JPH0365853B2 - - Google Patents
Info
- Publication number
- JPH0365853B2 JPH0365853B2 JP24272083A JP24272083A JPH0365853B2 JP H0365853 B2 JPH0365853 B2 JP H0365853B2 JP 24272083 A JP24272083 A JP 24272083A JP 24272083 A JP24272083 A JP 24272083A JP H0365853 B2 JPH0365853 B2 JP H0365853B2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- pressure
- support part
- natural frequency
- slit holes
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 18
- 239000012530 fluid Substances 0.000 claims description 9
- 230000005284 excitation Effects 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 3
- 238000007789 sealing Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 239000013078 crystal Substances 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 238000006073 displacement reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000000034 method Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0008—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using vibrations
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272083A JPS60133332A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272083A JPS60133332A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133332A JPS60133332A (ja) | 1985-07-16 |
| JPH0365853B2 true JPH0365853B2 (enrdf_load_stackoverflow) | 1991-10-15 |
Family
ID=17093237
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24272083A Granted JPS60133332A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133332A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP5867821B2 (ja) * | 2012-03-08 | 2016-02-24 | セイコーインスツル株式会社 | 圧力センサ |
| JP5867820B2 (ja) * | 2012-03-08 | 2016-02-24 | セイコーインスツル株式会社 | 圧力センサ |
-
1983
- 1983-12-22 JP JP24272083A patent/JPS60133332A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60133332A (ja) | 1985-07-16 |
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