JPH0371194B2 - - Google Patents
Info
- Publication number
- JPH0371194B2 JPH0371194B2 JP60237405A JP23740585A JPH0371194B2 JP H0371194 B2 JPH0371194 B2 JP H0371194B2 JP 60237405 A JP60237405 A JP 60237405A JP 23740585 A JP23740585 A JP 23740585A JP H0371194 B2 JPH0371194 B2 JP H0371194B2
- Authority
- JP
- Japan
- Prior art keywords
- ultrapure water
- pure water
- production system
- primary pure
- water production
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 229910021642 ultra pure water Inorganic materials 0.000 claims description 26
- 239000012498 ultrapure water Substances 0.000 claims description 26
- 238000004519 manufacturing process Methods 0.000 claims description 14
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 claims description 14
- 238000005342 ion exchange Methods 0.000 claims description 6
- 239000004014 plasticizer Substances 0.000 claims description 6
- IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 5
- 229910001873 dinitrogen Inorganic materials 0.000 claims description 5
- 150000002500 ions Chemical class 0.000 claims description 5
- 244000005700 microbiome Species 0.000 claims description 4
- 229920000915 polyvinyl chloride Polymers 0.000 claims description 4
- 239000004800 polyvinyl chloride Substances 0.000 claims description 4
- 238000000108 ultra-filtration Methods 0.000 claims description 4
- 230000001954 sterilising effect Effects 0.000 claims description 3
- 238000009832 plasma treatment Methods 0.000 description 7
- 239000007789 gas Substances 0.000 description 6
- 230000000052 comparative effect Effects 0.000 description 5
- 239000012535 impurity Substances 0.000 description 5
- BZHJMEDXRYGGRV-UHFFFAOYSA-N Vinyl chloride Chemical compound ClC=C BZHJMEDXRYGGRV-UHFFFAOYSA-N 0.000 description 4
- 230000000694 effects Effects 0.000 description 4
- 238000010828 elution Methods 0.000 description 4
- 238000000034 method Methods 0.000 description 4
- 239000005416 organic matter Substances 0.000 description 4
- 238000012545 processing Methods 0.000 description 4
- OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 description 3
- UGFAIRIUMAVXCW-UHFFFAOYSA-N Carbon monoxide Chemical compound [O+]#[C-] UGFAIRIUMAVXCW-UHFFFAOYSA-N 0.000 description 3
- 229910052799 carbon Inorganic materials 0.000 description 3
- 229910002091 carbon monoxide Inorganic materials 0.000 description 3
- 238000010586 diagram Methods 0.000 description 3
- 238000002474 experimental method Methods 0.000 description 2
- 239000010419 fine particle Substances 0.000 description 2
- 239000000463 material Substances 0.000 description 2
- 239000004065 semiconductor Substances 0.000 description 2
- 239000000126 substance Substances 0.000 description 2
- 239000004809 Teflon Substances 0.000 description 1
- 229920006362 Teflon® Polymers 0.000 description 1
- 238000011109 contamination Methods 0.000 description 1
- 230000007547 defect Effects 0.000 description 1
- 238000011156 evaluation Methods 0.000 description 1
- 230000010354 integration Effects 0.000 description 1
- 235000015097 nutrients Nutrition 0.000 description 1
- 238000004659 sterilization and disinfection Methods 0.000 description 1
- 238000012360 testing method Methods 0.000 description 1
Landscapes
- Separation Using Semi-Permeable Membranes (AREA)
- Treatment Of Water By Ion Exchange (AREA)
- Physical Water Treatments (AREA)
- Treatments Of Macromolecular Shaped Articles (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60237405A JPS6297687A (ja) | 1985-10-25 | 1985-10-25 | 超純水製造システム |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP60237405A JPS6297687A (ja) | 1985-10-25 | 1985-10-25 | 超純水製造システム |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6297687A JPS6297687A (ja) | 1987-05-07 |
| JPH0371194B2 true JPH0371194B2 (enrdf_load_stackoverflow) | 1991-11-12 |
Family
ID=17014900
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP60237405A Granted JPS6297687A (ja) | 1985-10-25 | 1985-10-25 | 超純水製造システム |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS6297687A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014014456A1 (en) | 2012-07-18 | 2014-01-23 | Otis Elevator Company | Fire-retardant belt |
-
1985
- 1985-10-25 JP JP60237405A patent/JPS6297687A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| WO2014014456A1 (en) | 2012-07-18 | 2014-01-23 | Otis Elevator Company | Fire-retardant belt |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6297687A (ja) | 1987-05-07 |
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