JPH0372984A - 洗浄機構の溶剤回収装置 - Google Patents

洗浄機構の溶剤回収装置

Info

Publication number
JPH0372984A
JPH0372984A JP2055926A JP5592690A JPH0372984A JP H0372984 A JPH0372984 A JP H0372984A JP 2055926 A JP2055926 A JP 2055926A JP 5592690 A JP5592690 A JP 5592690A JP H0372984 A JPH0372984 A JP H0372984A
Authority
JP
Japan
Prior art keywords
solvent
cleaning
cleaned
processing chamber
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP2055926A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0549357B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html
Inventor
Masahide Uchino
正英 内野
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
JAPAN FUIRUDO KK
Japan Field Co Ltd
Original Assignee
JAPAN FUIRUDO KK
Japan Field Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by JAPAN FUIRUDO KK, Japan Field Co Ltd filed Critical JAPAN FUIRUDO KK
Priority to JP2055926A priority Critical patent/JPH0372984A/ja
Publication of JPH0372984A publication Critical patent/JPH0372984A/ja
Publication of JPH0549357B2 publication Critical patent/JPH0549357B2/ja
Granted legal-status Critical Current

Links

Classifications

    • CCHEMISTRY; METALLURGY
    • C23COATING METALLIC MATERIAL; COATING MATERIAL WITH METALLIC MATERIAL; CHEMICAL SURFACE TREATMENT; DIFFUSION TREATMENT OF METALLIC MATERIAL; COATING BY VACUUM EVAPORATION, BY SPUTTERING, BY ION IMPLANTATION OR BY CHEMICAL VAPOUR DEPOSITION, IN GENERAL; INHIBITING CORROSION OF METALLIC MATERIAL OR INCRUSTATION IN GENERAL
    • C23GCLEANING OR DE-GREASING OF METALLIC MATERIAL BY CHEMICAL METHODS OTHER THAN ELECTROLYSIS
    • C23G5/00Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents
    • C23G5/02Cleaning or de-greasing metallic material by other methods; Apparatus for cleaning or de-greasing metallic material with organic solvents using organic solvents
    • C23G5/04Apparatus

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • General Chemical & Material Sciences (AREA)
  • Engineering & Computer Science (AREA)
  • Materials Engineering (AREA)
  • Mechanical Engineering (AREA)
  • Metallurgy (AREA)
  • Organic Chemistry (AREA)
  • Cleaning By Liquid Or Steam (AREA)
  • Cleaning And De-Greasing Of Metallic Materials By Chemical Methods (AREA)
JP2055926A 1989-04-11 1990-03-07 洗浄機構の溶剤回収装置 Granted JPH0372984A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP2055926A JPH0372984A (ja) 1989-04-11 1990-03-07 洗浄機構の溶剤回収装置

Applications Claiming Priority (3)

Application Number Priority Date Filing Date Title
JP9114089 1989-04-11
JP1-91140 1989-04-11
JP2055926A JPH0372984A (ja) 1989-04-11 1990-03-07 洗浄機構の溶剤回収装置

Publications (2)

Publication Number Publication Date
JPH0372984A true JPH0372984A (ja) 1991-03-28
JPH0549357B2 JPH0549357B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-26

Family

ID=14018221

Family Applications (1)

Application Number Title Priority Date Filing Date
JP2055926A Granted JPH0372984A (ja) 1989-04-11 1990-03-07 洗浄機構の溶剤回収装置

Country Status (5)

Country Link
EP (1) EP0392758B1 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP (1) JPH0372984A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
CN (1) CN1035804C (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
DE (1) DE69020412T2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
HK (1) HK17196A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0657512A (ja) * 1991-09-23 1994-03-01 Wooltech Ltd 羊毛処理装置および方法
JPH0634782U (ja) * 1992-10-14 1994-05-10 木村化工機株式会社 洗浄装置
CN105607487A (zh) * 2016-03-11 2016-05-25 湖北新阳特种纤维股份有限公司 溶剂回收成本排放控制装置及方法

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
FR2670405B1 (fr) * 1990-12-18 1995-06-30 Annemasse Ultrasons Installation de nettoyage par solvant a consommation reduite et a recyclage, et procede de nettoyage correspondant.
IT1260831B (it) * 1992-07-17 1996-04-22 Procedimento di sgrassatura di pezzi meccanici ed impianto per effettuare il procedimento
JP6351195B1 (ja) * 2017-10-30 2018-07-04 ジャパン・フィールド株式会社 被洗浄物の洗浄装置

Family Cites Families (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
DE8004031U1 (de) * 1980-02-15 1980-05-22 Veld, Gerhardus Lambertus In Het, Losser (Niederlande) Behaelter fuer loesungsmittel
US4264299A (en) * 1980-03-12 1981-04-28 Bell Telephone Laboratories, Incorporated Process and apparatus for controlling losses in volatile working fluid systems
EP0235744A1 (en) * 1986-02-28 1987-09-09 Japan Field Company, Ltd. Apparatus for vapour cleaning
NL8700037A (nl) * 1987-01-09 1988-08-01 Nl Middenstandsbank N V Zrb Ju Nieuw dampontvettingsproces.

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH0657512A (ja) * 1991-09-23 1994-03-01 Wooltech Ltd 羊毛処理装置および方法
JPH0634782U (ja) * 1992-10-14 1994-05-10 木村化工機株式会社 洗浄装置
CN105607487A (zh) * 2016-03-11 2016-05-25 湖北新阳特种纤维股份有限公司 溶剂回收成本排放控制装置及方法

Also Published As

Publication number Publication date
EP0392758A1 (en) 1990-10-17
JPH0549357B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) 1993-07-26
CN1055491A (zh) 1991-10-23
HK17196A (en) 1996-02-09
CN1035804C (zh) 1997-09-10
DE69020412D1 (de) 1995-08-03
EP0392758B1 (en) 1995-06-28
DE69020412T2 (de) 1996-01-04

Similar Documents

Publication Publication Date Title
AU673663B2 (en) Vacuum air lock for a closed perimeter solvent conservation system
US4865061A (en) Decontamination apparatus for chemically and/or radioactively contaminated tools and equipment
JP3656701B2 (ja) 処理装置
US5715612A (en) Method for precision drying surfaces
JP2804210B2 (ja) 洗浄装置
JPH0372984A (ja) 洗浄機構の溶剤回収装置
CA1175319A (en) Process and apparatus for controlling losses in volatile working fluid systems
US4276819A (en) Adsorbent enclosure for automatic tissue processors
US5311891A (en) Solvent recovering system for a cleaning machine
US4317426A (en) Blow-off apparatus for articles within tumbling barrel
US5799677A (en) Hermetic enclosure for treating a workpiece with a solvent
JPH0549355B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3014899B2 (ja) 基板回転乾燥装置の排気装置
JPH0551357B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH057270B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0542316B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH03176A (ja) 洗浄装置に設置する乾燥装置
JPS63121A (ja) 蒸気乾燥洗浄装置
JP2608565B2 (ja) 粒子濾過システムを有する可搬式コンテーナ
JPS6218037A (ja) パススル−ル−ム
JPH11197583A5 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JPH0727883B2 (ja) ウェーハ等の乾燥装置
JPS6330536Y2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)
JP3971534B2 (ja) 基板回転乾燥装置
JPH0438467B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html)

Legal Events

Date Code Title Description
R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

R250 Receipt of annual fees

Free format text: JAPANESE INTERMEDIATE CODE: R250

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20080726

Year of fee payment: 15

FPAY Renewal fee payment (event date is renewal date of database)

Free format text: PAYMENT UNTIL: 20090726

Year of fee payment: 16

LAPS Cancellation because of no payment of annual fees