between the fan-shaped solid grinding wheels. Therefore, uneven wear on the outer circumferential side due to large distribution of polishing debris does not occur. In addition, if one of the multiple fan-shaped solid whetstones is damaged, remove only that fan-shaped solid whetstone along with the mounting plate division pieces,
It can be easily replaced with a spare one.

つぎに、この発明を実施例にもとづいて詳しく
説明する。
Next, the present invention will be explained in detail based on examples.

〔実施例〕〔Example〕

第1図はこの発明の一実施例を示している。図
において、ラツピング円盤は、中心穴付きラツピ
ング定盤13に、取付板分割片13aを介して略
扇形の固形砥石15を複数個螺着することにより
構成されている。13bは固形砥石15の間に放
射状に形成された隙間からなる流路で、研磨粉や
脱落砥粒を外部に排出する。この場合において、
取付板分割片13aは、それぞれ、上記ラツピン
グ定盤13を、その中心を横切る複数の仮想線分
によつて区画して形成される複数個の区域(全て
等面積)の平面形状(略扇形)と等しい平面形状
に構成されていて互換性を有しており、それぞれ
に2個のねじ穴21(第3図参照)が形成されて
いる。この取付板分割片13aの上には、第2図
に示すように、その分割片13aと同形の略扇形
の固形砥石15が、ねじ穴16を取付板分割片1
3aのねじ穴21に合わせて積重され、その状態
で第3図に示すように、ねじ17をねじ穴16,
21に挿入してラツピング定盤13に螺着され
る。15bは、固形砥石15の一側縁から他側縁
に延びる斜溝で、固形砥石15を斜めに上下二分
割している。そして、この斜溝15bにより固形
砥石15の左右両側の流路13bが連通状態にな
る。このようなラツピング円盤を備えた平面研磨
装置は、ラツピング円盤および工作物(図示せ
ず)を相対的に回動させながら湿式法に基づいて
工作物表面の研磨を行う。
FIG. 1 shows an embodiment of the invention. In the figure, the wrapping disk is constructed by screwing a plurality of substantially sector-shaped solid grindstones 15 onto a wrapping surface plate 13 with a center hole through mounting plate division pieces 13a. Reference numeral 13b denotes a flow path consisting of a gap formed radially between the solid grindstones 15, through which polishing powder and fallen abrasive grains are discharged to the outside. In this case,
Each of the mounting plate division pieces 13a has a planar shape (approximately fan-shaped) of a plurality of areas (all having the same area) formed by dividing the wrapping surface plate 13 by a plurality of imaginary line segments crossing the center thereof. They are configured to have the same planar shape and are compatible, and two screw holes 21 (see FIG. 3) are formed in each. As shown in FIG. 2, on this mounting plate divided piece 13a, a substantially sector-shaped solid whetstone 15 having the same shape as the divided piece 13a is installed, and a screw hole 16 is inserted into the mounting plate divided piece 1.
3a, and in this state, as shown in FIG.
21 and screwed onto the wrapping surface plate 13. 15b is a diagonal groove extending from one side edge of the solid whetstone 15 to the other side edge, and diagonally divides the solid whetstone 15 into upper and lower halves. The diagonal grooves 15b allow the channels 13b on both the left and right sides of the solid grindstone 15 to communicate with each other. A surface polishing apparatus equipped with such a wrapping disk polishes the surface of a workpiece based on a wet method while relatively rotating the wrapping disk and the workpiece (not shown).

この装置においては、1個のラツピング円盤に
対して2組の取付板分割片13aを用意し、常に
1組を予備としておく。そして、研磨装置が稼動
中に、予備の取付板分割片13aの表面を清浄化
したうえで、固形砥石15を取り付けて、準備を
整える。稼動中のラツピング円盤の任意の砥石1
5が使いつくされた場合、ラツピング円盤よりそ
の固形砥石15を取付板分割片13aごと取り外
し、予備の組と交換する。このようにすることに
より、容易迅速に運転を再開することができるよ
うになる。この場合、全固形砥石15が摩耗した
ときには、全体を交換することが行われる。
In this device, two sets of mounting plate division pieces 13a are prepared for one wrapping disk, and one set is always kept as a spare. Then, while the polishing device is in operation, the surface of the preliminary mounting plate division piece 13a is cleaned, and then the solid grindstone 15 is attached and preparations are made. Any grinding wheel 1 of the lapping disk in operation
When the grindstone 5 is used up, the solid grindstone 15 is removed from the wrapping disk together with the mounting plate divided pieces 13a and replaced with a spare set. By doing so, operation can be resumed easily and quickly. In this case, when the all-solid grindstone 15 is worn out, the entire solid grindstone 15 is replaced.

なお、取付板分割片13aの材質は特に限定さ
れていないが、軽量性,強度およびコスト面等か
ら考えて、アルミニウム合金等の軽金属,プラス
チツク板およびガラス繊維補強プラスチツク板等
の軽量構造材料が好適である。さらに、ラツピン
グ円盤の表面に取り付けられる取付板分割片13
aによる周方向の分割数は、ラツピング円盤の大
きさにより適宜変えることが望ましい。例えば外
径1000mm以上の大型円盤においては16〜24分割
し、それ以下の小型円盤では2〜16分割といつた
比較的少ない分割で充分である。
The material of the mounting plate segment 13a is not particularly limited, but from the viewpoint of lightness, strength, cost, etc., light metals such as aluminum alloy, lightweight structural materials such as plastic plates and glass fiber-reinforced plastic plates are suitable. It is. Furthermore, a mounting plate division piece 13 attached to the surface of the wrapping disk
It is desirable that the number of divisions in the circumferential direction by a is changed as appropriate depending on the size of the wrapping disk. For example, a relatively small number of divisions, such as 16 to 24 divisions for a large disc with an outer diameter of 1000 mm or more, and 2 to 16 divisions for a smaller disc, is sufficient.

〔発明の効果〕〔Effect of the invention〕

この発明の平面研磨装置は、ラツピング定盤と
固形砥石の間に介在する取付板を等面積の複数の
扇形片に分割して上記ラツピング定盤に着脱自在
に取り付け、この扇形片にその分割片と略等しい
形状の扇形固形砥石をそれぞれ固着している。し
たがつて、扇形固形砥石のうちのいずれかが損傷
等した時には、その扇形固形砥石のみを扇形分割
片ごと取り外して予備のものと交換することによ
り簡単に修理することができる。その結果、従来
例のように、固形砥石の一部が損傷しても全体を
取換えるという不都合な事態を招かない。この場
合、ラツピング定盤上の複数の扇形砥石は扇形分
割片も含めて全て同形状であるため、予備品は1
種類の形状のもので対応できるという利点があ
る。また、上記交換は簡単で時間をとらないこと
から、操作の停止時間も極めて少なくてすむよう
になる。そのうえ、上記扇形固形砥石の間を流路
に形成し研磨屑や脱離砥粒を外周側に排出させる
ため、砥石面に余分な研磨屑等が存在せず砥石寿
命を長くすることができる。特に、この発明で
は、上記扇形固形砥石の一側縁から他側縁に向か
つて斜溝を設け、扇形固形砥石を内周側と外周側
に分割した構造としているため扇形固形砥石の外
周側の砥石面には、内周側で生じた研磨屑や脱離
砥粒が到達しない。すなわち、本来、扇形固形砥
石の外周側の砥石面上には、内周側の砥石面上で
生じた研磨屑等がラツピング円盤回転時の遠心力
によつて到来しそれらの量が増加する。これによ
つて摩擦抵抗が多くなり砥石面の摩耗が多くなる
ところ、上記斜溝の形成により、内周側の砥石面
で生じた研磨屑等は、斜溝内に落ち、砥石間の流
路を通つて外部へ排出される。その結果、扇形固
形砥石の砥石面は、内周側でも外周側でも研磨
屑,脱離砥粒の分布量は略同一になり、外周側の
砥石面の偏摩耗が少なくなる。この場合、上記斜
溝は、一側縁から他側縁に向かつて斜めに形成さ
れているため、斜溝に入つた研磨屑等は、ラツピ
ング円盤回転時の慣性力により一側縁から他側縁
に向かつて勢いよく移動し、その勢いで扇形固形
砥石間の流路へ入り、今度は遠心力によつて外部
へ排出される。したがつて、幅を狭くしても研磨
屑等の詰まりが生じず、その結果、斜溝の面積を
できるだけ小さくして砥石面積の犠牲を最小限に
することができるようになる。
In the surface polishing device of the present invention, a mounting plate interposed between a wrapping surface plate and a solid grindstone is divided into a plurality of fan-shaped pieces of equal area and detachably attached to the wrapping surface plate, and the divided pieces are attached to the fan-shaped pieces. A fan-shaped solid whetstone of approximately the same shape is fixed to each. Therefore, if any of the sector-shaped solid grindstones is damaged, it can be easily repaired by removing only the sector-shaped solid grindstone together with the sector-shaped divided pieces and replacing it with a spare one. As a result, unlike the conventional example, even if a part of the solid grindstone is damaged, there is no need to replace the entire solid grindstone. In this case, since all the fan-shaped grindstones on the wrapping surface plate have the same shape, including the fan-shaped divided pieces, only one spare part is needed.
It has the advantage of being compatible with various shapes. Furthermore, since the above-mentioned replacement is easy and does not take much time, the downtime for operation can be extremely shortened. Furthermore, since a flow path is formed between the sector-shaped solid grindstones and the abrasive debris and detached abrasive grains are discharged to the outer circumferential side, there is no excess abrasive debris on the grindstone surface, and the life of the abrasive wheel can be extended. In particular, in this invention, a diagonal groove is provided from one side edge of the fan-shaped solid whetstone to the other side edge, and the fan-shaped solid whetstone is divided into an inner circumferential side and an outer circumferential side. Polishing debris and detached abrasive grains generated on the inner peripheral side do not reach the grinding wheel surface. That is, originally, polishing debris generated on the inner grinding wheel surface of the fan-shaped solid grindstone arrives on the outer circumferential grinding wheel surface due to the centrifugal force when the wrapping disk rotates, and the amount thereof increases. This increases frictional resistance and increases wear on the grinding wheel surface, but due to the formation of the diagonal grooves, polishing debris generated on the inner grinding wheel surface falls into the diagonal grooves, creating a flow path between the grinding wheels. is discharged to the outside through. As a result, on the grindstone surface of the sector-shaped solid grindstone, the distribution amount of polishing debris and detached abrasive grains is approximately the same on both the inner and outer circumferential sides, and uneven wear on the outer circumference side is reduced. In this case, since the diagonal groove is formed diagonally from one side edge to the other side edge, the polishing debris etc. that entered the diagonal groove are moved from one side edge to the other side due to the inertial force when the wrapping disk rotates. It moves vigorously towards the edge, enters the channel between the fan-shaped solid grinding wheels, and is then discharged to the outside by centrifugal force. Therefore, even if the width is narrowed, clogging with polishing debris does not occur, and as a result, the area of the diagonal groove can be made as small as possible to minimize the sacrifice of the area of the grinding wheel.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例に用いるラツピン
グ円盤の斜視図、第2図および第3図はその構成
部品の説明図である。 13…ラツピング定盤、13a…取付板分割
片、15…扇形固形砥石、15b…斜溝。
FIG. 1 is a perspective view of a wrapping disk used in an embodiment of the present invention, and FIGS. 2 and 3 are explanatory views of its constituent parts. 13... Wrapping surface plate, 13a... Mounting plate divided piece, 15... Fan-shaped solid grindstone, 15b... Diagonal groove.

Claims (1)

【特許請求の範囲】 1 円形盤状または環形盤状のラツピング定盤に
固形砥石を装着した構造のラツピング円盤を備え
た平面研磨装置において、ラツピング定盤と固形
砥石の間に上記ラツピング定盤と略同形状の取付
板を介在させ、この取付板を、その中心部分を横
切る仮想直線によつて区画した等面積の複数の扇
形片に分割して上記ラツピング定盤に着脱自在に
取り付けるとともに、上記仮想直線の跡を各分割
片間の流路に形成し、この扇形分割片に、それぞ
れその分割片と略等しい形状の扇形固形砥石を固
着し、この扇形固形砥石の砥石面にそれぞれその
一側縁から他側縁に斜めに延びる斜溝を形成した
ことを特徴とする平面研磨装置。 2 取付板分割片が、アルミニウム合金,プラス
チツクスまたはガラス繊維補強プラスチツクスか
らなる軽量構造材料で構成されている特許請求の
範囲第1項記載の平面研磨装置。
[Scope of Claims] 1. In a surface polishing device equipped with a wrapping disk having a structure in which a solid grindstone is attached to a circular or annular wrapping surface plate, the wrapping surface plate and the solid grindstone are provided between the wrapping surface plate and the solid grindstone. A mounting plate having approximately the same shape is interposed, and the mounting plate is divided into a plurality of fan-shaped pieces of equal area divided by an imaginary straight line that crosses the center portion, and is removably attached to the wrapping surface plate, and the above-mentioned A trace of a virtual straight line is formed in the flow path between each divided piece, and a sector-shaped solid whetstone of approximately the same shape as the divided piece is fixed to each of the fan-shaped divided pieces, and a grinding wheel surface of the fan-shaped solid whetstone is attached to one side of each of the fan-shaped solid whetstones. A flat surface polishing device characterized in that a diagonal groove is formed that extends diagonally from one edge to the other side edge. 2. The surface polishing apparatus according to claim 1, wherein the mounting plate segment is made of a lightweight structural material such as aluminum alloy, plastics, or glass fiber reinforced plastics.
JP60039464A 1985-02-28 1985-02-28 Surface polishing device Granted JPS60217062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60039464A JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60039464A JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58108369A Division JPS59232768A (en) 1983-06-16 1983-06-16 Flat polishing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4258443A Division JPH0834737B2 (en) 1992-09-28 1992-09-28 Flat polishing machine

Publications (2)

Publication Number Publication Date
JPS60217062A JPS60217062A (en) 1985-10-30
JPH0373425B2 true JPH0373425B2 (en) 1991-11-21

Family

ID=12553770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60039464A Granted JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Country Status (1)

Country Link
JP (1) JPS60217062A (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995029039A1 (en) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same

Families Citing this family (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP2985490B2 (en) * 1992-02-28 1999-11-29 信越半導体株式会社 Heat removal method of polishing machine
WO2007043263A1 (en) * 2005-10-14 2007-04-19 Asahi Glass Company, Limited Truing member for abrasive pad and truing method of abrasive pad
JP2008155312A (en) * 2006-12-22 2008-07-10 Disco Abrasive Syst Ltd Grinding wheel
CN103009237B (en) * 2012-12-11 2018-04-06 东莞润明电子科技有限公司 Pyramid grinding plate

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995029039A1 (en) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same

Also Published As

Publication number Publication date
JPS60217062A (en) 1985-10-30

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