JPH0365850B2 - - Google Patents
Info
- Publication number
- JPH0365850B2 JPH0365850B2 JP24272283A JP24272283A JPH0365850B2 JP H0365850 B2 JPH0365850 B2 JP H0365850B2 JP 24272283 A JP24272283 A JP 24272283A JP 24272283 A JP24272283 A JP 24272283A JP H0365850 B2 JPH0365850 B2 JP H0365850B2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- pressure
- plate
- torque
- force
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 238000001514 detection method Methods 0.000 claims description 13
- 239000012530 fluid Substances 0.000 claims description 9
- 238000006073 displacement reaction Methods 0.000 claims description 7
- 230000005484 gravity Effects 0.000 claims description 4
- 230000004044 response Effects 0.000 claims description 2
- 238000007789 sealing Methods 0.000 claims 1
- 239000002184 metal Substances 0.000 description 6
- 230000008859 change Effects 0.000 description 5
- 238000010586 diagram Methods 0.000 description 5
- 239000012528 membrane Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 230000003321 amplification Effects 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 230000004907 flux Effects 0.000 description 1
- 238000005259 measurement Methods 0.000 description 1
- 230000007246 mechanism Effects 0.000 description 1
- 238000003199 nucleic acid amplification method Methods 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0005—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in capacitance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272283A JPS60133334A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272283A JPS60133334A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133334A JPS60133334A (ja) | 1985-07-16 |
| JPH0365850B2 true JPH0365850B2 (enrdf_load_stackoverflow) | 1991-10-15 |
Family
ID=17093270
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24272283A Granted JPS60133334A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133334A (enrdf_load_stackoverflow) |
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014048292A (ja) * | 2012-08-30 | 2014-03-17 | Freescale Semiconductor Inc | 差分容量出力を有する圧力センサ |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| KR100447243B1 (ko) * | 2002-07-08 | 2004-09-07 | 한국항공우주연구원 | 대기압차를 이용한 항공기 자세 측정 시스템 |
-
1983
- 1983-12-22 JP JP24272283A patent/JPS60133334A/ja active Granted
Cited By (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP2014048292A (ja) * | 2012-08-30 | 2014-03-17 | Freescale Semiconductor Inc | 差分容量出力を有する圧力センサ |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60133334A (ja) | 1985-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4628740A (en) | Pressure sensor | |
| US4250757A (en) | Movable element with position sensing means for transducers | |
| EP0323709B1 (en) | Tri-axial accelerometers | |
| US4433580A (en) | Pressure transducer | |
| US6341532B1 (en) | Shear force microsensor | |
| JPS5952365B2 (ja) | 角度測定又は加速度測定に使用できる測定装置 | |
| US5991990A (en) | Method for fabricating a tunneling sensor with linear force rebalance | |
| US4400979A (en) | Force transducer flexure with conductors on surfaces in the neutral bending plane | |
| US3302448A (en) | Apparatus for supervising the proportion of a magnetically active component in a fluid | |
| RU2172967C1 (ru) | Гравитационный вариометр | |
| JPS62165121A (ja) | 流量変換装置 | |
| JPH0365850B2 (enrdf_load_stackoverflow) | ||
| US3657630A (en) | Electro servosystem for a force balancing gauge | |
| US3600614A (en) | Force transducer with elongate vibrating member | |
| CN112162113A (zh) | 一种高精度加速度计 | |
| JPH0365851B2 (enrdf_load_stackoverflow) | ||
| JP2518814B2 (ja) | 真空計 | |
| US3374674A (en) | Fluid flowmeter | |
| CN114167082B (zh) | 一种单晶硅挠性加速度计 | |
| JPH0365853B2 (enrdf_load_stackoverflow) | ||
| Zhang et al. | Frontside-micromachined planar piezoresistive vibration sensor: Evaluating performance in the low frequency test range | |
| Jindal et al. | Novel MEMS piezoresistive sensor with hair-pin structure to enhance tensile and compressive sensitivity and correct non-linearity | |
| US5469632A (en) | Capacitive angle sensor employing a vertical cantilever beam | |
| JPH05333052A (ja) | 静電容量型加速度センサ | |
| US3375722A (en) | Linear and angular velocity and acceleration measuring instrument |