JPH036560B2 - - Google Patents

Info

Publication number
JPH036560B2
JPH036560B2 JP55161939A JP16193980A JPH036560B2 JP H036560 B2 JPH036560 B2 JP H036560B2 JP 55161939 A JP55161939 A JP 55161939A JP 16193980 A JP16193980 A JP 16193980A JP H036560 B2 JPH036560 B2 JP H036560B2
Authority
JP
Japan
Prior art keywords
event
alarm
abnormal
occurrence
display
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP55161939A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5786990A (en
Inventor
Masao Myake
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Hitachi Ltd
Original Assignee
Hitachi Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Hitachi Ltd filed Critical Hitachi Ltd
Priority to JP16193980A priority Critical patent/JPS5786990A/ja
Publication of JPS5786990A publication Critical patent/JPS5786990A/ja
Publication of JPH036560B2 publication Critical patent/JPH036560B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Alarm Systems (AREA)
JP16193980A 1980-11-19 1980-11-19 Priority warning method Granted JPS5786990A (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP16193980A JPS5786990A (en) 1980-11-19 1980-11-19 Priority warning method

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP16193980A JPS5786990A (en) 1980-11-19 1980-11-19 Priority warning method

Publications (2)

Publication Number Publication Date
JPS5786990A JPS5786990A (en) 1982-05-31
JPH036560B2 true JPH036560B2 (ref) 1991-01-30

Family

ID=15744904

Family Applications (1)

Application Number Title Priority Date Filing Date
JP16193980A Granted JPS5786990A (en) 1980-11-19 1980-11-19 Priority warning method

Country Status (1)

Country Link
JP (1) JPS5786990A (ref)

Families Citing this family (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS6157441A (ja) * 1984-08-30 1986-03-24 Nippon Seiki Co Ltd 警告表示装置
KR102395194B1 (ko) 2017-06-21 2022-05-06 삼성전자주식회사 웨이퍼 본딩 장치 및 그 장치를 포함한 웨이퍼 본딩 시스템

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5378399U (ref) * 1976-12-03 1978-06-29
JPS54124698A (en) * 1978-03-22 1979-09-27 Toshiba Corp Alarm display unit
JPS55118197A (en) * 1979-03-07 1980-09-10 Tokyo Shibaura Electric Co Alarm indicator system

Also Published As

Publication number Publication date
JPS5786990A (en) 1982-05-31

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