JPH0354138Y2 - - Google Patents
Info
- Publication number
- JPH0354138Y2 JPH0354138Y2 JP16725586U JP16725586U JPH0354138Y2 JP H0354138 Y2 JPH0354138 Y2 JP H0354138Y2 JP 16725586 U JP16725586 U JP 16725586U JP 16725586 U JP16725586 U JP 16725586U JP H0354138 Y2 JPH0354138 Y2 JP H0354138Y2
- Authority
- JP
- Japan
- Prior art keywords
- tank
- processing tank
- chemical solution
- pump
- chemical
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired
Links
- 239000000126 substance Substances 0.000 claims description 29
- 238000012545 processing Methods 0.000 claims description 28
- 239000007788 liquid Substances 0.000 claims description 8
- 238000011282 treatment Methods 0.000 claims description 4
- 239000004065 semiconductor Substances 0.000 description 5
- 235000012431 wafers Nutrition 0.000 description 4
- 238000004140 cleaning Methods 0.000 description 3
- 230000003749 cleanliness Effects 0.000 description 3
- 238000012993 chemical processing Methods 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 239000000428 dust Substances 0.000 description 2
- 238000005530 etching Methods 0.000 description 2
- 239000000969 carrier Substances 0.000 description 1
- 238000001035 drying Methods 0.000 description 1
- 238000004519 manufacturing process Methods 0.000 description 1
- 239000002699 waste material Substances 0.000 description 1
Landscapes
- ing And Chemical Polishing (AREA)
- Drying Of Semiconductors (AREA)
- Weting (AREA)
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725586U JPH0354138Y2 (US07223432-20070529-C00017.png) | 1986-10-30 | 1986-10-30 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP16725586U JPH0354138Y2 (US07223432-20070529-C00017.png) | 1986-10-30 | 1986-10-30 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS6373364U JPS6373364U (US07223432-20070529-C00017.png) | 1988-05-16 |
| JPH0354138Y2 true JPH0354138Y2 (US07223432-20070529-C00017.png) | 1991-11-28 |
Family
ID=31099016
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP16725586U Expired JPH0354138Y2 (US07223432-20070529-C00017.png) | 1986-10-30 | 1986-10-30 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPH0354138Y2 (US07223432-20070529-C00017.png) |
Families Citing this family (2)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3077140B2 (ja) * | 1988-09-12 | 2000-08-14 | 日本電気株式会社 | 半導体装置の製造装置 |
| JP2835546B2 (ja) * | 1991-10-28 | 1998-12-14 | シャープ株式会社 | エッチング等の処理槽 |
-
1986
- 1986-10-30 JP JP16725586U patent/JPH0354138Y2/ja not_active Expired
Also Published As
| Publication number | Publication date |
|---|---|
| JPS6373364U (US07223432-20070529-C00017.png) | 1988-05-16 |
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| JPH0354138Y2 (US07223432-20070529-C00017.png) | ||
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