JPH0356046Y2 - - Google Patents
Info
- Publication number
- JPH0356046Y2 JPH0356046Y2 JP13009684U JP13009684U JPH0356046Y2 JP H0356046 Y2 JPH0356046 Y2 JP H0356046Y2 JP 13009684 U JP13009684 U JP 13009684U JP 13009684 U JP13009684 U JP 13009684U JP H0356046 Y2 JPH0356046 Y2 JP H0356046Y2
- Authority
- JP
- Japan
- Prior art keywords
- reaction chamber
- sensitizing
- gas
- thin film
- introducing
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000463 material Substances 0.000 claims description 37
- 230000001235 sensitizing effect Effects 0.000 claims description 24
- 238000006243 chemical reaction Methods 0.000 claims description 21
- 239000010409 thin film Substances 0.000 claims description 16
- 239000002994 raw material Substances 0.000 claims description 10
- 239000000758 substrate Substances 0.000 claims description 7
- 230000003287 optical effect Effects 0.000 claims description 5
- 239000007789 gas Substances 0.000 description 21
- 230000005284 excitation Effects 0.000 description 10
- 230000015572 biosynthetic process Effects 0.000 description 7
- 238000000034 method Methods 0.000 description 4
- 239000004065 semiconductor Substances 0.000 description 4
- 238000005229 chemical vapour deposition Methods 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 239000010408 film Substances 0.000 description 3
- 239000012159 carrier gas Substances 0.000 description 2
- 238000009792 diffusion process Methods 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- 238000012986 modification Methods 0.000 description 2
- 230000004048 modification Effects 0.000 description 2
- 238000002834 transmittance Methods 0.000 description 2
- 206010070834 Sensitisation Diseases 0.000 description 1
- 229910021417 amorphous silicon Inorganic materials 0.000 description 1
- 229910052793 cadmium Inorganic materials 0.000 description 1
- 239000003054 catalyst Substances 0.000 description 1
- 239000007795 chemical reaction product Substances 0.000 description 1
- 238000007796 conventional method Methods 0.000 description 1
- 238000000354 decomposition reaction Methods 0.000 description 1
- 230000000694 effects Effects 0.000 description 1
- 238000010574 gas phase reaction Methods 0.000 description 1
- 230000001678 irradiating effect Effects 0.000 description 1
- QSHDDOUJBYECFT-UHFFFAOYSA-N mercury Chemical compound [Hg] QSHDDOUJBYECFT-UHFFFAOYSA-N 0.000 description 1
- 239000007769 metal material Substances 0.000 description 1
- 239000010453 quartz Substances 0.000 description 1
- 230000008313 sensitization Effects 0.000 description 1
- 238000000926 separation method Methods 0.000 description 1
- VYPSYNLAJGMNEJ-UHFFFAOYSA-N silicon dioxide Inorganic materials O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 description 1
- 239000012780 transparent material Substances 0.000 description 1
Classifications
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y02—TECHNOLOGIES OR APPLICATIONS FOR MITIGATION OR ADAPTATION AGAINST CLIMATE CHANGE
- Y02E—REDUCTION OF GREENHOUSE GAS [GHG] EMISSIONS, RELATED TO ENERGY GENERATION, TRANSMISSION OR DISTRIBUTION
- Y02E10/00—Energy generation through renewable energy sources
- Y02E10/50—Photovoltaic [PV] energy
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13009684U JPS6144830U (ja) | 1984-08-28 | 1984-08-28 | 光cvd装置 |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
JP13009684U JPS6144830U (ja) | 1984-08-28 | 1984-08-28 | 光cvd装置 |
Publications (2)
Publication Number | Publication Date |
---|---|
JPS6144830U JPS6144830U (ja) | 1986-03-25 |
JPH0356046Y2 true JPH0356046Y2 (enrdf_load_stackoverflow) | 1991-12-16 |
Family
ID=30688708
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
JP13009684U Granted JPS6144830U (ja) | 1984-08-28 | 1984-08-28 | 光cvd装置 |
Country Status (1)
Country | Link |
---|---|
JP (1) | JPS6144830U (enrdf_load_stackoverflow) |
-
1984
- 1984-08-28 JP JP13009684U patent/JPS6144830U/ja active Granted
Also Published As
Publication number | Publication date |
---|---|
JPS6144830U (ja) | 1986-03-25 |
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