JPH0351328B2 - - Google Patents
Info
- Publication number
- JPH0351328B2 JPH0351328B2 JP60268762A JP26876285A JPH0351328B2 JP H0351328 B2 JPH0351328 B2 JP H0351328B2 JP 60268762 A JP60268762 A JP 60268762A JP 26876285 A JP26876285 A JP 26876285A JP H0351328 B2 JPH0351328 B2 JP H0351328B2
- Authority
- JP
- Japan
- Prior art keywords
- surface acoustic
- acoustic wave
- reflector
- line width
- width ratio
- Prior art date
- Legal status (The legal status is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the status listed.)
- Expired - Lifetime
Links
- 238000010897 surface acoustic wave method Methods 0.000 claims description 52
- 229910052751 metal Inorganic materials 0.000 claims description 23
- 239000002184 metal Substances 0.000 claims description 23
- 239000000758 substrate Substances 0.000 claims description 20
- 230000008878 coupling Effects 0.000 description 6
- 238000010168 coupling process Methods 0.000 description 6
- 238000005859 coupling reaction Methods 0.000 description 6
- 238000000034 method Methods 0.000 description 5
- 239000007772 electrode material Substances 0.000 description 4
- 230000005855 radiation Effects 0.000 description 4
- 229910000838 Al alloy Inorganic materials 0.000 description 3
- 230000007423 decrease Effects 0.000 description 3
- 230000000694 effects Effects 0.000 description 3
- 238000004519 manufacturing process Methods 0.000 description 3
- 238000002844 melting Methods 0.000 description 3
- 230000008018 melting Effects 0.000 description 3
- WSMQKESQZFQMFW-UHFFFAOYSA-N 5-methyl-pyrazole-3-carboxylic acid Chemical compound CC1=CC(C(O)=O)=NN1 WSMQKESQZFQMFW-UHFFFAOYSA-N 0.000 description 2
- 229910052804 chromium Inorganic materials 0.000 description 2
- 238000010586 diagram Methods 0.000 description 2
- 238000003780 insertion Methods 0.000 description 2
- 230000037431 insertion Effects 0.000 description 2
- 238000007689 inspection Methods 0.000 description 2
- GQYHUHYESMUTHG-UHFFFAOYSA-N lithium niobate Chemical group [Li+].[O-][Nb](=O)=O GQYHUHYESMUTHG-UHFFFAOYSA-N 0.000 description 2
- 229910052750 molybdenum Inorganic materials 0.000 description 2
- 230000003287 optical effect Effects 0.000 description 2
- 239000002245 particle Substances 0.000 description 2
- 229910052721 tungsten Inorganic materials 0.000 description 2
- 229910018125 Al-Si Inorganic materials 0.000 description 1
- 229910018182 Al—Cu Inorganic materials 0.000 description 1
- 229910018520 Al—Si Inorganic materials 0.000 description 1
- 229910018575 Al—Ti Inorganic materials 0.000 description 1
- 239000013078 crystal Substances 0.000 description 1
- 230000005684 electric field Effects 0.000 description 1
- 238000010291 electrical method Methods 0.000 description 1
- 238000005530 etching Methods 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 239000000463 material Substances 0.000 description 1
- 238000010297 mechanical methods and process Methods 0.000 description 1
- 150000002739 metals Chemical class 0.000 description 1
- 230000010355 oscillation Effects 0.000 description 1
- 229920002120 photoresistant polymer Polymers 0.000 description 1
- 230000001902 propagating effect Effects 0.000 description 1
- 239000002344 surface layer Substances 0.000 description 1
- 229910052719 titanium Inorganic materials 0.000 description 1
- 238000001039 wet etching Methods 0.000 description 1
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26876285A JPS62128605A (ja) | 1985-11-29 | 1985-11-29 | 弾性表面波素子 |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP26876285A JPS62128605A (ja) | 1985-11-29 | 1985-11-29 | 弾性表面波素子 |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| JPS62128605A JPS62128605A (ja) | 1987-06-10 |
| JPH0351328B2 true JPH0351328B2 (ko) | 1991-08-06 |
Family
ID=17462966
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| JP26876285A Granted JPS62128605A (ja) | 1985-11-29 | 1985-11-29 | 弾性表面波素子 |
Country Status (1)
| Country | Link |
|---|---|
| JP (1) | JPS62128605A (ko) |
Families Citing this family (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPH02250415A (ja) * | 1989-03-23 | 1990-10-08 | Murata Mfg Co Ltd | 弾性表面波装置 |
| JPH02295212A (ja) * | 1989-05-09 | 1990-12-06 | Fujitsu Ltd | 弾性表面波共振子 |
| JP3442202B2 (ja) * | 1995-09-26 | 2003-09-02 | 富士通株式会社 | 表面弾性波フィルタ |
| JP4868124B2 (ja) * | 2006-02-22 | 2012-02-01 | セイコーエプソン株式会社 | 弾性表面波共振子 |
Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711520A (en) * | 1980-06-25 | 1982-01-21 | Toshiba Corp | Elastic surface wave resonator |
-
1985
- 1985-11-29 JP JP26876285A patent/JPS62128605A/ja active Granted
Patent Citations (1)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JPS5711520A (en) * | 1980-06-25 | 1982-01-21 | Toshiba Corp | Elastic surface wave resonator |
Also Published As
| Publication number | Publication date |
|---|---|
| JPS62128605A (ja) | 1987-06-10 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| LAPS | Cancellation because of no payment of annual fees |