JPS60217062A - Surface polishing device - Google Patents

Surface polishing device

Info

Publication number
JPS60217062A
JPS60217062A JP60039464A JP3946485A JPS60217062A JP S60217062 A JPS60217062 A JP S60217062A JP 60039464 A JP60039464 A JP 60039464A JP 3946485 A JP3946485 A JP 3946485A JP S60217062 A JPS60217062 A JP S60217062A
Authority
JP
Japan
Prior art keywords
mounting plate
lapping
surface plate
solid
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60039464A
Other languages
Japanese (ja)
Other versions
JPH0373425B2 (en
Inventor
Kenichi Mihashi
三橋 堅一
Yasuoki Sasaki
佐々木 泰興
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanebo Ltd
Original Assignee
Kanebo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Ltd filed Critical Kanebo Ltd
Priority to JP60039464A priority Critical patent/JPS60217062A/en
Publication of JPS60217062A publication Critical patent/JPS60217062A/en
Publication of JPH0373425B2 publication Critical patent/JPH0373425B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)

Abstract

PURPOSE:To easily exchange a grinding wheel, by removably setting through a mounting plate divide piece a solid grinding wheel to a section divided by a line crossing a center part or an internal circle on the surface of a surface plate, in the case of a surface grinding device equipping a circular or annular lapping disc. CONSTITUTION:A lapping disc 1 is formed by mounting by a screw a plurality of solid grinding wheels 4 of almost sector shape to a center holed lapping surface plate 2 through a mounting plate divide piece 3. A clearance 3a radially formed between the solid grinding wheels 4 discharges polishing dust and/or fall- off abrasive dust to the outside. Here the mounting plate divide piece 3, formed in a plane-shape equal to that of plural sections formed by dividing the lapping surface plate 2 by plural imaginary lines crossing its center, provides interchangeability, forming respectively two screw holes. This mounting plate divide piece 3, on which the solid grinding wheel 4 in an equal shape to the divide piece 3 is piled by aligning a screw hole 4a to the screw hole of the mounting plate divide piece 3, is mounted to the surface plate 2 by inserting the screw into the screw hole 4a.

Description

【発明の詳細な説明】 〔産業上の利用分野〕 この発明は、被研磨体を、固形砥石表面に当接し、固形
砥石の作用により、研削または研磨を行うラッピング研
磨機等の平面研磨装置に関するものである。
Detailed Description of the Invention [Field of Industrial Application] The present invention relates to a surface polishing device such as a lapping machine that grinds or polishes an object to be polished by bringing it into contact with the surface of a solid grindstone and by the action of the solid grindstone. It is something.

〔従来の技術〕[Conventional technology]

従来、ラッピング研磨機に固形砥石を装着する場合には
、円周方向に回動する金属製定盤表面に接着剤、ホット
メルト等を塗布し、固形砥石を接着する方法が一般的で
あった。
Conventionally, when attaching a solid grindstone to a lapping polishing machine, the common method was to apply an adhesive, hot melt, etc. to the surface of a metal surface plate that rotates in the circumferential direction, and then adhere the solid grindstone.

〔発明が解決しようとする問題点〕[Problem that the invention seeks to solve]

しかし、この方法では、大型のラッピング定盤を研磨装
置から取り外すことなく、その表面に砥石を接着する作
業にかなりの困難を伴うため、接着力が弱かったり、一
部接着されない部分が生じたりして完全な接着ができず
、研磨作業中に剥離、脱落したりするトラブルが生じて
いた。また、破損した砥石を交換したりする等の作業も
極めて困難であった。特に、研磨機の型式が、2枚のう
ツピング円盤の砥面を対面させて組み合わせた両面ラッ
ピング研磨機である場合、この傾向が著しかった。
However, with this method, it is quite difficult to attach the grinding wheel to the surface of the large lapping surface plate without removing it from the polishing machine, which may result in weak adhesive strength or some parts not being adhered. This resulted in problems such as peeling and falling off during the polishing process. In addition, it was extremely difficult to replace a damaged grindstone. In particular, this tendency was remarkable when the type of polishing machine was a double-sided lapping and polishing machine in which two lapping disks were combined with their abrasive surfaces facing each other.

さらに、研磨作業によって砥石が全て使いつ(され、新
しい砥石を装着する場合は、ラッピング定盤の表面に残
留した砥石片、接着剤等を完全に剥離除去し、表面を均
一に浄化してから装着する必要があるが、大型の定盤の
全面にこの作業を施すためには、装置を分解して定盤を
取り外してから行うという極めて大がかりな作業になり
、多(の労力と時間とを費やして行わなければならず、
稼動率の大幅な低下と運転経費の増大という事態を招い
ていた。
Furthermore, if all the grinding wheels are used up during polishing work and a new one is to be installed, the remaining grinding stone pieces, adhesive, etc. on the surface of the lapping plate should be completely peeled off and the surface should be uniformly purified. However, in order to perform this work on the entire surface of a large surface plate, it is an extremely large-scale work that requires disassembling the device and removing the surface plate, which requires a lot of effort and time. It must be done by spending
This resulted in a significant drop in capacity utilization and an increase in operating costs.

この発明者らは、従来のラッピング研磨機の有する上述
の問題点を解決するために、鋭意研究を行い、この発明
を完成するに至ったものであり、その目的とするところ
は、砥石の交換が容易で、かつ確実な装着が可能であり
、それによって稼動率を大幅に向上させうる平面研磨装
置を提供することにある。
In order to solve the above-mentioned problems of conventional lapping and polishing machines, the inventors conducted intensive research and completed this invention.The purpose of this invention is to replace the grinding wheel. It is an object of the present invention to provide a flat surface polishing device that can be easily and securely mounted, thereby greatly improving the operating rate.

〔問題点を解決するための手段〕[Means for solving problems]

上記の目的を達成するためにこの発明は、円形盤状また
は環形盤状のラッピング定盤に固形砥石を装着した構造
のラッピング円盤を備えてなる平面研磨装置において、
上記定盤面をその中心部分または内円を横切る線によっ
て区画した複数個の区域をそれぞれ実質的に等しい平面
形状を有する取付板分割片にる固形砥石を配設するとと
もに、この取付板分割片を前記ラッピング定盤上に着脱
自在に装着したという構成をとる。
In order to achieve the above object, the present invention provides a surface polishing apparatus comprising a lapping disk having a structure in which a solid grindstone is attached to a circular or annular lapping surface plate.
A solid grindstone is disposed on a mounting plate divided piece having a substantially equal planar shape in a plurality of areas divided by a line crossing the center portion or inner circle of the surface plate surface, and the mounting plate divided piece is It is configured to be detachably mounted on the wrapping surface plate.

つぎに、この発明を実施例にもとづいて詳しく説明する
Next, the present invention will be explained in detail based on examples.

〔実施例〕〔Example〕

第1図はこの発明の一実施例を示している。図において
、lはラッピング円盤で、中心穴付きラッピング定盤2
に、取付板分割片3を介して略扇形の固形砥石4を複数
個螺着することにより構成されている。3aは固形砥石
40間に放射状に形成された隙間で、研磨粉や脱落砥粉
を外部に排出する。この場合において、取付板分割片3
は、それぞれ、上記ラッピング定盤2を、その中心を横
切る複数の仮想線分によって区画して形成される複数個
の区域(全て等面積)の平面形状(略扇形)と等しい平
面形状に構成されていて互換性を有しており、それぞれ
に第2図に示すように2個のねじ穴5が形成されている
。この取付板分割片3の上には、その分割片3と同形の
略扇形の固形砥石4が、ねじ穴4aを取付板分割片3の
ねじ穴5に合わせて積重され、その状態で第3図に示す
ように、ねじ6をねじ穴4aに挿入してラッピング定盤
2に螺着される。このようなラッピング円盤1を備えた
平面研磨装置は、ラッピング円盤工および工作物(図示
せず)を相対的に回動させながら湿式法に基づいて工作
物表面の研磨を行う。
FIG. 1 shows an embodiment of the invention. In the figure, l is a lapping disk, and a lapping surface plate 2 with a center hole
It is constructed by screwing a plurality of substantially fan-shaped solid grindstones 4 through the mounting plate divided pieces 3. 3a is a gap formed radially between the solid grindstones 40, through which polishing powder and fallen abrasive powder are discharged to the outside. In this case, the mounting plate divided piece 3
are each configured to have a planar shape (approximately fan-shaped) that is equal to the planar shape (approximately fan-shaped) of a plurality of areas (all having the same area) formed by dividing the wrapping surface plate 2 by a plurality of imaginary line segments crossing the center thereof. They are interchangeable, and each has two screw holes 5 as shown in FIG. On this mounting plate divided piece 3, a substantially fan-shaped solid grindstone 4 having the same shape as the divided piece 3 is stacked with the screw hole 4a aligned with the screw hole 5 of the mounting plate divided piece 3, and in this state, the As shown in FIG. 3, the screw 6 is inserted into the screw hole 4a and screwed onto the lapping surface plate 2. A surface polishing apparatus equipped with such a lapping disk 1 polishes the surface of a workpiece based on a wet method while relatively rotating the lapping disk and the workpiece (not shown).

この装置においては、1個のラッピング円盤1に対して
2組の取付板分割片3を用意し、常に1組を予備として
おく。そして、研磨装置が稼動中に、予備の取付板分割
片3の表面を清浄化したうえで、固形砥石4を取り付け
て、準備を整える。
In this device, two sets of mounting plate divided pieces 3 are prepared for one wrapping disk 1, and one set is always kept as a spare. Then, while the polishing device is in operation, after cleaning the surface of the spare mounting plate segment 3, the solid grindstone 4 is attached and preparations are made.

稼動中のラッピング円盤1の砥石4が使いつくされた場
合、または研削能力の低下のため丹念なドレッシング作
業を必要とするに至った場合等は、ラッピング円盤1よ
り固形砥石4を取付板分割片3ごと取り外し、予備の組
と交換する。このようにすることにより、容易迅速に運
転を再開することができるようになる。
When the grinding wheel 4 of the lapping disk 1 is used up during operation, or when careful dressing work is required due to a decrease in grinding capacity, the solid grinding wheel 4 can be removed from the lapping disk 1 by attaching it to the mounting plate divided piece. Remove all 3 and replace with a spare set. By doing so, operation can be resumed easily and quickly.

なお、取付板分割片3の材質は特に限定されないが、軽
量性9強度およびコスト面等から考えて、アルミニウム
合金等の軽金属、プラスチック板およびガラス繊維補強
プラスチック板等の軽量構造材料が好適である。さらに
、ラッピング円盤1の表面に取り付けられる取付板分割
片3の数は、ラッピング円盤1の大きさにより適宜変え
ることが望ましい。例えば外径100’ O+n以上の
大型円盤においては16〜24分割し、それ以下の小型
円盤では2〜10分割といった比較的少ない分割で充分
である。
The material of the mounting plate segment 3 is not particularly limited, but from the viewpoint of lightness, strength, and cost, lightweight structural materials such as light metals such as aluminum alloy, plastic plates, and glass fiber reinforced plastic plates are suitable. . Furthermore, it is desirable that the number of mounting plate division pieces 3 attached to the surface of the wrapping disk 1 is changed as appropriate depending on the size of the wrapping disk 1. For example, a relatively small number of divisions, such as 16 to 24 divisions for a large disc with an outer diameter of 100' O+n or more, and 2 to 10 divisions for a smaller disc, is sufficient.

第4図はこの発明の他の実施例の構成図である。FIG. 4 is a block diagram of another embodiment of the present invention.

図において、7はラッピング定盤、8は取付板分割片、
9は円柱状砥石、10はラッピング円盤である。すなわ
ち、この平面研磨装置のラッピング円盤10は、第5図
に示すように、略扇形の取付板分割片8に、柱状の円柱
状砥石9を、その頂部研磨面を同一平面上に位置させ、
かつ相互に所定間隔を保って植設し、第6図に示すよう
に、略扇形取付板分割片8に設けられたねじ11にねじ
12を挿入してラッピング定盤7に螺着することにより
構成されている。
In the figure, 7 is a wrapping surface plate, 8 is a mounting plate divided piece,
9 is a cylindrical grindstone, and 10 is a lapping disk. That is, as shown in FIG. 5, the lapping disk 10 of this surface polishing device has a column-shaped cylindrical grindstone 9 placed on a substantially fan-shaped mounting plate divided piece 8, with its top polishing surface positioned on the same plane.
and by planting them at a predetermined distance from each other, and screwing them onto the wrapping surface plate 7 by inserting the screws 12 into the screws 11 provided on the substantially fan-shaped mounting plate divided pieces 8, as shown in FIG. It is configured.

この平面研磨装置は、上記のように、外周面の接触抵抗
の小さい円柱状砥石9を、間隔をあけて配設することに
よりラッピング円盤10を構成しているため、研磨粉や
脱落砥扮が、生成すると同時に円柱状砥石90間を通っ
て速やかにラッピング円盤10外に排出される。そのた
め円柱状砥石9の目づまりが効果的に防止され、ドレッ
シングを要することなく、初期の研磨精度および研磨能
率が長時間保持されるようになる。
As described above, in this surface polishing device, the lapping disk 10 is constructed by arranging the cylindrical grindstones 9 with small contact resistance on the outer circumferential surface at intervals, so that polishing powder and dropped grindstones are prevented. , and at the same time as it is generated, it passes between the cylindrical grindstones 90 and is immediately discharged to the outside of the lapping disk 10. Therefore, clogging of the cylindrical grindstone 9 is effectively prevented, and the initial polishing accuracy and polishing efficiency can be maintained for a long time without the need for dressing.

第7図はこの発明のさらに他の実施例に用いる金属製ラ
ッピング定盤の平面図である。図において、ラッピング
定盤13は円形盤状または中央円内部分が透孔に形成さ
れている環形盤状になっている。この定盤13はその中
心Jまたは内円Kを横切る仮想線分a % dによって
複数個の区域A〜Hに区画されている。この場合、上記
仮想線分a〜dは直線であり、区域A−Hを全て同一形
状。
FIG. 7 is a plan view of a metal wrapping surface plate used in still another embodiment of the present invention. In the figure, the lapping surface plate 13 has a circular disk shape or an annular disk shape with a through hole formed in the center circle. This surface plate 13 is divided into a plurality of areas A to H by imaginary line segments a % d that cross the center J or the inner circle K. In this case, the virtual line segments a to d are straight lines, and the areas A to H all have the same shape.

等面積の略扇形に区画することが最も好ましい。It is most preferable to divide the area into substantially fan-shaped sections having equal areas.

上記定盤13の各区域には、それぞれねじ穴21が穿設
されている。上記定盤13の定盤面の区画された区域に
は、第8図に示すように、それぞれの区域と実質的に等
しい平面形状を有する取付板分割片13aが装着される
。ここにいう「実質的に等しい」とは、例えば略扇形の
区域に対して台形の取付板分割片を装着したり、隣接す
る取付板分割片の間に若干の間隙を設ける必要がある場
合等における僅少の誤差と許容されることを意味するも
のである。この取付板分割片13aは、前記定盤面の略
扇形区域に対応するもので、前記ねじ穴21と合致する
ねじ穴14を有している。取付板分割片13aの表面に
は、第9図に示すように、2個の固形砥石1.5.15
aが接着固定されている。これら固形砥石15.15a
は、2個1組で取付板分割片13aの略扇形と等しい平
面形状をなしている。15bは上記2個の固形砥石15
.15aの間に形成された隙間で、研磨粉や脱落砥粉を
回転による遠心力によって外部に排出する作用をする。
A screw hole 21 is bored in each area of the surface plate 13, respectively. As shown in FIG. 8, mounting plate division pieces 13a having substantially the same planar shape as the respective regions are attached to the divided areas of the surface plate surface of the surface plate 13. "Substantially equal" here means, for example, when trapezoidal mounting plate segments are attached to a substantially fan-shaped area, or when it is necessary to provide a slight gap between adjacent mounting plate segments, etc. This means that a slight error in is allowed. This mounting plate division piece 13a corresponds to the substantially fan-shaped area of the surface plate surface, and has a screw hole 14 that matches the screw hole 21. As shown in FIG. 9, two solid grindstones 1.5.15 are mounted on the surface of the mounting plate divided piece 13a.
a is fixed with adhesive. These solid whetstones 15.15a
A set of two pieces has a planar shape approximately equal to the fan shape of the mounting plate divided piece 13a. 15b is the two solid grindstones 15 mentioned above.
.. The gap formed between 15a functions to discharge polishing powder and fallen abrasive powder to the outside by centrifugal force caused by rotation.

16は前記ねじ穴14に合致するようにそれぞれの固形
砥石15,15aに穿設されたねじ挿通孔16である。
Reference numeral 16 indicates a screw insertion hole 16 formed in each of the solid grindstones 15, 15a so as to match the screw hole 14.

固形砥石15,158を接着担持した取付板分割片13
aは、第10図に示すように、定盤13に穿孔されてい
る。ボルト孔21にボルト17をねじ込み螺着される。
Mounting plate divided piece 13 that adhesively supports solid grindstones 15, 158
A is bored in the surface plate 13, as shown in FIG. The bolt 17 is screwed into the bolt hole 21.

このようにして、定盤13全面に固形砥石15.15a
が装着されてなるラッピング円盤18を第11図に示す
。ラッピング円盤18を備えた平面研磨装置は、前記実
施例の平面研磨装置と同様の作用効果を奏する。
In this way, the solid grindstone 15.15a is placed on the entire surface of the surface plate 13.
FIG. 11 shows the wrapping disk 18 on which the wrapping disk 18 is attached. The surface polishing device equipped with the lapping disk 18 has the same effects as the surface polishing device of the embodiment described above.

〔発明の効果〕〔Effect of the invention〕

この発明に係る平面研磨装置によれば、砥石のラッピン
グ円盤への砥石の取り付けあるいは交換作業が極めて容
易迅速となり、作業者の負担を著しく軽減しうると同時
に装置の稼動率を大幅に向上させることが可能となる。
According to the surface polishing device according to the present invention, the work of attaching the grindstone to the lapping disk or replacing the grindstone becomes extremely easy and quick, and the burden on the worker can be significantly reduced, and at the same time, the operating rate of the device can be greatly improved. becomes possible.

すなわち、従来、ラッピング定盤に砥石を接着するため
には、少なくとも1日は稼動を休止し剥離、接着作業を
しなければならないところ、この発明の装置では、取付
板分割片を別に1組準備しておき、これに予め砥石を接
着しておくことにより、砥石交換に要する時間を著しく
短縮しうるのである。さらに種類。
In other words, conventionally, in order to bond a grindstone to a lapping surface plate, it was necessary to stop operation for at least one day and perform peeling and bonding work, but with the device of the present invention, a separate set of mounting plate segments is prepared. By adhering a grindstone to this in advance, the time required to replace the grindstone can be significantly shortened. More types.

番手を変えた砥石を必要に応じて準備しておけば、随時
交換も可能であり、1台の研磨装置を多目的に使用する
ことも可能となる。また、何等かの事由により砥石の一
つが破損したり異常品質のものが混入した場合もその部
分のみ容易に交換が可能になり、経済的である。また、
砥石の接着作業が比較的軽量小型であって取り扱い容易
な取付板分割片について行われるため、綿密丹念な作業
が可能となり、接着ミス、接着不良による事故が殆どな
くなり、稼動率の向上、労働力の節減と相俟って、運転
経費を著しく低減することができる等の顕著な効果が得
られるものである。
By preparing grindstones with different grits as needed, they can be replaced at any time, and one polishing device can be used for multiple purposes. Furthermore, even if one of the grindstones is damaged or a grindstone of abnormal quality is mixed in for some reason, only that part can be easily replaced, which is economical. Also,
Since the work of gluing the grindstone is performed on the mounting plate segments, which are relatively light and small and easy to handle, it is possible to perform the work in detail and with great care, almost eliminating accidents due to gluing errors and poor adhesion, improving operating rates and reducing labor costs. This, combined with the reduction in , brings about significant effects such as a significant reduction in operating costs.

【図面の簡単な説明】[Brief explanation of drawings]

第1図はこの発明の一実施例に用いるラッピング円盤の
斜視図、第2図および第3図はその構成部品の説明図、
第4図はこの発明の他の実施例に用いるラッピング円盤
の斜視図、第5図および第6図はその構成部品の説明図
、第7図ないし第10図はこの発明のさらに他の実施例
に用いるラッピング円盤の組立説明図、第11図はその
ラッピング円盤の斜視図である。 1・−ラッピング円盤 2−ラッピング定盤 3−取付
板分割片 4−固形砥石 特許出願人鐘紡株式会社 代理人 弁理士 西 藤 征 彦 第4図 第 7 図 第8図 第9図 第10図 第11図
FIG. 1 is a perspective view of a wrapping disk used in an embodiment of the present invention, FIGS. 2 and 3 are explanatory views of its constituent parts,
FIG. 4 is a perspective view of a wrapping disk used in another embodiment of the invention, FIGS. 5 and 6 are explanatory diagrams of its constituent parts, and FIGS. 7 to 10 are still other embodiments of the invention. FIG. 11 is a perspective view of the wrapping disk. 1. - Lapping disc 2 - Lapping surface plate 3 - Mounting plate division piece 4 - Solid whetstone Patent applicant Kanebo Co., Ltd. Representative Patent attorney Yukihiko Nishifuji Figure 4 Figure 7 Figure 8 Figure 9 Figure 10 Figure 11

Claims (1)

【特許請求の範囲】 +11 円形盤状または環形盤状のラッピング定盤に固
形砥石を装着した構造のラッピング円盤を備えてなる平
面研磨装置において、上記定盤面をその中心部分または
内円を横切る線によって区画した複数個の区域をそれぞ
れ実質的に等しい平面形状を有する取付板分割片に固形
砥石を配設するとともに、この取付板分割片を前記ラッ
ピング定盤上に着脱自在に装着したことを特徴とする平
面研磨装置。 (2)中心部分または内円を横切る線が直線であって、
定盤面が等面積の略扇形区域に区画されている特許請求
の範囲第1項記載の平面研磨装置。 (3) 取付板分割片が、アルミニウム合金、プラスチ
ックスまたはガラス繊維補強プラスチックスからなる軽
量構造材料で構成されている特許請求の範囲第1項また
は第2項記載の平面研磨装置。
[Claims] +11 In a surface polishing device equipped with a lapping disk having a structure in which a solid grindstone is attached to a circular or annular lapping surface plate, a line that crosses the central portion or inner circle of the surface of the surface plate; A solid grindstone is disposed on a mounting plate divided piece having substantially the same planar shape as a plurality of areas partitioned by , and the mounting plate divided piece is removably mounted on the lapping surface plate. Surface polishing equipment. (2) The line that crosses the center part or the inner circle is a straight line,
2. A flat surface polishing apparatus according to claim 1, wherein the surface plate surface is divided into substantially fan-shaped areas of equal area. (3) The surface polishing apparatus according to claim 1 or 2, wherein the mounting plate segment is made of a lightweight structural material such as aluminum alloy, plastics, or glass fiber reinforced plastics.
JP60039464A 1985-02-28 1985-02-28 Surface polishing device Granted JPS60217062A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60039464A JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60039464A JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58108369A Division JPS59232768A (en) 1983-06-16 1983-06-16 Flat polishing device

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4258443A Division JPH0834737B2 (en) 1992-09-28 1992-09-28 Flat polishing machine

Publications (2)

Publication Number Publication Date
JPS60217062A true JPS60217062A (en) 1985-10-30
JPH0373425B2 JPH0373425B2 (en) 1991-11-21

Family

ID=12553770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60039464A Granted JPS60217062A (en) 1985-02-28 1985-02-28 Surface polishing device

Country Status (1)

Country Link
JP (1) JPS60217062A (en)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400547A (en) * 1992-02-28 1995-03-28 Shin-Etsu Handotai Co., Ltd. Polishing machine and method of dissipating heat therefrom
WO2007043263A1 (en) * 2005-10-14 2007-04-19 Asahi Glass Company, Limited Truing member for abrasive pad and truing method of abrasive pad
JP2008155312A (en) * 2006-12-22 2008-07-10 Disco Abrasive Syst Ltd Grinding wheel
CN103009237A (en) * 2012-12-11 2013-04-03 东莞润明电子科技有限公司 Pyramid grinding plate

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995029039A1 (en) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Separation type grinding surface plate and grinding apparatus using same

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400547A (en) * 1992-02-28 1995-03-28 Shin-Etsu Handotai Co., Ltd. Polishing machine and method of dissipating heat therefrom
US5718620A (en) * 1992-02-28 1998-02-17 Shin-Etsu Handotai Polishing machine and method of dissipating heat therefrom
WO2007043263A1 (en) * 2005-10-14 2007-04-19 Asahi Glass Company, Limited Truing member for abrasive pad and truing method of abrasive pad
JP2008155312A (en) * 2006-12-22 2008-07-10 Disco Abrasive Syst Ltd Grinding wheel
CN103009237A (en) * 2012-12-11 2013-04-03 东莞润明电子科技有限公司 Pyramid grinding plate
CN103009237B (en) * 2012-12-11 2018-04-06 东莞润明电子科技有限公司 Pyramid grinding plate

Also Published As

Publication number Publication date
JPH0373425B2 (en) 1991-11-21

Similar Documents

Publication Publication Date Title
US6217433B1 (en) Grinding device and method
WO2007143400A2 (en) Abrading article comprising a slotted abrasive disc and a back-up pad
JPS60217062A (en) Surface polishing device
RU2664842C1 (en) Grinding wheel
JP2004517740A (en) Backup plate assembly for grinding system
JPH0639733A (en) Plane polishing device
US3243922A (en) Surfacing of materials
JP2837661B2 (en) Flat polishing machine
JP3206443B2 (en) Honing machine for indexable inserts
JPH11156729A (en) Grinding wheel possible to exchange tips
JPH04256574A (en) Correction method for electrodeposited grinding wheel
JPH09253915A (en) Throw-away tip type grinding cutter
JP3135773B2 (en) Segment type angular grinding wheel
JP3046261B2 (en) Whetstone dresser and pellets used for it
JPS6316976A (en) Grinding wheel
JPH07276243A (en) Segment type grinding wheel
CN111195865A (en) Overlapping laminated abrasive disk and manufacturing method thereof
JPS618280A (en) Wheel spindle and method for curved face grinding
JPH04269175A (en) Polishing disk and manufacture thereof
CN212170110U (en) Diamond metallic bond emery wheel
JP3813289B2 (en) Manufacturing method of rotating surface plate for double-sided lapping machine
JP2004230522A (en) Grinding wheel
JPS63139666A (en) Dressing member for ultrahard abrasive particle grindstone
US20020037687A1 (en) Abrasive article, apparatus and process for finishing glass or glass-ceramic recording disks
JPH01216777A (en) Emergy wheel

Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees