JPH0360149B2 - - Google Patents

Info

Publication number
JPH0360149B2
JPH0360149B2 JP57152386A JP15238682A JPH0360149B2 JP H0360149 B2 JPH0360149 B2 JP H0360149B2 JP 57152386 A JP57152386 A JP 57152386A JP 15238682 A JP15238682 A JP 15238682A JP H0360149 B2 JPH0360149 B2 JP H0360149B2
Authority
JP
Japan
Prior art keywords
signal
video
electron beam
sample image
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP57152386A
Other languages
English (en)
Japanese (ja)
Other versions
JPS5942751A (ja
Inventor
Masao Kawai
Akio Hori
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Original Assignee
Shimadzu Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp filed Critical Shimadzu Corp
Priority to JP57152386A priority Critical patent/JPS5942751A/ja
Publication of JPS5942751A publication Critical patent/JPS5942751A/ja
Publication of JPH0360149B2 publication Critical patent/JPH0360149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57152386A 1982-08-31 1982-08-31 電子線走査形試料像表示装置 Granted JPS5942751A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152386A JPS5942751A (ja) 1982-08-31 1982-08-31 電子線走査形試料像表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152386A JPS5942751A (ja) 1982-08-31 1982-08-31 電子線走査形試料像表示装置

Publications (2)

Publication Number Publication Date
JPS5942751A JPS5942751A (ja) 1984-03-09
JPH0360149B2 true JPH0360149B2 (enExample) 1991-09-12

Family

ID=15539378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152386A Granted JPS5942751A (ja) 1982-08-31 1982-08-31 電子線走査形試料像表示装置

Country Status (1)

Country Link
JP (1) JPS5942751A (enExample)

Also Published As

Publication number Publication date
JPS5942751A (ja) 1984-03-09

Similar Documents

Publication Publication Date Title
JPS6246943B2 (enExample)
US4713687A (en) Scan line type dynamic observation apparatus
Potter et al. A Flying‐Spot Scanner
JPH0360149B2 (enExample)
SU572230A3 (ru) Сканирующа система микроскопа
US3739091A (en) Method and apparatus for displaying image and measuring object therein
US4587551A (en) Measurement of SC/H phase
JPS6243635B2 (enExample)
JPS631700B2 (enExample)
SU1092606A1 (ru) Видеоконтрольное устройство дл растрового электронного микроскопа
KR830002860Y1 (ko) 주사전자현미경 및 그 유사장치의 주사상 관찰장치
JPS6391946A (ja) 電子顕微鏡
JPS5842938B2 (ja) 走査形電子顕微鏡
JPH0343650Y2 (enExample)
SU920894A1 (ru) Сканирующее устройство воспроизведени изображени образца
JPS6362142A (ja) 表面分析装置
JPS59181450A (ja) スキヤンライン型動的観察装置
JPS5942752A (ja) 電子線走査形試料像表示装置
JPH0591357A (ja) 垂直偏向回路
JPH05190130A (ja) 電子顕微鏡の電子ビーム偏向磁場調整方法
JPS54101257A (en) Image dispaly unit
JP3263849B2 (ja) 表示装置
JPS606070B2 (ja) 走査電子顕微鏡
JPS57199164A (en) Sample image observation unit
JPS59134366U (ja) 走査電子顕微鏡