JPS5942751A - 電子線走査形試料像表示装置 - Google Patents

電子線走査形試料像表示装置

Info

Publication number
JPS5942751A
JPS5942751A JP57152386A JP15238682A JPS5942751A JP S5942751 A JPS5942751 A JP S5942751A JP 57152386 A JP57152386 A JP 57152386A JP 15238682 A JP15238682 A JP 15238682A JP S5942751 A JPS5942751 A JP S5942751A
Authority
JP
Japan
Prior art keywords
signal
electron beam
video
beam scanning
detector
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP57152386A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0360149B2 (enExample
Inventor
Masao Kawai
河合　政夫
Akio Hori
彰男 堀
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Shimadzu Corp
Shimazu Seisakusho KK
Original Assignee
Shimadzu Corp
Shimazu Seisakusho KK
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shimadzu Corp, Shimazu Seisakusho KK filed Critical Shimadzu Corp
Priority to JP57152386A priority Critical patent/JPS5942751A/ja
Publication of JPS5942751A publication Critical patent/JPS5942751A/ja
Publication of JPH0360149B2 publication Critical patent/JPH0360149B2/ja
Granted legal-status Critical Current

Links

Classifications

    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01J—ELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J37/00—Discharge tubes with provision for introducing objects or material to be exposed to the discharge, e.g. for the purpose of examination or processing thereof
    • H01J37/26—Electron or ion microscopes; Electron or ion diffraction tubes
    • H01J37/28—Electron or ion microscopes; Electron or ion diffraction tubes with scanning beams

Landscapes

  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
JP57152386A 1982-08-31 1982-08-31 電子線走査形試料像表示装置 Granted JPS5942751A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP57152386A JPS5942751A (ja) 1982-08-31 1982-08-31 電子線走査形試料像表示装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP57152386A JPS5942751A (ja) 1982-08-31 1982-08-31 電子線走査形試料像表示装置

Publications (2)

Publication Number Publication Date
JPS5942751A true JPS5942751A (ja) 1984-03-09
JPH0360149B2 JPH0360149B2 (enExample) 1991-09-12

Family

ID=15539378

Family Applications (1)

Application Number Title Priority Date Filing Date
JP57152386A Granted JPS5942751A (ja) 1982-08-31 1982-08-31 電子線走査形試料像表示装置

Country Status (1)

Country Link
JP (1) JPS5942751A (enExample)

Also Published As

Publication number Publication date
JPH0360149B2 (enExample) 1991-09-12

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