JPH0834737B2 - Flat polishing machine - Google Patents

Flat polishing machine

Info

Publication number
JPH0834737B2
JPH0834737B2 JP4258443A JP25844392A JPH0834737B2 JP H0834737 B2 JPH0834737 B2 JP H0834737B2 JP 4258443 A JP4258443 A JP 4258443A JP 25844392 A JP25844392 A JP 25844392A JP H0834737 B2 JPH0834737 B2 JP H0834737B2
Authority
JP
Japan
Prior art keywords
lapping
mounting plate
plate
polishing apparatus
grindstone
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP4258443A
Other languages
Japanese (ja)
Other versions
JPH0639733A (en
Inventor
堅一 三橋
泰興 佐々木
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanebo Ltd
Original Assignee
Kanebo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Ltd filed Critical Kanebo Ltd
Priority to JP4258443A priority Critical patent/JPH0834737B2/en
Publication of JPH0639733A publication Critical patent/JPH0639733A/en
Publication of JPH0834737B2 publication Critical patent/JPH0834737B2/en
Anticipated expiration legal-status Critical
Expired - Lifetime legal-status Critical Current

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Description

【発明の詳細な説明】Detailed Description of the Invention

【0001】[0001]

【産業上の利用分野】この発明は、被研磨体を、固形砥
石表面に当接し、固形砥石の作用により、研削または研
磨を行うラッピング研磨機等の平面研磨装置に関するも
のである。
BACKGROUND OF THE INVENTION 1. Field of the Invention The present invention relates to a flat polishing apparatus such as a lapping polishing machine for bringing an object to be polished into contact with the surface of a solid grindstone and performing grinding or polishing by the action of the solid grindstone.

【0002】[0002]

【従来の技術】従来、ラッピング研磨機に固形砥石を装
着する場合には、円周方向に回動する金属製定盤表面に
接着剤,ホットメルト等を塗布し、固形砥石を接着する
方法が一般的であった。
2. Description of the Related Art Conventionally, when a solid grindstone is mounted on a lapping grinder, a method is generally used in which a solid grindstone is adhered by applying an adhesive, hot melt or the like on the surface of a metal surface plate which rotates in a circumferential direction. It was target.

【0003】[0003]

【発明が解決しようとする課題】しかし、この方法で
は、大型のラッピング定盤を研磨装置から取り外すこと
なく、その表面に砥石を接着する作業にかなりの困難を
伴うため、接着力が弱かったり、一部接着されない部分
が生じたりして完全な接着ができず、研磨作業中に剥
離,脱落したりするトラブルが生じていた。また、破損
した砥石を交換したりする等の作業も極めて困難であっ
た。特に、研磨機の型式が、2枚のラッピング円盤の砥
面を対面させて組み合わせた両面ラッピング研磨機であ
る場合、この傾向が著しかった。
However, in this method, since the work of adhering the grindstone to the surface of the lapping platen without removing the large lapping plate from the polishing device is considerably difficult, the adhesive force is weak, There were some parts that were not adhered, so perfect adhesion was not possible, and there was a problem of peeling and falling off during polishing work. Further, it is extremely difficult to replace the broken grindstone. This tendency was remarkable especially when the type of the polishing machine was a double-sided lapping polishing machine in which the polishing surfaces of two lapping disks were faced and combined.

【0004】さらに、研磨作業によって砥石が全て使い
つくされ、新しい砥石を装着する場合は、ラッピング定
盤の表面に残留した砥石片,接着剤等を完全に剥離除去
し、表面を均一に浄化してから装着する必要があるが、
大型の定盤の全面にこの作業を施すためには、装置を分
解して定盤を取り外してから行うという極めて大がかり
な作業になり、多くの労力と時間とを費やして行わなけ
ればならず、稼動率の大幅な低下と運転経費の増大とい
う事態を招いていた。
Further, when all the grindstones are used up by the polishing work and a new grindstone is installed, the grindstone pieces, adhesive, etc. remaining on the surface of the lapping platen are completely peeled and removed to uniformly purify the surface. It is necessary to install it later,
In order to perform this work on the entire surface of a large surface plate, it becomes an extremely large-scale work of disassembling the device and removing the surface plate, which requires a lot of labor and time. This caused a large decrease in operating rate and an increase in operating costs.

【0005】本発明者らは、従来のラッピング研磨機の
有する上述の問題点を解決するために、鋭意研究を行
い、この発明を完成するに至ったものであり、その目的
とするところは、砥石の交換が容易で、かつ確実な装着
が可能であり、それによって稼動率を大幅に向上させう
る平面研磨装置を提供することにある。
The present inventors have conducted intensive studies to solve the above-mentioned problems of the conventional lapping and polishing machine, and have completed the present invention. It is an object of the present invention to provide a flat surface polishing apparatus in which the grindstone can be easily replaced and can be reliably mounted, and thereby the operation rate can be significantly improved.

【0006】[0006]

【課題を解決するための手段】上記の目的を達成するた
めに、この発明の平面研磨装置は、円形盤状または環形
盤状のラッピング定盤に固形砥石を装着した構造のラッ
ピング円盤を備えてなる平面研磨装置において、上記定
盤面をその中心部分または内円を横切る線によって区画
した複数個の区域とそれぞれ実質的に等しい平面形状を
有する取付板分割片に固形砥石を配設し、固形砥石の砥
石面に半径方向の一側縁から半径方向の他側縁に向かっ
て、回転方向の前方の溝の端部より回転方向後方の溝の
端部が回転中心より遠くなるように斜めに延びる斜溝を
形成し、この取付板分割片を前記ラッピング定盤上に着
脱自在に装着したという構成をとる。
In order to achieve the above object, the surface polishing apparatus of the present invention comprises a lapping disk having a structure in which a solid grinding stone is mounted on a lapping plate having a circular disk shape or an annular disk shape. In the flat polishing apparatus, the solid whetstone is arranged on a mounting plate divided piece having a planar shape substantially equal to a plurality of areas obtained by dividing the surface plate surface by a line crossing a central portion or an inner circle thereof. The groove surface extends diagonally from one edge in the radial direction to the other edge in the radial direction so that the end of the groove rearward in the rotational direction is farther from the center of rotation than the end of the front groove in the rotational direction. The oblique groove is formed, and the mounting plate divided piece is detachably mounted on the lapping plate.

【0007】つぎに、この発明を実施例にもとづいて詳
しく説明する。
Next, the present invention will be described in detail based on embodiments.

【0008】[0008]

【実施例】図1はこの発明の一実施例を示している。図
において、1はラッピング円盤で、中心穴付きラッピン
グ定盤2に、取付板分割片3を介して略扇形の固形砥石
4を複数個螺着することにより構成されている。3aは
固形砥石4の間に放射状に形成された隙間で、研磨粉や
脱落砥粉を外部に排出する。この場合において、取付板
分割片3は、それぞれ、上記ラッピング定盤2を、その
中心を横切る複数の仮想線分によって区画して形成され
る複数個の区域(全て等面積)の平面形状(略扇形)と
等しい平面形状に構成されていて互換性を有しており、
それぞれに2個のねじ穴(隠れて見えない)が形成され
ている。この取付板分割片3の上には、その分割片3と
同形の略扇形の固形砥石4が、ねじ穴4aを取付板分割
片3のねじ穴に合わせて積重され、その状態で、ねじ
(隠れて見えない)をねじ穴4aに挿入してラッピング
定盤2に、取付板分割片3ごと螺着される。この固形砥
石4は、図1に示すように、その砥石面に、半径方向の
一側縁から半径方向の他側縁に向かって、回転方向の前
方の溝の端部より回転方向後方の溝の端部が回転中心よ
り遠くなるように斜めに延びる斜溝15bを有してい
る。このようなラッピング円盤1を備えた平面研磨装置
は、ラッピング円盤1および工作物(図示せず)を相対
的に回動させながら湿式法に基づいて工作物表面の研磨
を行う。
FIG. 1 shows an embodiment of the present invention. In the figure, reference numeral 1 denotes a lapping disk, which is constructed by screwing a plurality of substantially fan-shaped solid grindstones 4 to a lapping platen 2 with a central hole through a mounting plate divided piece 3. 3a is a gap formed radially between the solid whetstones 4 and discharges the polishing powder and the falling abrasive powder to the outside. In this case, each of the mounting plate divided pieces 3 has a planar shape (substantially equal area) of a plurality of areas (all having the same area) formed by partitioning the lapping platen 2 by a plurality of virtual line segments that cross the center thereof. It has the same plane shape as the fan shape and has compatibility,
Each has two screw holes (hidden and invisible). On this mounting plate divided piece 3, a substantially fan-shaped solid grindstone 4 having the same shape as that of the divided piece 3 is stacked by aligning the screw holes 4a with the screw holes of the mounting plate divided piece 3, and in that state, the screw (Hidden and invisible) is inserted into the screw hole 4a, and the mounting plate divided piece 3 is screwed onto the lapping platen 2. As shown in FIG. 1, the solid grindstone 4 has a groove on the surface of the grindstone, which is located on the rear side in the rotational direction from the end of the groove on the front side in the rotational direction from one side edge in the radial direction to the other side edge in the radial direction. Has an oblique groove 15b extending obliquely so that its end portion is farther from the center of rotation. The flat surface polishing apparatus provided with such a lapping disc 1 polishes the surface of the workpiece based on the wet method while relatively rotating the lapping disc 1 and the workpiece (not shown).

【0009】この装置においては、1個のラッピング円
盤1に対して2組の取付板分割片3を用意し、常に1組
を予備としておく。そして、研磨装置が稼動中に、予備
の取付板分割片3の表面を清浄化したうえで、固形砥石
4を取り付けて、準備を整える。稼動中のラッピング円
盤1の砥石4が使いつくされた場合、または砥石の種
類,番手を交換する必要が生じた場合等は、ラッピング
円盤1より固形砥石4を取付板分割片3ごと取り外し、
予備の組と交換する。このようにすることにより、容易
迅速に運転を再開することができるようになる。
In this apparatus, two sets of mounting plate divided pieces 3 are prepared for one lapping disk 1, and one set is always reserved. Then, while the polishing apparatus is in operation, the surface of the spare mounting plate divided piece 3 is cleaned, and then the solid grindstone 4 is mounted to prepare for it. When the whetstone 4 of the lapping disk 1 in operation is used up, or when it is necessary to replace the type and number of the whetstone, the solid whetstone 4 is removed from the lapping disk 1 together with the mounting plate divided piece 3,
Replace with a spare set. By doing so, the operation can be restarted easily and quickly.

【0010】なお、取付板分割片3の材質は特に限定さ
れていたが、軽量性,強度およびコスト面等から考え
て、アルミニウム合金等の軽金属,プラスチック板およ
びガラス繊維補強プラスチック板等の軽量構造材料が好
適である。さらに、ラッピング定盤2の表面に取り付け
られる取付板分割片3の数は、ラッピング円盤1の大き
さにより適宜変えることが望ましい。例えば外径100
0mm以上の大型円盤においては16〜24分割し、そ
れ以下の小型円盤では2〜16分割といった比較的少な
い分割で充分である。
Although the material of the mounting plate divided piece 3 is particularly limited, in view of lightness, strength and cost, a lightweight structure such as a light metal such as an aluminum alloy, a plastic plate or a glass fiber reinforced plastic plate is used. Materials are preferred. Further, it is desirable that the number of the mounting plate divided pieces 3 mounted on the surface of the lapping platen 2 be appropriately changed depending on the size of the lapping disc 1. For example, outer diameter 100
A relatively small division such as 16 to 24 divisions for a large disc of 0 mm or more and 2 to 16 divisions for a smaller disc of less than that is sufficient.

【0011】図2は、上記ラッピング定盤2を詳しく説
明するための平面図である。図において、ラッピング定
盤2は、円形盤状または中央内円部分が透孔に形成され
ている環形盤状になっている。この定盤2はその中心J
または内円Kを横切る仮想線分a〜dによって複数個の
区域A〜Hに区画されている。この場合、上記仮想線分
a〜dは直線であり、区域A〜Hを全て同一形状,等面
積の略扇形に区画することが最も好ましい。上記定盤2
の各区域には、それぞれねじ穴5が穿設されている。上
記定盤2の定盤面の区画された区域には、図1に示すよ
うに、それぞれの区域と実質的に等しい平面形状を有す
る取付板分割片3が装着される。ここにいう「実質的に
等しい」とは、例えば略扇形の区域に対して台形の取付
板分割片を装着したり、隣接する取付板分割片の間に若
干の間隙を設ける必要がある場合等における僅少の誤差
が許容されることを意味するものである。この取付板分
割片3は、前記定盤面の略扇形区域に対応するもので、
前記ねじ穴5と合致するねじ穴を有している。取付板分
割片3の表面には、図3,4に示すように、固形砥石4
を接着固定することも行われる。図において、4aは、
固形砥石4を取付板分割片3ごとラッピング定盤に取り
付けるためのねじ穴、15bは、固形砥石4に形成され
た斜溝で、研磨粉や脱落砥粒を回転による遠心力によっ
て外部に排出する作用をする。
FIG. 2 is a plan view for explaining the lapping platen 2 in detail. In the figure, the lapping platen 2 has a circular plate shape or an annular plate shape in which a central inner circular portion is formed as a through hole. This surface plate 2 is the center J
Alternatively, it is divided into a plurality of sections A to H by virtual line segments a to d crossing the inner circle K. In this case, the imaginary line segments a to d are straight lines, and it is most preferable to partition the sections A to H into substantially fan-shaped sections having the same shape and the same area. Plate 2 above
A screw hole 5 is formed in each of the areas. As shown in FIG. 1, mounting plate division pieces 3 having a planar shape substantially equal to the respective areas are attached to the divided areas of the surface plate of the surface plate 2. The term "substantially equal" as used herein means that, for example, it is necessary to attach trapezoidal mounting plate divided pieces to a substantially fan-shaped area, or to provide a slight gap between adjacent mounting plate divided pieces. It means that a small error in is allowed. This mounting plate divided piece 3 corresponds to the substantially fan-shaped area of the surface plate,
It has a screw hole that matches the screw hole 5. As shown in FIGS. 3 and 4, the solid grindstone 4 is provided on the surface of the mounting plate divided piece 3.
Is also fixed by adhesion. In the figure, 4a is
A screw hole for attaching the solid grindstone 4 to the lapping platen together with the mounting plate divided pieces 3, 15b is a slant groove formed in the solid grindstone 4, and discharges abrasive powder and fallen abrasive grains to the outside by centrifugal force due to rotation. To work.

【0012】[0012]

【発明の効果】この発明に係る平面研磨装置によれば、
ラッピング円盤への砥石の取り付けあるいは交換作業が
極めて容易迅速となり、作業者の負担を著しく軽減しう
ると同時に装置の稼動率を大幅に向上させることが可能
となる。すなわち、従来、ラッピング定盤に砥石を接着
するためには、少なくとも1日は稼動を休止し剥離,接
着作業をしなければならないところ、この発明の装置で
は、取付板分割片を別に1組準備しておき、これに予め
砥石を接着しておくことにより、砥石交換に要する時間
を著しく短縮しうる。さらに種類,番手を変えた砥石を
必要に応じて準備しておけば、随時交換も可能であり、
1台の研磨装置を多目的に使用することも可能となる。
また、何等かの事由により砥石の一つが破損したり異常
品質のものが混入した場合もその部分のみ容易に交換が
可能になり、経済的である。また、砥石の接着作業が比
較的軽量小型であって取り扱い容易な取付板分割片につ
いて行われるため、綿密丹念な作業が可能となり、接着
ミス,接着不良による事故が殆どなくなり、稼動率の向
上,労働力の節減と相俟って、運転経費を著しく低減す
ることができる等の顕著な効果が得られるものである。
そのうえ、この発明では、固定砥石の砥石面に、半径方
向の一側縁から半径方向の他側縁に向かって、回転方向
の前方の溝の端部より回転方向後方の溝の端部が、回転
中心より遠くなるように斜溝を形成している。そのた
め、砥石面で生じた研磨屑等は斜溝に入り、ラッピング
円盤回転時の遠心力により、回転方向の前方の溝の端部
から回転方向後方の溝の端部に向かって勢いよく移動
し、外部へ排出される。したがって、研磨屑等の目詰ま
りが生じず、その結果、砥石寿命を長くすることができ
るようになる。
According to the flat polishing apparatus of the present invention,
The work of attaching or exchanging the grindstone to the lapping disk becomes extremely easy and quick, and the burden on the operator can be significantly reduced, and at the same time, the operating rate of the device can be greatly improved. That is, conventionally, in order to bond the grindstone to the lapping platen, it has been necessary to suspend the operation for at least one day to perform the peeling and bonding work. In the device of the present invention, one set of separate mounting plate divided pieces is prepared. By preliminarily adhering the grindstone to this, the time required for exchanging the grindstone can be significantly shortened. Furthermore, if you prepare a whetstone with a different type and count as needed, you can replace it at any time.
It is also possible to use one polishing device for multiple purposes.
Further, even if one of the grindstones is damaged or abnormal quality is mixed due to some reason, only that portion can be easily replaced, which is economical. Also, since the grindstone bonding work is performed on the mounting plate divided pieces that are relatively lightweight and small and easy to handle, careful work can be performed, and accidents due to bonding mistakes and bonding defects are almost eliminated, improving the operation rate, Combined with the labor saving, it is possible to obtain remarkable effects such as a significant reduction in operating costs.
Moreover, in the present invention, on the grindstone surface of the fixed grindstone, from the one side edge in the radial direction to the other side edge in the radial direction, the end of the groove in the rotation direction behind the end of the groove in the rotation direction is, The slant groove is formed so as to be farther from the center of rotation. Therefore, the polishing dust, etc. generated on the surface of the grindstone enters the slanted groove and is moved vigorously from the end of the groove in the front in the rotating direction to the end of the groove in the rear in the rotating direction by the centrifugal force when the lapping disk rotates. , Discharged to the outside. Therefore, clogging of polishing dust or the like does not occur, and as a result, the life of the grindstone can be extended.

【図面の簡単な説明】[Brief description of drawings]

【図1】この発明のラッピング円盤の斜視図である。FIG. 1 is a perspective view of a lapping disk according to the present invention.

【図2】この発明の実施例に用いるラッピング円盤の組
立説明図である。
FIG. 2 is an assembly explanatory diagram of a lapping disk used in an embodiment of the present invention.

【図3】この発明の実施例に用いるラッピング円盤の組
立説明図である。
FIG. 3 is an assembly explanatory diagram of a lapping disk used in an embodiment of the present invention.

【図4】この発明の実施例に用いるラッピング円盤の組
立説明図である。
FIG. 4 is an assembly explanatory diagram of a lapping disk used in an embodiment of the present invention.

【符号の説明】[Explanation of symbols]

1 ラッピング円盤 2 ラッピング定盤 3 取付板分割片 4 固形砥石 1 Lapping disk 2 Lapping plate 3 Mounting plate division piece 4 Solid whetstone

Claims (3)

【特許請求の範囲】[Claims] 【請求項1】円形盤状または環形盤状のラッピング定盤
に固形砥石を装着した構造のラッピング円盤を備えてな
る平面研磨装置において、上記定盤面をその中心部分ま
たは内円を横切る線によって区画した複数個の区域
れぞれ実質的に等しい平面形状を有する取付板分割片に
固形砥石を配設し、固形砥石の砥石面に半径方向の一側
縁から半径方向の他側縁に向かって、回転方向の前方の
溝の端部より回転方向後方の溝の端部が回転中心より遠
くなるように斜めに延びる斜溝を形成し、この取付板分
割片を前記ラッピング定盤上に着脱自在に装着したこと
を特徴とする平面研磨装置。
1. A flat polishing apparatus comprising a lapping disk having a structure in which a solid grindstone is mounted on a lapping plate having a circular plate shape or an annular plate shape, and the surface plate surface is divided by a line crossing a central portion or an inner circle thereof. the solid grindstone disposed on the mounting plate divided piece having a plurality of zones and their <br/> respectively substantially equal planar shape, the radial one side edge to the grinding surface of the solid grinding wheel in the radial direction toward the other side edge, in the rotational direction in front of
The end of the groove behind the end of the groove in the direction of rotation is farther from the center of rotation.
The flat polishing apparatus is characterized in that a diagonal groove extending diagonally is formed so that the mounting plate divided piece is detachably mounted on the lapping plate.
【請求項2】中心部分または内円を横切る線が直線であ
って、定盤面が等面積の略扇形区域に区画されている特
許請求の範囲第1項記載の平面研磨装置。
2. The flat polishing apparatus according to claim 1, wherein a line that crosses the central portion or the inner circle is a straight line, and the surface plate surface is divided into substantially fan-shaped areas having the same area.
【請求項3】取付板分割片が、アルミニウム合金,プラ
スチックスまたはガラス繊維補強プラスチックスからな
る軽量構造材料で構成されている請求項1または請求項
2記載の平面研磨装置。
3. The surface polishing apparatus according to claim 1, wherein the mounting plate divided piece is made of a lightweight structural material made of aluminum alloy, plastics or glass fiber reinforced plastics.
JP4258443A 1992-09-28 1992-09-28 Flat polishing machine Expired - Lifetime JPH0834737B2 (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP4258443A JPH0834737B2 (en) 1992-09-28 1992-09-28 Flat polishing machine

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP4258443A JPH0834737B2 (en) 1992-09-28 1992-09-28 Flat polishing machine

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP60039464A Division JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP8343771A Division JP2837661B2 (en) 1996-12-24 1996-12-24 Flat polishing machine

Publications (2)

Publication Number Publication Date
JPH0639733A JPH0639733A (en) 1994-02-15
JPH0834737B2 true JPH0834737B2 (en) 1996-03-29

Family

ID=17320280

Family Applications (1)

Application Number Title Priority Date Filing Date
JP4258443A Expired - Lifetime JPH0834737B2 (en) 1992-09-28 1992-09-28 Flat polishing machine

Country Status (1)

Country Link
JP (1) JPH0834737B2 (en)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2009025533A2 (en) * 2007-08-23 2009-02-26 Kolon Industries, Inc Polishing pad, polishing pad tile and method of manufacturing the polishing pad

Family Cites Families (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5596035A (en) * 1979-01-17 1980-07-21 Kao Corp Cultivating of *shiitake* *mashroom*
JPS59232768A (en) * 1983-06-16 1984-12-27 Kanebo Ltd Flat polishing device

Also Published As

Publication number Publication date
JPH0639733A (en) 1994-02-15

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