JPH0365851B2 - - Google Patents
Info
- Publication number
- JPH0365851B2 JPH0365851B2 JP24272183A JP24272183A JPH0365851B2 JP H0365851 B2 JPH0365851 B2 JP H0365851B2 JP 24272183 A JP24272183 A JP 24272183A JP 24272183 A JP24272183 A JP 24272183A JP H0365851 B2 JPH0365851 B2 JP H0365851B2
- Authority
- JP
- Japan
- Prior art keywords
- movable plate
- pressure
- plate
- coil
- measured
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000012530 fluid Substances 0.000 claims description 9
- 230000004907 flux Effects 0.000 claims description 6
- 230000005484 gravity Effects 0.000 claims description 4
- 238000007789 sealing Methods 0.000 claims 1
- 238000001514 detection method Methods 0.000 description 11
- 239000002184 metal Substances 0.000 description 6
- 239000012528 membrane Substances 0.000 description 5
- 238000005192 partition Methods 0.000 description 5
- 230000035945 sensitivity Effects 0.000 description 5
- 125000006850 spacer group Chemical group 0.000 description 5
- 238000010586 diagram Methods 0.000 description 3
- 238000006073 displacement reaction Methods 0.000 description 2
- 230000002093 peripheral effect Effects 0.000 description 2
- 238000007747 plating Methods 0.000 description 2
- 238000010276 construction Methods 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 239000000696 magnetic material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 1
Classifications
-
- G—PHYSICS
- G01—MEASURING; TESTING
- G01L—MEASURING FORCE, STRESS, TORQUE, WORK, MECHANICAL POWER, MECHANICAL EFFICIENCY, OR FLUID PRESSURE
- G01L9/00—Measuring steady of quasi-steady pressure of fluid or fluent solid material by electric or magnetic pressure-sensitive elements; Transmitting or indicating the displacement of mechanical pressure-sensitive elements, used to measure the steady or quasi-steady pressure of a fluid or fluent solid material, by electric or magnetic means
- G01L9/0001—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means
- G01L9/0004—Transmitting or indicating the displacement of elastically deformable gauges by electric, electro-mechanical, magnetic or electro-magnetic means using variations in inductance
Landscapes
- Physics & Mathematics (AREA)
- General Physics & Mathematics (AREA)
- Measuring Fluid Pressure (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272183A JPS60133333A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP24272183A JPS60133333A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS60133333A JPS60133333A (ja) | 1985-07-16 |
| JPH0365851B2 true JPH0365851B2 (enrdf_load_stackoverflow) | 1991-10-15 |
Family
ID=17093254
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP24272183A Granted JPS60133333A (ja) | 1983-12-22 | 1983-12-22 | 圧力センサ |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS60133333A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH01124540U (enrdf_load_stackoverflow) * | 1988-02-17 | 1989-08-24 | ||
| EP0834165A1 (en) * | 1995-06-19 | 1998-04-08 | Bright Star Enterprises Limited | Apparatus for detecting air movements or changes in pressure |
-
1983
- 1983-12-22 JP JP24272183A patent/JPS60133333A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS60133333A (ja) | 1985-07-16 |
Similar Documents
| Publication | Publication Date | Title |
|---|---|---|
| US4628740A (en) | Pressure sensor | |
| TWI507347B (zh) | 微機械感測器元件 | |
| CA1139123A (en) | Moveable element with position sensing means for transducers | |
| US4944184A (en) | Asymmetric flexure for pendulous accelerometer | |
| US4433580A (en) | Pressure transducer | |
| JP2002181535A (ja) | 傾斜センサ | |
| JPS5952365B2 (ja) | 角度測定又は加速度測定に使用できる測定装置 | |
| US4400979A (en) | Force transducer flexure with conductors on surfaces in the neutral bending plane | |
| CA1184048A (en) | Force transducer flexure with conductors on surfaces in the neutral bending plane | |
| JPH0365851B2 (enrdf_load_stackoverflow) | ||
| US3438266A (en) | Accelerometer | |
| JPH0365850B2 (enrdf_load_stackoverflow) | ||
| CA1122431A (en) | Movable element with position sensing means for transducers | |
| JP2518814B2 (ja) | 真空計 | |
| JPH0365853B2 (enrdf_load_stackoverflow) | ||
| JP2913525B2 (ja) | 傾斜計 | |
| JPH02205775A (ja) | 加速度センサ | |
| RU2046345C1 (ru) | Акселерометр | |
| JPH01110210A (ja) | 傾斜角度センサ | |
| JPH07301536A (ja) | 角速度センサ | |
| JPH0116374B2 (enrdf_load_stackoverflow) | ||
| JPH01307615A (ja) | 傾斜角度センサ | |
| JPH10319035A (ja) | 加速度センサ | |
| JPS58132611A (ja) | 傾斜角検出器 | |
| JPH09257897A (ja) | 磁気センサ |