JPH0359285B2 - - Google Patents

Info

Publication number
JPH0359285B2
JPH0359285B2 JP6481287A JP6481287A JPH0359285B2 JP H0359285 B2 JPH0359285 B2 JP H0359285B2 JP 6481287 A JP6481287 A JP 6481287A JP 6481287 A JP6481287 A JP 6481287A JP H0359285 B2 JPH0359285 B2 JP H0359285B2
Authority
JP
Japan
Prior art keywords
bearing
pad
guide member
slide
fixing
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired
Application number
JP6481287A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63231019A (ja
Inventor
Koichi Matsushita
Masatsugu Koseki
Kazuya Sawaguchi
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Canon Inc
Original Assignee
Canon Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Canon Inc filed Critical Canon Inc
Priority to JP6481287A priority Critical patent/JPS63231019A/ja
Publication of JPS63231019A publication Critical patent/JPS63231019A/ja
Publication of JPH0359285B2 publication Critical patent/JPH0359285B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP6481287A 1987-03-19 1987-03-19 静圧軸受装置 Granted JPS63231019A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP6481287A JPS63231019A (ja) 1987-03-19 1987-03-19 静圧軸受装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP6481287A JPS63231019A (ja) 1987-03-19 1987-03-19 静圧軸受装置

Publications (2)

Publication Number Publication Date
JPS63231019A JPS63231019A (ja) 1988-09-27
JPH0359285B2 true JPH0359285B2 (OSRAM) 1991-09-10

Family

ID=13269030

Family Applications (1)

Application Number Title Priority Date Filing Date
JP6481287A Granted JPS63231019A (ja) 1987-03-19 1987-03-19 静圧軸受装置

Country Status (1)

Country Link
JP (1) JPS63231019A (OSRAM)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JP4047889B2 (ja) 2006-01-04 2008-02-13 ファナック株式会社 空気軸受を有する直線駆動装置の組立方法
NL2002935A1 (nl) 2008-06-27 2009-12-29 Asml Netherlands Bv Object support positioning device and lithographic apparatus.
DE102016201922B4 (de) 2016-02-09 2017-09-21 Carl Zeiss Industrielle Messtechnik Gmbh Linearführung, insbesondere für ein Koordinatenmessgerät

Also Published As

Publication number Publication date
JPS63231019A (ja) 1988-09-27

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Legal Events

Date Code Title Description
LAPS Cancellation because of no payment of annual fees