JPS60217062A - 平面研磨装置 - Google Patents

平面研磨装置

Info

Publication number
JPS60217062A
JPS60217062A JP60039464A JP3946485A JPS60217062A JP S60217062 A JPS60217062 A JP S60217062A JP 60039464 A JP60039464 A JP 60039464A JP 3946485 A JP3946485 A JP 3946485A JP S60217062 A JPS60217062 A JP S60217062A
Authority
JP
Japan
Prior art keywords
mounting plate
lapping
surface plate
solid
plate
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60039464A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0373425B2 (enrdf_load_stackoverflow
Inventor
Kenichi Mihashi
三橋　堅一
Yasuoki Sasaki
佐々木　泰興
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Kanebo Ltd
Original Assignee
Kanebo Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Kanebo Ltd filed Critical Kanebo Ltd
Priority to JP60039464A priority Critical patent/JPS60217062A/ja
Publication of JPS60217062A publication Critical patent/JPS60217062A/ja
Publication of JPH0373425B2 publication Critical patent/JPH0373425B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Polishing Bodies And Polishing Tools (AREA)
JP60039464A 1985-02-28 1985-02-28 平面研磨装置 Granted JPS60217062A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60039464A JPS60217062A (ja) 1985-02-28 1985-02-28 平面研磨装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60039464A JPS60217062A (ja) 1985-02-28 1985-02-28 平面研磨装置

Related Parent Applications (1)

Application Number Title Priority Date Filing Date
JP58108369A Division JPS59232768A (ja) 1983-06-16 1983-06-16 平面研磨装置

Related Child Applications (1)

Application Number Title Priority Date Filing Date
JP4258443A Division JPH0834737B2 (ja) 1992-09-28 1992-09-28 平面研磨装置

Publications (2)

Publication Number Publication Date
JPS60217062A true JPS60217062A (ja) 1985-10-30
JPH0373425B2 JPH0373425B2 (enrdf_load_stackoverflow) 1991-11-21

Family

ID=12553770

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60039464A Granted JPS60217062A (ja) 1985-02-28 1985-02-28 平面研磨装置

Country Status (1)

Country Link
JP (1) JPS60217062A (enrdf_load_stackoverflow)

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400547A (en) * 1992-02-28 1995-03-28 Shin-Etsu Handotai Co., Ltd. Polishing machine and method of dissipating heat therefrom
WO2007043263A1 (ja) * 2005-10-14 2007-04-19 Asahi Glass Company, Limited 研磨パッド用ツルーイング部材及び研磨パッドのツルーイング方法
JP2008155312A (ja) * 2006-12-22 2008-07-10 Disco Abrasive Syst Ltd 研削ホイール
CN103009237A (zh) * 2012-12-11 2013-04-03 东莞润明电子科技有限公司 金字塔研磨盘

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO1995029039A1 (fr) * 1994-04-22 1995-11-02 Kabushiki Kaisha Toshiba Plaque support de surface de meulage separable et appareil associe

Cited By (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US5400547A (en) * 1992-02-28 1995-03-28 Shin-Etsu Handotai Co., Ltd. Polishing machine and method of dissipating heat therefrom
US5718620A (en) * 1992-02-28 1998-02-17 Shin-Etsu Handotai Polishing machine and method of dissipating heat therefrom
WO2007043263A1 (ja) * 2005-10-14 2007-04-19 Asahi Glass Company, Limited 研磨パッド用ツルーイング部材及び研磨パッドのツルーイング方法
JP2008155312A (ja) * 2006-12-22 2008-07-10 Disco Abrasive Syst Ltd 研削ホイール
CN103009237A (zh) * 2012-12-11 2013-04-03 东莞润明电子科技有限公司 金字塔研磨盘
CN103009237B (zh) * 2012-12-11 2018-04-06 东莞润明电子科技有限公司 金字塔研磨盘

Also Published As

Publication number Publication date
JPH0373425B2 (enrdf_load_stackoverflow) 1991-11-21

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