JPH0321765B2 - - Google Patents

Info

Publication number
JPH0321765B2
JPH0321765B2 JP61270484A JP27048486A JPH0321765B2 JP H0321765 B2 JPH0321765 B2 JP H0321765B2 JP 61270484 A JP61270484 A JP 61270484A JP 27048486 A JP27048486 A JP 27048486A JP H0321765 B2 JPH0321765 B2 JP H0321765B2
Authority
JP
Japan
Prior art keywords
guide
bearing
pad piece
pad
support shaft
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP61270484A
Other languages
English (en)
Japanese (ja)
Other versions
JPS63125820A (ja
Inventor
Katsunobu Ueda
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
Toshiba Corp
Original Assignee
Tokyo Shibaura Electric Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Tokyo Shibaura Electric Co Ltd filed Critical Tokyo Shibaura Electric Co Ltd
Priority to JP27048486A priority Critical patent/JPS63125820A/ja
Publication of JPS63125820A publication Critical patent/JPS63125820A/ja
Publication of JPH0321765B2 publication Critical patent/JPH0321765B2/ja
Granted legal-status Critical Current

Links

Landscapes

  • Magnetic Bearings And Hydrostatic Bearings (AREA)
JP27048486A 1986-11-13 1986-11-13 静圧軸受 Granted JPS63125820A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP27048486A JPS63125820A (ja) 1986-11-13 1986-11-13 静圧軸受

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP27048486A JPS63125820A (ja) 1986-11-13 1986-11-13 静圧軸受

Publications (2)

Publication Number Publication Date
JPS63125820A JPS63125820A (ja) 1988-05-30
JPH0321765B2 true JPH0321765B2 (OSRAM) 1991-03-25

Family

ID=17486936

Family Applications (1)

Application Number Title Priority Date Filing Date
JP27048486A Granted JPS63125820A (ja) 1986-11-13 1986-11-13 静圧軸受

Country Status (1)

Country Link
JP (1) JPS63125820A (OSRAM)

Families Citing this family (6)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPH01305204A (ja) * 1988-06-03 1989-12-08 Hitachi Ltd 低圧給水加熱器
JPH0647135Y2 (ja) * 1988-10-18 1994-11-30 エヌティエヌ株式会社 エアスライド装置
DE102004012204B3 (de) * 2004-03-12 2005-05-25 Siemens Ag Winkelluftlager mit linear zueinander verschiebbaren länglichen Führungsteilen
DE102005063326B4 (de) * 2005-02-24 2014-01-16 AeroLas GmbH Aerostatische Lager- Lasertechnik Aerostatisches Lager mit einem Lagerfuß
DE102005023998A1 (de) * 2005-05-25 2006-12-14 Schaeffler Kg Hydrostatische Lagerung
DE102018202772B4 (de) * 2018-02-23 2023-08-10 Carl Zeiss Industrielle Messtechnik Gmbh Halteeinrichtung für eine Luftlagereinrichtung, Koordinatenmessgerät sowie Verfahren zur Herstellung einer Halteeinrichtung

Family Cites Families (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5155572U (OSRAM) * 1974-10-25 1976-04-28
JPS59121524U (ja) * 1983-02-01 1984-08-16 オムロン株式会社 空気軸受パツト
JPS6193622U (OSRAM) * 1984-11-27 1986-06-17

Also Published As

Publication number Publication date
JPS63125820A (ja) 1988-05-30

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