JPH0355439B2 - - Google Patents
Info
- Publication number
- JPH0355439B2 JPH0355439B2 JP29257585A JP29257585A JPH0355439B2 JP H0355439 B2 JPH0355439 B2 JP H0355439B2 JP 29257585 A JP29257585 A JP 29257585A JP 29257585 A JP29257585 A JP 29257585A JP H0355439 B2 JPH0355439 B2 JP H0355439B2
- Authority
- JP
- Japan
- Prior art keywords
- reaction tube
- substrate crystal
- vapor phase
- etching
- hcl
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000758 substrate Substances 0.000 claims description 45
- 239000013078 crystal Substances 0.000 claims description 40
- 238000005530 etching Methods 0.000 claims description 36
- 239000007789 gas Substances 0.000 claims description 23
- 239000012808 vapor phase Substances 0.000 claims description 17
- 150000001875 compounds Chemical class 0.000 claims description 11
- 239000004065 semiconductor Substances 0.000 claims description 11
- 229910052736 halogen Inorganic materials 0.000 claims description 3
- 150000002367 halogens Chemical class 0.000 claims description 3
- 229910000039 hydrogen halide Inorganic materials 0.000 claims description 3
- 239000012433 hydrogen halide Substances 0.000 claims description 3
- 150000004820 halides Chemical class 0.000 claims description 2
- 229910001218 Gallium arsenide Inorganic materials 0.000 description 12
- 238000011144 upstream manufacturing Methods 0.000 description 10
- 239000010410 layer Substances 0.000 description 9
- 239000012159 carrier gas Substances 0.000 description 7
- 238000010438 heat treatment Methods 0.000 description 7
- 150000004678 hydrides Chemical class 0.000 description 6
- 238000010586 diagram Methods 0.000 description 5
- 238000000034 method Methods 0.000 description 5
- 239000002052 molecular layer Substances 0.000 description 4
- 239000012071 phase Substances 0.000 description 4
- 230000007547 defect Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000003486 chemical etching Methods 0.000 description 2
- XOYLJNJLGBYDTH-UHFFFAOYSA-M chlorogallium Chemical compound [Ga]Cl XOYLJNJLGBYDTH-UHFFFAOYSA-M 0.000 description 2
- 238000010924 continuous production Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000004519 manufacturing process Methods 0.000 description 2
- 238000001947 vapour-phase growth Methods 0.000 description 2
- 230000001066 destructive effect Effects 0.000 description 1
- 239000002019 doping agent Substances 0.000 description 1
- 239000012535 impurity Substances 0.000 description 1
- 230000003287 optical effect Effects 0.000 description 1
- 238000005498 polishing Methods 0.000 description 1
- 239000002356 single layer Substances 0.000 description 1
- 238000001179 sorption measurement Methods 0.000 description 1
Landscapes
- Drying Of Semiconductors (AREA)
- Weting (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
- ing And Chemical Polishing (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29257585A JPS62153199A (ja) | 1985-12-27 | 1985-12-27 | ３−５族化合物半導体の気相エツチング装置 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP29257585A JPS62153199A (ja) | 1985-12-27 | 1985-12-27 | ３−５族化合物半導体の気相エツチング装置 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62153199A JPS62153199A (ja) | 1987-07-08 |
| JPH0355439B2 true JPH0355439B2 (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) | 1991-08-23 |
Family
ID=17783546
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP29257585A Granted JPS62153199A (ja) | 1985-12-27 | 1985-12-27 | ３−５族化合物半導体の気相エツチング装置 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62153199A (GUID-C5D7CC26-194C-43D0-91A1-9AE8C70A9BFF.html) |
Families Citing this family (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02283018A (ja) * | 1989-01-31 | 1990-11-20 | Matsushita Electric Ind Co Ltd | 半導体基体の処理方法及び半導体の製造方法 |
-
1985
- 1985-12-27 JP JP29257585A patent/JPS62153199A/ja active Granted
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62153199A (ja) | 1987-07-08 |