JPS6297687A - 超純水製造システム - Google Patents

超純水製造システム

Info

Publication number
JPS6297687A
JPS6297687A JP60237405A JP23740585A JPS6297687A JP S6297687 A JPS6297687 A JP S6297687A JP 60237405 A JP60237405 A JP 60237405A JP 23740585 A JP23740585 A JP 23740585A JP S6297687 A JPS6297687 A JP S6297687A
Authority
JP
Japan
Prior art keywords
ultrapure water
piping
pure water
production system
water production
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP60237405A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0371194B2 (enrdf_load_stackoverflow
Inventor
Michihiko Asai
道彦 浅井
Tsukasa Sakai
坂井　士
Keishiro Tsuda
津田　圭四郎
Kazunari Takemoto
一成 竹元
Makoto Kito
鬼頭　諒
Minoru Kuroiwa
稔 黒岩
Takashi Komatsu
小松　敬志
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
National Institute of Advanced Industrial Science and Technology AIST
Original Assignee
Agency of Industrial Science and Technology
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Agency of Industrial Science and Technology, Hitachi Ltd filed Critical Agency of Industrial Science and Technology
Priority to JP60237405A priority Critical patent/JPS6297687A/ja
Publication of JPS6297687A publication Critical patent/JPS6297687A/ja
Publication of JPH0371194B2 publication Critical patent/JPH0371194B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Separation Using Semi-Permeable Membranes (AREA)
  • Treatment Of Water By Ion Exchange (AREA)
  • Physical Water Treatments (AREA)
  • Treatments Of Macromolecular Shaped Articles (AREA)
JP60237405A 1985-10-25 1985-10-25 超純水製造システム Granted JPS6297687A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP60237405A JPS6297687A (ja) 1985-10-25 1985-10-25 超純水製造システム

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP60237405A JPS6297687A (ja) 1985-10-25 1985-10-25 超純水製造システム

Publications (2)

Publication Number Publication Date
JPS6297687A true JPS6297687A (ja) 1987-05-07
JPH0371194B2 JPH0371194B2 (enrdf_load_stackoverflow) 1991-11-12

Family

ID=17014900

Family Applications (1)

Application Number Title Priority Date Filing Date
JP60237405A Granted JPS6297687A (ja) 1985-10-25 1985-10-25 超純水製造システム

Country Status (1)

Country Link
JP (1) JPS6297687A (enrdf_load_stackoverflow)

Families Citing this family (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
KR20150036162A (ko) 2012-07-18 2015-04-07 오티스엘리베이터캄파니 내화성 벨트

Also Published As

Publication number Publication date
JPH0371194B2 (enrdf_load_stackoverflow) 1991-11-12

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