JPH0358060B2 - - Google Patents

Info

Publication number
JPH0358060B2
JPH0358060B2 JP58005711A JP571183A JPH0358060B2 JP H0358060 B2 JPH0358060 B2 JP H0358060B2 JP 58005711 A JP58005711 A JP 58005711A JP 571183 A JP571183 A JP 571183A JP H0358060 B2 JPH0358060 B2 JP H0358060B2
Authority
JP
Japan
Prior art keywords
thin film
metal
thickness
metal thin
gas
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Expired - Lifetime
Application number
JP58005711A
Other languages
English (en)
Japanese (ja)
Other versions
JPS59131152A (ja
Inventor
Naoto Yamamoto
Hiroshi Tsubomura
Hirofumi Ono
Hiroshi Mihira
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
S Tec Inc
Original Assignee
S Tec Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by S Tec Inc filed Critical S Tec Inc
Priority to JP571183A priority Critical patent/JPS59131152A/ja
Publication of JPS59131152A publication Critical patent/JPS59131152A/ja
Publication of JPH0358060B2 publication Critical patent/JPH0358060B2/ja
Granted legal-status Critical Current

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N27/00—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means
    • G01N27/002—Investigating or analysing materials by the use of electric, electrochemical, or magnetic means by investigating the work function voltage

Landscapes

  • Chemical & Material Sciences (AREA)
  • Chemical Kinetics & Catalysis (AREA)
  • Electrochemistry (AREA)
  • Physics & Mathematics (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • General Physics & Mathematics (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analyzing Materials By The Use Of Fluid Adsorption Or Reactions (AREA)
JP571183A 1983-01-16 1983-01-16 還元性ガスセンサ Granted JPS59131152A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP571183A JPS59131152A (ja) 1983-01-16 1983-01-16 還元性ガスセンサ

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP571183A JPS59131152A (ja) 1983-01-16 1983-01-16 還元性ガスセンサ

Publications (2)

Publication Number Publication Date
JPS59131152A JPS59131152A (ja) 1984-07-27
JPH0358060B2 true JPH0358060B2 (enExample) 1991-09-04

Family

ID=11618700

Family Applications (1)

Application Number Title Priority Date Filing Date
JP571183A Granted JPS59131152A (ja) 1983-01-16 1983-01-16 還元性ガスセンサ

Country Status (1)

Country Link
JP (1) JPS59131152A (enExample)

Families Citing this family (10)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61116651A (ja) * 1984-11-13 1986-06-04 Mitsui Toatsu Chem Inc ガス状水素化物の検出方法
JPS61117443A (ja) * 1984-11-14 1986-06-04 Mitsui Toatsu Chem Inc ガス状水素化物の検知方法
JPH0572163A (ja) * 1990-11-30 1993-03-23 Mitsui Mining Co Ltd 半導体式ガスセンサー
US5386715A (en) * 1993-12-06 1995-02-07 Motorola, Inc. Gas vapor sensor
KR100794722B1 (ko) * 2005-02-05 2008-01-21 박승혁 접촉눌림에 의한 변위감응센서
KR100794726B1 (ko) * 2007-10-12 2008-01-21 박승혁 접촉눌림에 의한 변위감응센서
KR100794724B1 (ko) * 2007-10-12 2008-01-21 박승혁 접촉눌림에 의한 변위감응센서
KR100794725B1 (ko) * 2007-10-12 2008-01-21 박승혁 접촉눌림에 의한 변위감응센서
KR100794723B1 (ko) * 2007-10-12 2008-01-21 박승혁 접촉눌림에 의한 변위감응센서
CN103760200B (zh) * 2014-01-20 2016-09-14 吉林大学 一种离子型气敏材料分析装置

Family Cites Families (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS5670448A (en) * 1979-11-14 1981-06-12 Matsushita Electric Ind Co Ltd Oxygen sensor

Also Published As

Publication number Publication date
JPS59131152A (ja) 1984-07-27

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