JPS59156665A - 平面研削装置 - Google Patents

平面研削装置

Info

Publication number
JPS59156665A
JPS59156665A JP59017968A JP1796884A JPS59156665A JP S59156665 A JPS59156665 A JP S59156665A JP 59017968 A JP59017968 A JP 59017968A JP 1796884 A JP1796884 A JP 1796884A JP S59156665 A JPS59156665 A JP S59156665A
Authority
JP
Japan
Prior art keywords
carrier
section
carriers
extracting
take
Prior art date
Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
Granted
Application number
JP59017968A
Other languages
English (en)
Japanese (ja)
Other versions
JPH0356867B2 (enrdf_load_stackoverflow
Inventor
Hatsuyuki Arai
新井　初雪
Current Assignee (The listed assignees may be inaccurate. Google has not performed a legal analysis and makes no representation or warranty as to the accuracy of the list.)
SUPIIDE FUAMU KK
Speedfam Corp
Original Assignee
SUPIIDE FUAMU KK
Speedfam Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by SUPIIDE FUAMU KK, Speedfam Corp filed Critical SUPIIDE FUAMU KK
Priority to JP59017968A priority Critical patent/JPS59156665A/ja
Publication of JPS59156665A publication Critical patent/JPS59156665A/ja
Publication of JPH0356867B2 publication Critical patent/JPH0356867B2/ja
Granted legal-status Critical Current

Links

Classifications

    • B—PERFORMING OPERATIONS; TRANSPORTING
    • B24—GRINDING; POLISHING
    • B24B—MACHINES, DEVICES, OR PROCESSES FOR GRINDING OR POLISHING; DRESSING OR CONDITIONING OF ABRADING SURFACES; FEEDING OF GRINDING, POLISHING, OR LAPPING AGENTS
    • B24B37/00—Lapping machines or devices; Accessories
    • B24B37/34—Accessories
    • B24B37/345—Feeding, loading or unloading work specially adapted to lapping

Landscapes

  • Engineering & Computer Science (AREA)
  • Mechanical Engineering (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
JP59017968A 1984-02-03 1984-02-03 平面研削装置 Granted JPS59156665A (ja)

Priority Applications (1)

Application Number Priority Date Filing Date Title
JP59017968A JPS59156665A (ja) 1984-02-03 1984-02-03 平面研削装置

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP59017968A JPS59156665A (ja) 1984-02-03 1984-02-03 平面研削装置

Publications (2)

Publication Number Publication Date
JPS59156665A true JPS59156665A (ja) 1984-09-05
JPH0356867B2 JPH0356867B2 (enrdf_load_stackoverflow) 1991-08-29

Family

ID=11958528

Family Applications (1)

Application Number Title Priority Date Filing Date
JP59017968A Granted JPS59156665A (ja) 1984-02-03 1984-02-03 平面研削装置

Country Status (1)

Country Link
JP (1) JPS59156665A (enrdf_load_stackoverflow)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191847U (enrdf_load_stackoverflow) * 1985-05-21 1986-11-29
JP2018039058A (ja) * 2016-09-05 2018-03-15 浜井産業株式会社 ワーク搬出入装置及び平面加工システム

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
JPS61191847U (enrdf_load_stackoverflow) * 1985-05-21 1986-11-29
JP2018039058A (ja) * 2016-09-05 2018-03-15 浜井産業株式会社 ワーク搬出入装置及び平面加工システム

Also Published As

Publication number Publication date
JPH0356867B2 (enrdf_load_stackoverflow) 1991-08-29

Similar Documents

Publication Publication Date Title
US5333413A (en) Automatic wafer lapping apparatus
JPH0663862A (ja) 研磨装置
CN111113219A (zh) 一种手机壳转台数控砂光机
CN110480485A (zh) 一种高效的杯体抛光机
US4753047A (en) Transferring and loading device for honeycomb structures
JPS59156666A (ja) 平面研削装置におけるワ−クの自動装填機構
US6196906B1 (en) Surface polishing apparatus and method of taking out workpiece
JPS59156665A (ja) 平面研削装置
CN210938421U (zh) 一种带有上下料装置的无心磨床
CN209831280U (zh) 晶圆多工位边缘抛光设备
CN209831278U (zh) 晶圆边缘抛光装置
CN112548688A (zh) 一种锁体毛坯抛光设备及其操作方法
JPS61241060A (ja) 平面自動研磨装置
CN111546175A (zh) 一种工程塑料件的自动上料抛光倒角去毛刺设备
CN216582964U (zh) 磨边轮卸料输送装置
CN114260580A (zh) 烟杆镭雕机
JPH05185349A (ja) ガラス製品の表面加工装置
CN209831181U (zh) 晶圆转移装置
CN210281830U (zh) 晶圆边缘抛光机构及晶圆边缘抛光装置
CN108994666B (zh) 一种用于玻璃加工机的旋转升降方法
CN217626176U (zh) 烟杆上料装置以及烟杆镭雕机
JPS62136365A (ja) ポリシング装置
CN110883631A (zh) 伞齿胚料自动去毛刺机
JP4620898B2 (ja) 研磨装置システム
JPH0426983B2 (enrdf_load_stackoverflow)