JPH0356867B2 - - Google Patents
Info
- Publication number
- JPH0356867B2 JPH0356867B2 JP59017968A JP1796884A JPH0356867B2 JP H0356867 B2 JPH0356867 B2 JP H0356867B2 JP 59017968 A JP59017968 A JP 59017968A JP 1796884 A JP1796884 A JP 1796884A JP H0356867 B2 JPH0356867 B2 JP H0356867B2
- Authority
- JP
- Japan
- Prior art keywords
- carrier
- carriers
- workpiece
- carry
- transfer table
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 230000007246 mechanism Effects 0.000 claims description 36
- 239000000969 carrier Substances 0.000 claims description 25
- 238000003754 machining Methods 0.000 claims description 4
- 238000000034 method Methods 0.000 description 8
- 239000000758 substrate Substances 0.000 description 7
- 238000001514 detection method Methods 0.000 description 4
- 210000000078 claw Anatomy 0.000 description 3
- 238000011109 contamination Methods 0.000 description 2
- 230000001788 irregular Effects 0.000 description 2
- 238000003825 pressing Methods 0.000 description 2
- 230000006866 deterioration Effects 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 230000002093 peripheral effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 238000003860 storage Methods 0.000 description 1
Classifications
-
- B—PERFORMING OPERATIONS; TRANSPORTING
- B24—GRINDING; POLISHING
- B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
- B24B37/00—Lapping machines or devices; Accessories
- B24B37/34—Accessories
- B24B37/345—Feeding, loading or unloading work specially adapted to lapping
Landscapes
- Engineering & Computer Science (AREA)
- Mechanical Engineering (AREA)
- Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59017968A JPS59156665A (ja) | 1984-02-03 | 1984-02-03 | 平面研削装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP59017968A JPS59156665A (ja) | 1984-02-03 | 1984-02-03 | 平面研削装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS59156665A JPS59156665A (ja) | 1984-09-05 |
| JPH0356867B2 true JPH0356867B2 (enrdf_load_stackoverflow) | 1991-08-29 |
Family
ID=11958528
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP59017968A Granted JPS59156665A (ja) | 1984-02-03 | 1984-02-03 | 平面研削装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS59156665A (enrdf_load_stackoverflow) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH0329083Y2 (enrdf_load_stackoverflow) * | 1985-05-21 | 1991-06-21 | ||
| JP6822801B2 (ja) * | 2016-09-05 | 2021-01-27 | 浜井産業株式会社 | ワーク搬出入装置及び平面加工システム |
-
1984
- 1984-02-03 JP JP59017968A patent/JPS59156665A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS59156665A (ja) | 1984-09-05 |