JPH0352439B2 - - Google Patents

Info

Publication number

JPH0352439B2

JPH0352439B2 JP20087085A JP20087085A JPH0352439B2 JP H0352439 B2 JPH0352439 B2 JP H0352439B2 JP 20087085 A JP20087085 A JP 20087085A JP 20087085 A JP20087085 A JP 20087085A JP H0352439 B2 JPH0352439 B2 JP H0352439B2

Authority

JP

Japan

Prior art keywords

silicon

alloy

silicon nitride

molar ratio

fibrous

Prior art date

1985-09-10

Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)

Expired

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• XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 claims description 62
• 239000010703 silicon Substances 0.000 claims description 61
• 229910052710 silicon Inorganic materials 0.000 claims description 55
• VYPSYNLAJGMNEJ-UHFFFAOYSA-N Silicium dioxide Chemical compound O=[Si]=O VYPSYNLAJGMNEJ-UHFFFAOYSA-N 0.000 claims description 54
• 229910052581 Si3N4 Inorganic materials 0.000 claims description 40
• HQVNEWCFYHHQES-UHFFFAOYSA-N silicon nitride Chemical compound N12[Si]34N5[Si]62N3[Si]51N64 HQVNEWCFYHHQES-UHFFFAOYSA-N 0.000 claims description 40
• 239000000377 silicon dioxide Substances 0.000 claims description 27
• 235000012239 silicon dioxide Nutrition 0.000 claims description 26
• 229910045601 alloy Inorganic materials 0.000 claims description 22
• 239000000956 alloy Substances 0.000 claims description 22
• FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 18
• 239000011777 magnesium Substances 0.000 claims description 18
• 229910052749 magnesium Inorganic materials 0.000 claims description 17
• 229910052751 metal Inorganic materials 0.000 claims description 16
• 239000002184 metal Substances 0.000 claims description 16
• IJGRMHOSHXDMSA-UHFFFAOYSA-N Atomic nitrogen Chemical compound N#N IJGRMHOSHXDMSA-UHFFFAOYSA-N 0.000 claims description 15
• 239000002245 particle Substances 0.000 claims description 15
• RYGMFSIKBFXOCR-UHFFFAOYSA-N Copper Chemical compound [Cu] RYGMFSIKBFXOCR-UHFFFAOYSA-N 0.000 claims description 14
• 229910052782 aluminium Inorganic materials 0.000 claims description 14
• XAGFODPZIPBFFR-UHFFFAOYSA-N aluminium Chemical compound [Al] XAGFODPZIPBFFR-UHFFFAOYSA-N 0.000 claims description 14
• 229910052802 copper Inorganic materials 0.000 claims description 14
• 239000010949 copper Substances 0.000 claims description 14
• 238000000034 method Methods 0.000 claims description 13
• 239000000203 mixture Substances 0.000 claims description 11
• 239000000843 powder Substances 0.000 claims description 9
• OKTJSMMVPCPJKN-UHFFFAOYSA-N Carbon Chemical compound [C] OKTJSMMVPCPJKN-UHFFFAOYSA-N 0.000 claims description 8
• PXHVJJICTQNCMI-UHFFFAOYSA-N Nickel Chemical compound [Ni] PXHVJJICTQNCMI-UHFFFAOYSA-N 0.000 claims description 8
• 229910052799 carbon Inorganic materials 0.000 claims description 8
• 150000002739 metals Chemical class 0.000 claims description 8
• 238000010438 heat treatment Methods 0.000 claims description 7
• 238000004519 manufacturing process Methods 0.000 claims description 7
• 229910052757 nitrogen Inorganic materials 0.000 claims description 7
• XEEYBQQBJWHFJM-UHFFFAOYSA-N Iron Chemical compound [Fe] XEEYBQQBJWHFJM-UHFFFAOYSA-N 0.000 claims description 6
• 238000002156 mixing Methods 0.000 claims description 6
• 150000003839 salts Chemical class 0.000 claims description 5
• 229910052759 nickel Inorganic materials 0.000 claims description 4
• 239000012298 atmosphere Substances 0.000 claims description 3
• 229910052742 iron Inorganic materials 0.000 claims description 3
• WPBNNNQJVZRUHP-UHFFFAOYSA-L manganese(2+);methyl n-[[2-(methoxycarbonylcarbamothioylamino)phenyl]carbamothioyl]carbamate;n-[2-(sulfidocarbothioylamino)ethyl]carbamodithioate Chemical compound [Mn+2].[S-]C(=S)NCCNC([S-])=S.COC(=O)NC(=S)NC1=CC=CC=C1NC(=S)NC(=O)OC WPBNNNQJVZRUHP-UHFFFAOYSA-L 0.000 claims description 3
• 238000000465 moulding Methods 0.000 claims description 2
• 239000007789 gas Substances 0.000 claims 1
• 239000011863 silicon-based powder Substances 0.000 claims 1
• 239000013078 crystal Substances 0.000 description 22
• 239000002344 surface layer Substances 0.000 description 9
• 238000006243 chemical reaction Methods 0.000 description 8
• 239000000835 fiber Substances 0.000 description 7
• 229910052814 silicon oxide Inorganic materials 0.000 description 7
• 230000015572 biosynthetic process Effects 0.000 description 6
• 230000000694 effects Effects 0.000 description 6
• 239000007791 liquid phase Substances 0.000 description 6
• 239000012071 phase Substances 0.000 description 6
• UFHFLCQGNIYNRP-UHFFFAOYSA-N Hydrogen Chemical compound [H][H] UFHFLCQGNIYNRP-UHFFFAOYSA-N 0.000 description 4
• 229910000905 alloy phase Inorganic materials 0.000 description 4
• 239000008187 granular material Substances 0.000 description 4
• LIVNPJMFVYWSIS-UHFFFAOYSA-N silicon monoxide Chemical compound [Si-]#[O+] LIVNPJMFVYWSIS-UHFFFAOYSA-N 0.000 description 4
• PWHULOQIROXLJO-UHFFFAOYSA-N Manganese Chemical compound [Mn] PWHULOQIROXLJO-UHFFFAOYSA-N 0.000 description 3
• 229910000676 Si alloy Inorganic materials 0.000 description 3
• 239000011230 binding agent Substances 0.000 description 3
• 239000003054 catalyst Substances 0.000 description 3
• 239000002131 composite material Substances 0.000 description 3
• 229910052748 manganese Inorganic materials 0.000 description 3
• 239000011572 manganese Substances 0.000 description 3
• 229920000609 methyl cellulose Polymers 0.000 description 3
• 239000001923 methylcellulose Substances 0.000 description 3
• 235000010981 methylcellulose Nutrition 0.000 description 3
• XLYOFNOQVPJJNP-UHFFFAOYSA-N water Substances O XLYOFNOQVPJJNP-UHFFFAOYSA-N 0.000 description 3
• XKRFYHLGVUSROY-UHFFFAOYSA-N Argon Chemical compound [Ar] XKRFYHLGVUSROY-UHFFFAOYSA-N 0.000 description 2
• 229910001111 Fine metal Inorganic materials 0.000 description 2
• 238000002485 combustion reaction Methods 0.000 description 2
• 238000011109 contamination Methods 0.000 description 2
• 238000002425 crystallisation Methods 0.000 description 2
• 230000008025 crystallization Effects 0.000 description 2
• 229910001873 dinitrogen Inorganic materials 0.000 description 2
• 239000011521 glass Substances 0.000 description 2
• 239000001257 hydrogen Substances 0.000 description 2
• 229910052739 hydrogen Inorganic materials 0.000 description 2
• 239000011810 insulating material Substances 0.000 description 2
• 230000014759 maintenance of location Effects 0.000 description 2
• 239000000463 material Substances 0.000 description 2
• 239000000376 reactant Substances 0.000 description 2
• 239000012779 reinforcing material Substances 0.000 description 2
• 229920002134 Carboxymethyl cellulose Polymers 0.000 description 1
• 229910021591 Copper(I) chloride Inorganic materials 0.000 description 1
• 229910000881 Cu alloy Inorganic materials 0.000 description 1
• 241000196324 Embryophyta Species 0.000 description 1
• 229910000861 Mg alloy Inorganic materials 0.000 description 1
• 229910019440 Mg(OH) Inorganic materials 0.000 description 1
• 229910017639 MgSi Inorganic materials 0.000 description 1
• 240000007594 Oryza sativa Species 0.000 description 1
• 235000007164 Oryza sativa Nutrition 0.000 description 1
• 239000004372 Polyvinyl alcohol Substances 0.000 description 1
• 229910004298 SiO 2 Inorganic materials 0.000 description 1
• 238000002441 X-ray diffraction Methods 0.000 description 1
• PNEYBMLMFCGWSK-UHFFFAOYSA-N aluminium oxide Inorganic materials [O-2].[O-2].[O-2].[Al+3].[Al+3] PNEYBMLMFCGWSK-UHFFFAOYSA-N 0.000 description 1
• 229910052786 argon Inorganic materials 0.000 description 1
• QVGXLLKOCUKJST-UHFFFAOYSA-N atomic oxygen Chemical compound [O] QVGXLLKOCUKJST-UHFFFAOYSA-N 0.000 description 1
• 239000001768 carboxy methyl cellulose Substances 0.000 description 1
• 235000010948 carboxy methyl cellulose Nutrition 0.000 description 1
• 239000008112 carboxymethyl-cellulose Substances 0.000 description 1
• 239000000919 ceramic Substances 0.000 description 1
• 235000013339 cereals Nutrition 0.000 description 1
• 239000003795 chemical substances by application Substances 0.000 description 1
• 238000007796 conventional method Methods 0.000 description 1
• 229940116318 copper carbonate Drugs 0.000 description 1
• OXBLHERUFWYNTN-UHFFFAOYSA-M copper(I) chloride Chemical compound [Cu]Cl OXBLHERUFWYNTN-UHFFFAOYSA-M 0.000 description 1
• GEZOTWYUIKXWOA-UHFFFAOYSA-L copper;carbonate Chemical compound [Cu+2].[O-]C([O-])=O GEZOTWYUIKXWOA-UHFFFAOYSA-L 0.000 description 1
• 229910021419 crystalline silicon Inorganic materials 0.000 description 1
• 229940045803 cuprous chloride Drugs 0.000 description 1
• 230000003247 decreasing effect Effects 0.000 description 1
• IJKVHSBPTUYDLN-UHFFFAOYSA-N dihydroxy(oxo)silane Chemical compound O[Si](O)=O IJKVHSBPTUYDLN-UHFFFAOYSA-N 0.000 description 1
• 238000004090 dissolution Methods 0.000 description 1
• 239000000428 dust Substances 0.000 description 1
• 230000005611 electricity Effects 0.000 description 1
• 239000003256 environmental substance Substances 0.000 description 1
• 230000005484 gravity Effects 0.000 description 1
• 229910001385 heavy metal Inorganic materials 0.000 description 1
• 239000010903 husk Substances 0.000 description 1
• 239000012774 insulation material Substances 0.000 description 1
• 238000010813 internal standard method Methods 0.000 description 1
• 150000002500 ions Chemical class 0.000 description 1
• 229910001234 light alloy Inorganic materials 0.000 description 1
• MIVBAHRSNUNMPP-UHFFFAOYSA-N manganese(2+);dinitrate Chemical compound [Mn+2].[O-][N+]([O-])=O.[O-][N+]([O-])=O MIVBAHRSNUNMPP-UHFFFAOYSA-N 0.000 description 1
• 238000002844 melting Methods 0.000 description 1
• 230000008018 melting Effects 0.000 description 1
• 239000002923 metal particle Substances 0.000 description 1
• 239000011812 mixed powder Substances 0.000 description 1
• 239000004570 mortar (masonry) Substances 0.000 description 1
• 150000004767 nitrides Chemical class 0.000 description 1
• 238000005121 nitriding Methods 0.000 description 1
• 239000012299 nitrogen atmosphere Substances 0.000 description 1
• QJGQUHMNIGDVPM-UHFFFAOYSA-N nitrogen(.) Chemical compound [N] QJGQUHMNIGDVPM-UHFFFAOYSA-N 0.000 description 1
• 230000003647 oxidation Effects 0.000 description 1
• 238000007254 oxidation reaction Methods 0.000 description 1
• 239000001301 oxygen Substances 0.000 description 1
• 229910052760 oxygen Inorganic materials 0.000 description 1
• 239000004033 plastic Substances 0.000 description 1
• 229920003023 plastic Polymers 0.000 description 1
• 229920002451 polyvinyl alcohol Polymers 0.000 description 1
• 235000019422 polyvinyl alcohol Nutrition 0.000 description 1
• 238000000634 powder X-ray diffraction Methods 0.000 description 1
• 238000002360 preparation method Methods 0.000 description 1
• 238000012545 processing Methods 0.000 description 1
• 239000002994 raw material Substances 0.000 description 1
• 238000011160 research Methods 0.000 description 1
• 235000009566 rice Nutrition 0.000 description 1
• 150000003377 silicon compounds Chemical class 0.000 description 1
• -1 silicon nitrides Chemical class 0.000 description 1
• 239000011856 silicon-based particle Substances 0.000 description 1
• 239000000126 substance Substances 0.000 description 1
• 239000000758 substrate Substances 0.000 description 1