JPH0359285B2 - - Google Patents

Description

DETAILED DESCRIPTION OF THE INVENTION [Field of Industrial Application] The present invention relates to a hydrostatic bearing device, and more specifically, to a hydrostatic bearing pad in a slide mechanism whose movement is supported by the static pressure of pressurized air. The present invention relates to a hydrostatic bearing device.

[Conventional technology]

A conventional hydrostatic bearing device of this type has been constructed as shown in FIG. 4, for example. Here, 1 is a hydrostatic bearing pad, 2 is a slide member on which a plurality of hydrostatic bearing pads 1 are arranged as shown, and 3 is a guide member when the slide member 2 moves. The hydrostatic bearing pad 1 is composed of a bearing member 4 made of a porous material and its pad holder 5, and pressurized air is supplied through a pressurized air passage 7 to an air chamber 6 formed between them. By doing so, the air is injected to the bearing surface 4A through the bearing member 4, and the slide member 2 is kept in a floating state through the air film layer formed between the bearing surface 4A and the surface of the guide member 3. be able to.

However, here, the slide member 2 has a box-shaped cross section with an opening on the lower surface side for passing the guide member 3, and as shown in the figure, the slide member 2 has three members: an upper plate 2A, a side plate 2B, and a lower plate 2C. They were integrally fastened to each other with fixing screws 8. The reason for this configuration is that the bearing surface 4A of the bearing member 4
It is necessary to maintain an accurate and even gap between the surface of the guide member 3 and the surface of the guide member 3, and therefore the finishing dimensions of the inner surface of the slide member 2 to which the hydrostatic bearing pad 1 is attached also require high precision. It depends.

[Problem that the invention seeks to solve]

However, in the conventional hydrostatic bearing device as described above, when pressurized air is supplied to the hydrostatic bearing pad 1, the pad 1 slides due to the air film generated between the pad 1 and the surface of the guide member 3. The side plate 2B of the member 2 has a tendency to bend outward due to its cantilevered structure with the joint with the upper plate 2A as the fulcrum, and the lower plate 2C also tends to bend outward with the joint with the side plate 2B as the fulcrum. A tendency occurs. Moreover, since the stress generated in the joint at this time is concentrated on the fixing screw 8, the slide member 2 cannot maintain sufficient rigidity, and therefore the pad bearing surface 4A and the guide member 3
There was a drawback that the proper gap size between the two was lost. In addition, in order to increase the rigidity, the upper plate 2A is simply
It is not enough to simply integrate the pad 1 with the side plate 2B.
It is difficult to accurately finish the inner surface, which serves as a reference for attachment, and it is also difficult to adjust the gap between the pad 1 and the guide member 3.

An object of the present invention is to eliminate the above-mentioned conventional drawbacks, increase the rigidity of a slide member to which a hydrostatic bearing pad is attached, and appropriately adjust the air layer forming gap between the bearing member and the guide member. The object of the present invention is to provide a hydrostatic bearing device that can perform the following functions.

[Means for solving problems]

In order to achieve such an object, the present invention disposes a static pressure bearing member on a slide member facing a guide member, and moves the slide member along the guide member by fluid pressure from the bearing member. In a freely supported hydrostatic bearing device, a pad holder fitted into a through hole formed in the slide member, a bearing member attached to a side of the pad holder facing the guide member, A fixing member for fixing the pad holder to the slide member, and processing a joint surface between the pad holder and the fixing member and/or a joint surface between the slide member and the fixing member. The present invention is characterized in that the gap between the bearing member and the guide member can be adjusted.

[Effect]

According to the present invention, the pad holder holding the bearing member by static pressure is fitted into the through hole protruding from the slide member and is airtightly attached via the fixing member. This makes it possible to appropriately and easily adjust the gap between the bearing member and the guide member while supplying pressurized air to the bearing member.

[Example] Hereinafter, an example of the present invention will be described in detail and specifically based on the drawings.

FIG. 1 shows an embodiment of the invention. Here, 1
2 is a slide member, 12A is a portal portion whose upper and side parts are integrally molded, and 12C is a slide member 1.
This is the lower plate part that is joined to 2A with adhesive or fixing screws. However, in this example, through-holes 13 are formed in the upper part, side part, and connection part of the slide member 12 configured in this way, and these through-holes 13
Attach the hydrostatic bearing pad 11 to. That is, the hydrostatic bearing pad 11 is fixed to the bearing member 4, the pad holder 14, and the pad holder 14 with screws 15, as shown in FIG.
Bearing fixing member 1 fixed with screws 16 to
It consists of 7. 18 is an O-ring provided around the pad holder 14 for airtightness.

In this example, the pad holder 14 and the bearing member 4 are bonded together with an adhesive or the like, and an air chamber 6 in the form of an air passage is provided on the bonded surface. Further, the pad holding member 14 and the bearing fixing member 17 are joined with their respective joint surfaces 14A and 17A abutting against each other, and the joint surface 17A
By adjusting and finishing the gap between the bearing member 4 and the guide member 3, it is possible to appropriately adjust the gap between the bearing member 4 and the guide member 3. That is, by processing the joint surface between the pad holder 14 and the bearing fixing member 17, the gap between the bearing member 4 and the guide member 3 is appropriately enlarged, and the gap between the sliding member and the fixing member 1 is increased.
By processing the joint surface with 7, the gap can be made smaller.

Figure 3 shows an example in which the present invention is applied to a static pressure slide mechanism. This type of static pressure slide mechanism is suitable for devices that hold and move blades and grinding members in processing machines, grinding machines, etc. It is. Here, the A-A cross section has the form shown in FIG. 1A, and the slide member 12 is connected to the guide member 3.
It can be kept in a floating state relative to the guide member 3 and moved in the left and right directions in this figure by a drive means (not shown) along the guide member 3. Note that 20 is a base to which the guide member 3 is fixed.

Although the embodiments of the hydrostatic shaft device of the present invention have been described above, the application of the present invention is not limited to the case where a hydrostatic bearing pad is provided on a slide member as a supported body in a slide mechanism; Of course, the present invention can also be applied to a support body that supports a body, that is, a structure in which a hydrostatic bearing pad is provided on the side of a guide member. The shape of the body is not limited to the portal shape as in the above example.

Furthermore, the slide member may also be completely integrally molded. In addition, in the above explanation, a pad made of porous material is used as the bearing member of the hydrostatic bearing pad, but the pad can also be applied to a hydrostatic bearing pad with an orifice or self-generated orifice instead. Moreover, the present invention is also applicable to a hydrostatic bearing device in which the working fluid is not a gas such as air but a liquid such as oil. In addition, it goes without saying that the arrangement route of the pressurized air passage is not limited to the above-mentioned example. It doesn't matter how it is.

〔Effect of the invention〕

As described above, according to the present invention, a static pressure bearing member is arranged on the slide member facing the guide member, and the slide member is moved along the guide member by the fluid pressure from the bearing member. A hydrostatic bearing device movably supported, comprising: a pad holder fitted into a through hole formed in the slide member; a bearing member attached to a side of the pad holder facing the guide member; , a fixing member for fixing the pad holder to the slide member, and processing a joint surface between the pad holder and the fixing member and/or a joint surface between the slide member and the fixing member. As a result, the gap between the bearing member and the guide member can be adjusted, so that the fluid film forming gap size can be kept stable and the gap size can be adjusted freely. It became like that.

[Brief explanation of drawings]

Fig. 1 is a sectional view showing an example of the structure of the hydrostatic bearing device of the present invention, Fig. 2 is a detailed view of a part thereof, Fig. 3 is a block diagram of a slide mechanism to which the present invention is applied, and Fig. 4 is a conventional FIG. 2 is a sectional view showing an example of the configuration of a hydrostatic bearing device. 1, 11... Hydrostatic bearing pad, 3... Guide member, 4
... Bearing member, 6... Air quality, 7... Pressurized air passage, 1
2...Sliding member, 12A...Portal part, 12C...Lower plate part, 13...Through hole, 14...Pad holder, 1
5, 16...screw, 17...bearing fixing member, 17A...
Joint surface, 18...O-ring.

Claims (1)

[Scope of Claims] 1. A static pressure bearing member is disposed on a slide member facing a guide member, and the slide member is supported movably along the guide member by fluid pressure from the bearing member. The pressure bearing device includes: a pad holder fitted into a through hole drilled in the slide member; a bearing member attached to a surface of the pad holder that faces the guide member; and the pad holder. a fixing member for fixing to the slide member, and the bearing member can be fixed to the bearing member by processing a joint surface between the pad holder and the fixing member and/or a joint surface between the slide member and the fixing member. A hydrostatic bearing device characterized in that a gap between the guide member and the guide member can be adjusted.